Annelise C Thompson1, Kyra S Lee1, Nathan S Lewis1. 1. Division of Chemistry and Chemical Engineering, California Institute of Technology, Pasadena, California 91125, United States.
Abstract
Suspended chemiresistive graphene sensors have been fabricated using well-established nanofabrication techniques to generate sensors that are highly sensitive to pyridine and with excellent discrimination between polar and nonpolar analytes. When coated with a polymer surface layer and suspended on 3-D patterned glass electrodes, a hybrid combination of polymer and graphene yields chemiresistive vapor sensors. Expansion and contraction of the polymer layer produces strain on the suspended graphene (Gr). Hence, when organic vapors permeate into the polymer layer, the high gauge factor of the graphene induces substantial electrical resistive changes as folds and creases are induced in the graphene. The hybrid suspended polymer/Gr sensor exhibits substantial responses to polar organic vapors, especially pyridine, while also exhibiting reversibility and increased discrimination between polar and nonpolar analytes compared to previous approaches. This sensor design also allows for potential tunability in the types of polymers used for the reactive surface layer, allowing for use in a variety of potential applications.
Suspended chemiresistive graphene sensors have been fabricated using well-established nanofabrication techniques to generate sensors that are highly sensitive to pyridine and with excellent discrimination between polar and nonpolar analytes. When coated with a polymer surface layer and suspended on 3-D patterned glass electrodes, a hybrid combination of polymer and graphene yields chemiresistive vapor sensors. Expansion and contraction of the polymer layer produces strain on the suspended graphene (Gr). Hence, when organic vapors permeate into the polymer layer, the high gauge factor of the graphene induces substantial electrical resistive changes as folds and creases are induced in the graphene. The hybrid suspended polymer/Gr sensor exhibits substantial responses to polar organic vapors, especially pyridine, while also exhibiting reversibility and increased discrimination between polar and nonpolar analytes compared to previous approaches. This sensor design also allows for potential tunability in the types of polymers used for the reactive surface layer, allowing for use in a variety of potential applications.
Artificial olfactory
electronic systems have attracted interest
for air quality monitoring, medical diagnostics, explosives detection,
and other applications.[1−3] Arrays of cross-reactive, chemically sensitive resistors
provide an especially simple technological implementation of a vapor
detection and classification device.[4] When
exposed to volatile organic vapors, the analyte permeates and interacts
with the sensing material, producing a change in the dc resistance
of the film.[4,5] Different vapors can be classified
and quantified using pattern recognition algorithms.[4−6] In medical applications, biomarkers for diseases found in exhaled
human breath, such as increased levels of acetone, formaldehyde, and
pyridine, are of particular interest for rapid, point-of-care diagnostics.[2,7] A variety of materials have been explored as chemiresistive vapor
sensors, including intrinsically conducting or nonconducting polymers
loaded with conducting material such as carbon black (CB), as well
as capped metallic nanoparticles and other related systems.[4,6]Two-dimensional nanomaterials such as graphene have shown
potential
for sensors as well as in various applications such as microelectronics
and energy storage while also affording the opportunity to produce
elastic and flexible architectures.[8−11] In a pristine monolayer, graphene
is composed of sp2-hybridized carbon atoms that have unoccupied
pz-orbitals oriented perpendicular to the basal plane.
These pz-orbitals give rise to the impressive electronic
sensitivity of graphene, which has led to the integration of graphene
in pressure, piezoelectric, and chemical sensors. Hybrids of graphene
with metals, polymers, and combinations of the two have also been
widely explored.[12]Suspension of
graphene across a series of columns or trenches minimizes
substrate effects on the resulting device and yields an approach to
design sensitive graphene-based devices. Large chemiresistive responses
have been observed upon exposure to polar analytes when monolayer
graphene was used as a top contact on one-dimensional ZnO rods.[8] When suspended across a narrow trench, single-crystal
graphene exfoliated from highly ordered pyrolytic graphite yielded
devices with higher mobilities and sensitivities for dopamine than
graphene monolayers on planar, flat substrates.[13] Suspension of the graphene monolayer typically produces
effects on the nanoscale and requires time-intensive fabrication methods
such as electron-beam lithography. Additionally, the resulting devices
are delicate, and scale-up is challenging.Strain responses
have also been accessed by supporting or coating
graphene with a polymer and then bending the subsequent sensor to
induce strain in the graphene, detected as a change in resistivity.
