Julian Hengsteler1, Barnik Mandal1, Cathelijn van Nisselroy1, Genevieve P S Lau2, Tilman Schlotter1, Tomaso Zambelli1, Dmitry Momotenko1,3. 1. Laboratory of Biosensors and Bioelectronics, Institute for Biomedical Engineering, ETH Zurich, Zurich CH-8092, Switzerland. 2. School of Physical and Mathematical Sciences, Division of Chemistry and Biological Chemistry, Nanyang Technological University, 637371, Singapore. 3. Department of Chemistry, Carl von Ossietzky University of Oldenburg, Oldenburg D-26129, Germany.
Abstract
Nanoscale 3D printing is attracting attention as an alternative manufacturing technique for a variety of applications from electronics and nanooptics to sensing, nanorobotics, and energy storage. The constantly shrinking critical dimension in state-of-the-art technologies requires fabrication of complex conductive structures with nanometer resolution. Electrochemical techniques are capable of producing impurity-free metallic conductors with superb electrical and mechanical properties, however, true nanoscale resolution (<100 nm) remained unattainable. Here, we set new a benchmark in electrochemical 3D printing. By employing nozzles with dimensions as small as 1 nm, we demonstrate layer-by-layer manufacturing of 25 nm diameter voxels. Full control of the printing process allows adjustment of the feature size on-the-fly, printing tilted, and overhanging structures. On the basis of experimental evidence, we estimate the limits of electrochemical 3D printing and discuss the origins of this new resolution frontier.
Nanoscale 3D printing is attracting attention as an alternative manufacturing technique for a variety of applications from electronics and nanooptics to sensing, nanorobotics, and energy storage. The constantly shrinking critical dimension in state-of-the-art technologies requires fabrication of complex conductive structures with nanometer resolution. Electrochemical techniques are capable of producing impurity-free metallic conductors with superb electrical and mechanical properties, however, true nanoscale resolution (<100 nm) remained unattainable. Here, we set new a benchmark in electrochemical 3D printing. By employing nozzles with dimensions as small as 1 nm, we demonstrate layer-by-layer manufacturing of 25 nm diameter voxels. Full control of the printing process allows adjustment of the feature size on-the-fly, printing tilted, and overhanging structures. On the basis of experimental evidence, we estimate the limits of electrochemical 3D printing and discuss the origins of this new resolution frontier.
Entities:
Keywords:
additive manufacturing; electrodeposition; meniscus-confined; metal printing; nanopipette
Fabrication
of complex arbitrary-shaped
objects with nanoscale dimensions determines the future development
in a variety of disciplines. Advanced optical technologies,[1] sensing,[2] micro- and
nanorobotics,[3−5] and more efficient energy storage,[6−8] all require
structural and functional elements with feature sizes in the nanometer
scale. While conventional planar fabrication technologies are often
incapable to produce intricate 3D designs, additive manufacturing
(AM), or 3D printing, offers an enormous potential for direct production
of complex architectures.Among existing nanoscale 3D printing
techniques, stereolithography
is probably the most advanced in producing complex objects composed
of voxels with dimensions down to 65 nm.[9,10] However, optical
methods typically process only a limited class of materials, such
as photoresists, which exhibit rather narrow mechanical, optical,
and electrical characteristics. Electrically conductive features,
much needed for many applications, have been produced with another
family of methods, such as focused electron or ion beam techniques,[11−13] which offer probably the highest AM resolution down to 8 nm.[14] Their major drawback is the high carbon contamination
due to the organic components in the precursor gas[15] that often makes the as-printed features unsuitable for
applications, especially in fields like nanoelectronics or nanooptics,
thus rendering the need for postprocessing.In this light, electrochemical
AM is advantageous, as it enables
the production of dense conductive materials directly in a single
step.[16] Electrochemistry offers intrinsic
simplicity, high degree of control over the morphology of the resulting
features,[17] and simpler impurity or composition
content management.[18] For microscale electrochemical
3D printing, the deposition has to be confined to a small area by
localized delivery of a precursor species in a liquid bath.[19,20] Although this allowed fabrication of impressively complex features,
like a 1:70 000 replica of a Michelangelo’s David,[21] it seems difficult to achieve higher confinement
below the submicroscale in liquid environment.[22] A strategy to overcome this issue is to confine the electroplating
process within a liquid meniscus formed in air between a capillary
tip and a substrate.[17,23−25] A way to achieve
smaller feature dimensions is to employ print nozzles with smaller
openings. This rather trivial idea is, however, difficult to implement
in practice, as it requires high precision in synchronizing nozzle
movement with feature growth with increasing probability of tip clogging
or losing the meniscus. Previous attempts to print with nanoscale
nozzles failed to bring the resolution below the 100 nm mark and the
best to date resolution in printing copper structures (highly conductive
and commonly used in nanoelectronics) is 250 nm.[26]Herein, we introduce a novel approach for electrochemical
AM capable
of producing 3D nanoscale features in a fully automated manner. Our
printing strategy, based on rapid forming and breaking of the meniscus,
allows precise control of the printing process with the possibility
to tune the voxel size on-the-fly and is perfectly fitted for nanofabrication
in a layer-by-layer manner. Using ultrasmall nozzles with diameters
as small as 1.6 nm, we approach the resolution frontier of electrochemical
3D printing with feature sizes around 25 nm.
Printing Principle
Figure a illustrates
the experimental setup for
meniscus-confined electrochemical AM. It consists of a print nozzle
filled with electrolyte solution containing metal precursor ions (herein,
Cu2+), and a conductive substrate, which is biased with
respect to a quasi-reference counter electrode inside the capillary.
Precise positioning of the nozzle is achieved with an integrated micro-
and nanopositioning system that combines micromotors for coarse movement
and fine nanoscale translation with piezo actuators.
Figure 1
(a) Schematic of the
printing setup. The nozzle, containing the
electrolyte solution and the quasi-reference counter electrode, is
placed above a conductive substrate that constitutes the working electrode
of the two-electrode electrochemical cell. The substrate and the nozzle
are translated with respect to each other by piezoelectric nanopositioners.
(b) Schematic of the printing process of