With a thick polymer overlayer, the graphene fully conforms to the
polymer, so the graphene deforms as the shape of the polymer changes
through mechanical or chemical deformation. Graphene pressure sensors
are sensitive to small signals and are a well-developed area of study.[14] These strain-based graphene devices rely on
changes in the resistance of graphene at the surface produced by compressive
and tensile deformation of the lattice, which decreases and increases,
respectively, electron localization. Devices are most commonly formed
by encasing monolayer graphene in a stretchable polymer. This strain-based
approach is feasible because the graphene lattice can undergo substantial
deformation without breaking.[15] These polymer-coated
monolayers are used less frequently as chemical sensors, in part because
in these sensors, the graphene is typically integrated with a polymer
that does not readily and reversibly respond to the presence of a
vapor [i.e., polydimethylsiloxane (PDMS)].[16] However, these strain sensors typically have very high gauge factors,
providing large measurable changes in resistance to small amounts
of deformation, with some devices reported to have gauge factors of
over 200.[17,18] Additionally, the presence of the polymer
substantially improves the robustness of the suspended graphene due
to the combined strength of the materials.Vapor sensors involving
monolayer graphene also often suffer from
a lack of sensitivity because cleaned graphene is chemically inert
and stiff and consequently offers limited tunability in its response
and physical properties.[19] Typical transfer
methods involve the use of a polymer overlayer, such as polymethylmethacrylate
(PMMA) and PDMS, to support the graphene during etching of the supporting
metal and transfer to the target substrate.[20] A number of polymer-free transfer methods have been developed,[21] but the polymer-supported transfer is widely
used because it is relatively simple to implement, requires minimal
skill during transfer, and can be scaled relatively easily on the
lab scale to accommodate larger pieces of graphene. However, complete
removal of the polymer overlayer is difficult after the polymer-supported
transfer.[22] Extra cleaning steps are required
to remove the polymer, including washes in a suitable organic solvent
in which the supporting polymer is soluble. Frequently, a high-temperature
anneal under a reducing atmosphere, such as forming gas, is also required.
Typically, these methods do not fully remove the transfer polymer,
leaving behind networks of hardened polymer on the surface of the
graphene.[22,23]When graphene that has been transferred
using a polymer support
is used in a sensor, multiple studies have demonstrated that the remaining
polymeric residue gives rise to different responses than are observed
from a pristine monolayer of graphene that does not have such a residue.
For example, a pristine monolayer of graphene shows very low specificity
towards most volatile organic compounds (VOCs).[19] An advantage of using graphene in a sensor derives from
the ability to modify the graphene using physical or chemical methods,
in conjunction with the inherent sensitivity to impurities and strain
due to the underlying electronic structure of the graphene. Although
chemical and physical modification of graphene through exfoliation
from graphite, reaction with chemical precursors, or lithographic
patterning can lead to increased sensitivity, these techniques rely
on fundamentally changing the chemical structure of graphene through
the attachment of new functional groups or introduction of defects
to induce a response to a VOC of interest.[24]In contrast, limitations associated with the polymer-supported
transfer and any alteration of the monolayer of graphene can be minimized
by retaining the polymer overlayer covering the graphene. The specificity
that the polymer lends to the sensor and amplification of the sensor
response by the strain dependence of the graphene can therefore both
be exploited. Polymer composites have the advantage of better reproducibility
and strength than either the polymer or graphene alone, offering remarkable
transferable properties such as electrochemical reinforcement and
stability.[9] These composites have been
used in a variety of sensor device implementations but rely on integration
with oxidized graphene flakes as opposed to pristine graphene.[9,25,26]We describe herein a facile
fabrication method that allows partially
suspended monolayer graphene to be integrated with a vapor-responsive
polymer, producing a sensor with high responsivity to pyridine as
well as to a variety of other polar and nonpolar volatile organic
analytes. A patterned sensor substrate was developed to support graphene
as a partially suspended layer above the surface. By suspending the
graphene, the material is allowed to expand and contract in response
to the movement of the polymer overlayer. Additionally, the device
configuration allows exploitation of the sensitivity of the physical
and chemical properties of 2-D materials to the introduction of curvature,
folds, and creases.[27] Numerous studies
have reported the properties that result from folding and wrinkling
of graphene, and the unique behavior due to the curvature of suspended
graphene under mechanical stimulation.[8,17,28,29] The resulting chemiresistive
sensors can consequently access both the sensitivity of the graphene
monolayer and the specific response to organic vapors of different
polymer overlayers.
Results and Discussion
Several sets
of sensors were tested in this work, including 4%
Poly(ethylene-co-vinyl acetate) (PEVA) mixed with
CB (PEVA/CB) and 4% PEVA coated on graphene (PEVA/Gr) either on flat
substrates (flat) or on substrates with columns (col) (see Methods for details on fabrication). The response
from the sensors was quantified as the change in resistance (ΔRmax) with respect to the resistance of the baseline
(Rb), where Rp is the peak resistance of the sensorThe sensitivity of the sensors (SR)
was then quantified as the slope of the linear least-squares fit of
ΔRmax/Rb (ΔR) versus P/Po. P̅ is the mean of the exposure
partial pressures relative to the vapor pressure of the analyte (P/Po), is the mean of the ΔRmax/Rb values, p is the value of (P/Po) at the ith exposure, and ΔR is the ΔRmax/Rb value at the respective p valueThe sensors developed in this work used a conductive monolayer
of graphene coated with a layer of PEVA deposited onto a substrate
patterned with columns to generate a signal in the presence of a VOC
(Figure A). As the
micrographs in Figures B,C show, the columns do not allow the graphene to fully adhere to
the surface, leaving a gap between the bottom of the column and the
monolayer of graphene. Less adherence is expected from 4% PEVA/Gr
layers as this combined layer should be less flexible than graphene
alone, increasing the gap between the columns and the 4% PEVA/Gr layer.
Typical conductive polymer composite sensors contain CB as a conductive
material. The percent composition of CB determines the baseline resistance
and the optimal sensor response, so several control sensors were fabricated
with CB and with monolayer graphene. These control sensors included
a monolayer of graphene with no polymer on a flat substrate or columns,
PEVA/CB transferred identically to graphene on a flat substrate or
columns, and PEVA/CB sprayed onto a flat substrate (Figure ). Strikingly, the PEVA/CB
composite sprayed onto the surface of a substrate showed a large negative
response to ethanol and ethyl acetate, in accord with behavior that
has been reported previously for such sensors,[30] whereas the PEVA/CB composites formed as uniform films
showed a positive response to these analytes (Figure S2).[31] However, the PEVA/CB
composites transferred identically to graphene in this work were composed
of 4% PEVA as compared to 2% PEVA deposited by an airbrush because
4% PEVA was the lowest concentration that was sufficiently stable
for the graphene transfer. Further optimization of the concentration
of PEVA used to transfer the graphene used in these sensors was not
pursued due to challenges with the transfer process.
Figure 1
Schematic of the sensor
used in this work and scanning electron
micrographs of the underlying monolayer of graphene on the sensor
surface. (A) A monolayer of graphene is transferred to the sensor
body by means of the supportive 4% PEVA overlayer. On exposure to
a VOC, the 4% PEVA overlayer deforms the underlying monolayer of graphene,
producing a detectable change in resistance. (B) Representative image
of a single 150 nm tall column within the sensing region of a device.
Some areas around the column are visible where the graphene had not
completely adhered to the underlying surface. (C) Closer view of the
same column. The monolayer of graphene is stretched out from the top
of the column to the underlying surface.
Figure 2
SR values for the control sensors versus
PEVA/Gr on columns [4% PEVA/Gr (col)] exposed to six different VOCs
in a range of concentration (0.001 ≤ P/Po ≤ 0.005) at a flow rate of 3000 mL
min–1 under N2 as the carrier gas. Substrates
with columns were all 150 nm in height. Each value is the average
of four vapor sensors per sensor type exposed to 4 different VOC concentrations,
where the SR value was calculated using
a linear least-squares fit to determine the slope of ΔRmax/Rb versus P/Po. For most of the analytes,
the SR value was the highest for 4% PEVA/Gr
(col). This geometry produced larger relative differential resistance
changes than analogous PEVA/CB or bare graphene chemiresistive sensors
under nominally similar test conditions.
Schematic of the sensor
used in this work and scanning electron
micrographs of the underlying monolayer of graphene on the sensor
surface. (A) A monolayer of graphene is transferred to the sensor
body by means of the supportive 4% PEVA overlayer. On exposure to
a VOC, the 4% PEVA overlayer deforms the underlying monolayer of graphene,
producing a detectable change in resistance. (B) Representative image
of a single 150 nm tall column within the sensing region of a device.
Some areas around the column are visible where the graphene had not
completely adhered to the underlying surface. (C) Closer view of the
same column. The monolayer of graphene is stretched out from the top
of the column to the underlying surface.SR values for the control sensors versus
PEVA/Gr on columns [4% PEVA/Gr (col)] exposed to six different VOCs
in a range of concentration (0.001 ≤ P/Po ≤ 0.005) at a flow rate of 3000 mL
min–1 under N2 as the carrier gas. Substrates
with columns were all 150 nm in height. Each value is the average
of four vapor sensors per sensor type exposed to 4 different VOC concentrations,
where the SR value was calculated using
a linear least-squares fit to determine the slope of ΔRmax/Rb versus P/Po. For most of the analytes,
the SR value was the highest for 4% PEVA/Gr
(col). This geometry produced larger relative differential resistance
changes than analogous PEVA/CB or bare graphene chemiresistive sensors
under nominally similar test conditions.PEVA/Gr (col) exhibited the largest sensitivity of all the sensors
for most of the analytes, including pyridine (28–138 ppm),
acetone (301–1506 ppm), ethyl acetate (124–618 ppm),
and tetrahydrofuran (THF) (213–1066 ppm), except for toluene
and ethanol. For both toluene and ethanol, PEVA/CB (col) showed the
largest sensitivity of the sensors evaluated. Figure shows the linearity of responses of the
sensor coated with Gr/PEVA to a single pulse of a range of concentrations
of pyridine vapor (28–138 ppm). Upon exposure of the sensor
to the analyte, the resistance steadily increased until the analyte
was purged from the chamber, at which point the resistance decreased
very slowly and flattened. The pulse peaks for the Gr/PEVA (col) were
slower to respond and recover, whereas the other controls [bare Gr
(col), 4% PEVA/CB (col), 4% PEVA/CB (flat)] exhibited much smaller
but more rapid and reversible responses (Figure S3). The control sensors with 4% PEVA/CB on flat substrates
or substrates with columns were more reversible than a bare monolayer
of graphene on columns after the analyte exposure. This behavior suggests
that the PEVA polymer overlayer with graphene not only makes the sensor
less flexible and perhaps stiffer and slower in its recovery but also
exhibits a higher resistance change when strained. In comparison,
the remaining control sensors [bare graphene (flat), 4% PEVA/Gr (flat)]
typically produced lower and noisier sensor responses, likely due
to the strong adhesion of the graphene to the sensor substrate.
Figure 3
Typical sensor
responses when exposed to 28, 55, 82, and 138 ppm
of pyridine at a flow rate of 3000 mL min–1 under
N2 as the carrier gas. The times at which the sensor was
exposed to the analyte and purged with the carrier gas, respectively,
are marked on the plot.
Typical sensor
responses when exposed to 28, 55, 82, and 138 ppm
of pyridine at a flow rate of 3000 mL min–1 under
N2 as the carrier gas. The times at which the sensor was
exposed to the analyte and purged with the carrier gas, respectively,
are marked on the plot.(A) SR values for controls of column
pillar height for suspended hybrid graphene sensors exposed to six
different VOCs at 0.001 ≤ P/Po ≤0.005 at a flow rate of 3000 mL min–1 under N2 as the carrier gas. Pyridine characteristically
exhibited an increase in response as column height increased. (B)
An expanded ordinate of the responses except for pyridine. For the
majority of VOCs, 150 nm column heights produced the largest response.The column height was varied to ascertain the optimal
response
of the sensors, and changes to the column height were expected to
change the degree to which the PEVA/Gr stack adhered to the underlying
substrate. For most analytes, a 150 nm pillar height resulted in the
highest sensitivity, except for pyridine and toluene, for which the
sensitivity increased substantially as the column height increased,
although the response of pyridine was an order of magnitude higher
than that of toluene (Figure ). Pyridine and toluene are similar in chemical structure
and size but differ in polarity, consistent with the observation that
higher columns are required to obtain an optimal response from both
of these VOCs. Aromatic compounds have noncovalent interactions available
with graphene through π–π stacking, so the height
dependence also suggests that these analytes benefit from larger areas
of exposed graphene with which to interact.
Figure 4
(A) SR values for controls of column
pillar height for suspended hybrid graphene sensors exposed to six
different VOCs at 0.001 ≤ P/Po ≤0.005 at a flow rate of 3000 mL min–1 under N2 as the carrier gas. Pyridine characteristically
exhibited an increase in response as column height increased. (B)
An expanded ordinate of the responses except for pyridine. For the
majority of VOCs, 150 nm column heights produced the largest response.
In addition to column
height, the thickness of the polymer overlayer
was varied to obtain the optimal response for the sensors to the VOCs
evaluated in this work. Figure shows the responses for sensors with the polymer overlayer
deposited at speeds between 1000 and 8000 rpm. 75 nm (6k rpm) thick
films showed the largest sensitivity to most analytes except for toluene,
with the responses decreasing substantially for sensors having thinner
layers of PEVA. A PEVA layer of 320 nm in thickness exhibited comparable
responses, but these layers were more difficult to fabricate uniformly
due to the slower spin speed involved, leading to the wide range of
responses reflected by the width of the shown error bars. To maintain
ease of fabrication, high responsivity, and more flexibility in the
polymer overlayer, the thinner 75 nm layer was selected for further
investigation.
Figure 5
SR values of controls for
polymer overlayer
thickness exposed to 6 different VOCs at 0.001 ≤ P/Po ≤0.005 at a flow rate of 3000
mL min–1 under N2 as the carrier gas.
The quoted spin speed in thousands (k) of rpm produced a polymer film
of thickness: 1 k (320 nm), 2 k (220 nm), 3 k (160 nm), 4 k (130 nm),
5 k (80 nm), 6 k (∼75 nm), 7 k (∼73 nm), and 8 k (∼71
nm), respectively. A spin speed of 6 k (∼75 nm resulting film
thickness) produced the best response for the majority of the exposures. SR values were larger for pyridine than for the
other VOCs tested.
SR values of controls for
polymer overlayer
thickness exposed to 6 different VOCs at 0.001 ≤ P/Po ≤0.005 at a flow rate of 3000
mL min–1 under N2 as the carrier gas.
The quoted spin speed in thousands (k) of rpm produced a polymer film
of thickness: 1 k (320 nm), 2 k (220 nm), 3 k (160 nm), 4 k (130 nm),
5 k (80 nm), 6 k (∼75 nm), 7 k (∼73 nm), and 8 k (∼71
nm), respectively. A spin speed of 6 k (∼75 nm resulting film
thickness) produced the best response for the majority of the exposures. SR values were larger for pyridine than for the
other VOCs tested.The sensors were similarly
optimized for the number of columns
on the substrate, as an increase in the number of columns was expected
to increase the overall signal from a sensor (Figure ). The standard pattern had columns with
a 3 μm diameter and a pitch of 7 μm. The pitch was then
varied between 3 and 120 μm, with a constant thickness of polymer
overlayer and size of the transferred Gr/PEVA sheet. As expected,
the sensor response decreased as the number of columns decreased,
likely due to fewer locations where the strain in the polymer overlayer
could effectively translate to strain in the underlying graphene.
Interestingly, the response of the sensors exhibited a plateau at
∼5 × 105 columns, indicating that further study
of different patterns with reduced diameters and closer spacing could
be valuable.
Figure 6
SR values of controls for
columns/pitch
of the substrate at various 6 different VOCs at 0.001 ≤ P/Po ≤0.005 at a flow
rate of 3000 mL min–1 under N2 as the
carrier gas. The number of columns correlated to the pitch as 4.3
million columns (3.5 μm), 2 mil (7.5 μm), 1 mil (15 μm),
500 k (30 μm), 250 k (60 μm), and 125 k (120 μm),
respectively. SR values were largest at a 7 μm pitch
for ethyl acetate, pyridine, and THF.
SR values of controls for
columns/pitch
of the substrate at various 6 different VOCs at 0.001 ≤ P/Po ≤0.005 at a flow
rate of 3000 mL min–1 under N2 as the
carrier gas. The number of columns correlated to the pitch as 4.3
million columns (3.5 μm), 2 mil (7.5 μm), 1 mil (15 μm),
500 k (30 μm), 250 k (60 μm), and 125 k (120 μm),
respectively. SR values were largest at a 7 μm pitch
for ethyl acetate, pyridine, and THF.The reproducibility of the responses of the optimized sensor (PEVA/Gr
on a substrate with 150 nm high columns with a 3 μm diameter
and 7 μm pitch) was probed through repeated measurements of
the response to the same concentration of the analyte. Figure A shows the response of an
optimized sensor to repeated exposures of pyridine at 28 ppm. After
repeated exposures, the response decreased over time to a plateau
at 60% of the original signal (Figure B). However, after extended exposure to background
N2(g), the sensor recovered the initially observed full
response. The mean of the first 10 exposures prior to the extended
rest was 0.99% with a 95% confidence interval (CI) of ±0.06%,
whereas the mean of the first 10 exposures after an extended rest
was 1.11% with a 95% CI of ±0.07%. One-way analysis of the variance
yielded an F-value of 7.5417 and a p-value of 0.0133, indicating that the results before and after 100
consecutive exposures were statistically distinct. The higher mean
after the first 100 exposures suggests that the performance of the
sensor may improve over time.
Figure 7
(A) Optimized pyridine response at 28 ppm (nitrogen
carrier gas
at a flow rate of 3000 mL min–1) showing reproducibility
in response to repeated exposure, with 200 s under N2 between
exposures. (B) Comparison of initial 20 exposures (black) versus sensor
response after being subjected to 100 pyridine exposures at 28 ppm
(red) under N2 as the carrier gas at a flow rate of 3000
mL min–1 after being allowed to recover for 24 h
under N2(g).
(A) Optimized pyridine response at 28 ppm (nitrogen
carrier gas
at a flow rate of 3000 mL min–1) showing reproducibility
in response to repeated exposure, with 200 s under N2 between
exposures. (B) Comparison of initial 20 exposures (black) versus sensor
response after being subjected to 100 pyridine exposures at 28 ppm
(red) under N2 as the carrier gas at a flow rate of 3000
mL min–1 after being allowed to recover for 24 h
under N2(g).To better understand
the ability of these sensors to distinguish
between different analytes, the discrimination performance was analyzed
using principal components analysis (PCA) (Figure ). The first, second, and third projections
of the principal components (PCs) showed that the hybrid graphene
polymer sensor array clearly separated polar from nonpolar vapors.
Additional plots of this data illustrating the separation between
VOCs can be found in the Supporting Information (Figure S8). Overlaps between data clusters were observed, especially
for some groups of the polar aprotic vapors (group 1: THF, ethyl acetate,
and acetone; group 2: isopropanol, ethanol), although these groups
were mutually discriminated as were dimethylformamide (DMF) and pyridine.
Moreover, pyridine generally exhibited the highest resistive response
and produced a unique fingerprint relative to its aprotic polar counterparts.
This behavior indicates that the nitrogen-based functional groups
may have a specific effect on the PEVA/Gr sensors, likely due to interactions
with the underlying graphene layer.
Figure 8
PCA of the response of an array of graphene
polymer hybrid suspended
on a patterned electrode. The responses showed a clear separation
between polar and nonpolar analyte vapors. Although much less distinction
was present between acetone, ethyl acetate, and THF, good separation
was observed between aprotic and protic polar VOCs.
PCA of the response of an array of graphene
polymer hybrid suspended
on a patterned electrode. The responses showed a clear separation
between polar and nonpolar analyte vapors. Although much less distinction
was present between acetone, ethyl acetate, and THF, good separation
was observed between aprotic and protic polar VOCs.In comparison, previous PCA analysis of the response of an
unmodified
graphene sensor showed groupings between chemically similar compounds
and separations between polar and nonpolar groups.[32] In this work, the PEVA/Gr sensors on substrates with columns
showed equal, if not greater, separation between polar and nonpolar
groups while also exhibiting unique fingerprints for compounds like
pyridine, which was not evaluated on the unmodified graphene sensor.
Pyridine is a known component of tobacco and cigarette smoke and can
be used as a biomarker in disease detection.[33] The selective detection of pyridine suggests that this family of
sensor designs could be used as part of a cross-reactive sensor array
for environmental and occupational health sensing from human breath.
Moreover, the optimized sensor in this work serves more generally
as an example of a methodology to target a specific functionality
or functional group with otherwise cross-reactive sensors.The
response of the optimized sensors described herein was a strong
function of the number of columns (Figure ), with increases in the number of columns
leading to a higher response until a plateau was reached at 5 ×
105 columns. This plateau indicates that on this scale,
the resistance change in the graphene is limited by the degree of
strain that an analyte can impose on this configuration on the PEVA/Gr
stack. The observed response also depended on the thickness of the
polymer overlayer, scaling linearly with the square root of the film
thickness (Figure ). The optimal thickness was ∼75 nm, whereas the optimal spacing
was obtained using columns with a 3 μm diameter and 7 μm
pitch. Although the signal degraded with time, the sensors exhibited
highly reproducible responses, exhibiting complete recovery over repeated
exposures (×100) with longer recovery periods. Further work on
these sensors, such as changing the patterning on the underlying substrate
or modifying the polymer overlayer could allow for further tuning
of the performance and could potentially decrease the recovery time
of the sensors.
Conclusions
Polymer-coated monolayer
graphene can be integrated with a simple
patterned electrode to produce a larger chemiresistive response to
organic analyte vapors than a polymer-CB film or bare graphene. The
use of hybrid materials can allow for programmed chemiresistive sensors
with tunability in the various types of polymers that can be coupled
with graphene. The response is controlled by the structure of the
underlying substrate along with the thickness of the polymer overlayer.
The sensor had a long recovery time in successive tests compared to
the control sensors but recovered full functionality after extended
exposure to a background gas. The sensitivity to pyridine increased
as the column height increased, consistent with expectations for an
enhanced ability of the sensor to expand and contract, resulting in
large changes in the resistance. A hybrid graphene/polymer sensor
array exhibited clear discrimination between polar, nonpolar, aprotic,
and protic vapors with unique fingerprints for DMF and pyridine. Different
polymer support layers on monolayer graphene within a larger array
of cross-reactive sensors could allow for a similar sensor design
to target other VOCs of interest.
Methods
Materials
CVD-grown monolayer graphene on Cu (Cu/Gr)
was purchased from Advanced Chemical Supplier Materials (Medford,
MA). Grains of graphene from this source were ∼50 μm
in diameter, as reported by the manufacturer. PEVA (vinyl acetate,
18 wt %) was purchased from Sigma-Aldrich and used without further
purification. Black Pearls 2000 CB was purchased from Cabot Corporation.
All solvents were reagent grade from VWR and were used without further
purification to generate the vapors tested herein.
Sensor Fabrication
The patterned sensor substrates
were prepared in a Class 100 cleanroom. Glass slides were first cleaned
with acetone and isopropanol before being baked at 170 °C to
remove any residual solvent. Microposit S1813 photoresist (MicroChem)
was spun onto the cleaned slide at 500 rpm for 30 s and then at 4000
rpm for another 60 s, followed by a 10 s exposure through the appropriate
mask to a 425 nm lamp in a contact mask aligner (Suss MicroTech MA6/BA6).
The pattern was developed in MF-319 developer (MicroChem) for 90 s.
Columns of different heights were grown on the patterned slide by
using an e-beam evaporator to deposit 50–300 nm of SiO2 (CHA Industries Mark 40). Lift-off was completed by sonicating
the slides at 60 °C in Remover PG (MicroChem) for 45 min. Contacts
were formed by sequentially evaporating 5 nm of Ti, followed by 45
nm of Au, onto masked glass slides. This process produced two metallic
electrodes that were separated by a 0.3 cm gap.Solutions of
4 wt % PEVA in toluene were sonicated for 2–4 h until the PEVA
was well dispersed. To make the coated sensors, a strip of Cu covered
by a monolayer of graphene (Cu/Gr) was coated with a supporting layer
of PEVA at a specified rotation rate (1000–8000 rpm) for 60
s. The resulting stack (Cu/Gr/PEVA) was then cured for 1 min at 150
°C. Smaller pieces, ∼1 cm × 3 mm (active area ∼0.1–0.2
cm2), were cut and subsequently etched in an FeCl3 solution (Copper etch, Transene) until the Cu disappeared by visual
inspection, generally requiring 1.5 h. This Cu-free piece (Gr/PEVA)
was transferred for 1 h to a bath that contained ≥18.2 MΩ
cm resistivity H2O before transfer to a second clean H2O bath, in which the sample was immersed for 12 h. After transfer
to a final fresh H2O bath, the stack was pulled onto the
appropriate sensor substrate and dried using a gentle stream of N2(g).The sensors used as controls were fabricated using
similar transfer
techniques. Solutions of 4 wt % PEVA and 1 wt % CB were sonicated
for 2–4 h until the CB was well-dispersed. The solution was
then spun onto bare Cu and transferred as described above, or alternatively
was applied to the sensors using an airbrush. Gr without a PEVA coating
was transferred with a supporting layer of 495 K A4 polymethyl methacrylate
(PMMA, MicroChem) spun at 3000 rpm for 60 s. After transfer, the PMMA
was removed by soaking the sensor for 10 min in acetone.
Sensor Measurements
Sensors were tested using a custom
setup that has been described previously.[4−6] Organic vapors
were generated by sparging N2(g) at a flow rate of 3000
mL min–1 through 45 cm tall bubblers that had been
filled with the appropriate solvents. The analyte concentration was
controlled by adjusting the volumetric mixing ratio of the saturated
analyte stream to the background N2(g) stream. The flow
rates of the background and analyte gases, respectively, were regulated
using mass flow controllers. Each run started with 700 s of background
data collection. Each analyte exposure consisted of 200 s of a pure
background gas, 80 s of the diluted analyte, and then 200 s of a background
gas to purge the system, all at a flow rate of 3000 mL min–1. The sensors were loaded into a rectangular, 16-slot chamber that
was connected by Teflon tubing to the gas delivery system. The resistance
of each of the sensors in the array was measured by a Keysight Technologies
34970A data acquisition/switch unit with a Keysight 34903A 20 Channel
Actuator. The measurement electronics were interfaced with a computer
via a GPIB connection and were controlled with LabVIEW software.The classification ability of the Gr/PEVA column sensors was visualized
using PCA. PCA was performed on 16 individual hybrid graphene polymer
arrays. For all volatile organic carbon (VOC) vapors, 20 test exposures
were recorded at P/Po = 0.0050, where P is the partial pressure and Po is the vapor pressure of the analyte at room
temperature.
Sensor Characterization
Profilometric
data of the polymer
overlayers were collected on a Bruker Dektak XT profilometer using
a probe with a 2 μm tip radius. Atomic force microscopy (AFM)
images of the sensors were collected using a Bruker Dimension Icon
AFM. Raman spectra were collected with a Renishaw Raman microscope
at a wavelength of 532 nm through an objective with a numerical aperture
of 0.75. The laser power was ∼3 mW.
Signal Processing
All data processing was performed
using custom routines in Origin and R. The relative differential resistance
change, ΔRmax/Rb, was calculated from Rmax, the baseline-corrected response maximum upon exposure of the sensor
to the test analyte and the baseline resistance under inert N2, Rb. A spline was fitted to the
baseline data during the initial baseline preexposure period, and
the values of ΔRmax/Rb were calculated by subtracting the values of the spline
over the extrapolated exposure time from the observed resistance during
the length of exposure. SR values were
calculated using linear least-squares fitting of ΔRmax/Rb versus analyte concentration.Sensor discriminant performance was visualized using PCA. The normalized
data were mean-centered, and the diagonalized data set of the covariance
matrix was transformed into sets of dimensions in terms of PCs. The
largest amount of variance is captured in the first PC, while the
second PC was orthogonal to the first PC and captured the second-most
variance in the data. The normalized mean-centered data were projected
onto the first and second PCs in accord with their respective coordinate
vectors as observed through their corresponding eigenvalues and eigenvectors.
Authors: Alfonso Reina; Xiaoting Jia; John Ho; Daniel Nezich; Hyungbin Son; Vladimir Bulovic; Mildred S Dresselhaus; Jing Kong Journal: Nano Lett Date: 2009-01 Impact factor: 11.189
Authors: Vasilios Georgakilas; Michal Otyepka; Athanasios B Bourlinos; Vimlesh Chandra; Namdong Kim; K Christian Kemp; Pavel Hobza; Radek Zboril; Kwang S Kim Journal: Chem Rev Date: 2012-09-25 Impact factor: 60.622
Authors: Guohui Zhang; Aleix G Güell; Paul M Kirkman; Robert A Lazenby; Thomas S Miller; Patrick R Unwin Journal: ACS Appl Mater Interfaces Date: 2016-03-18 Impact factor: 9.229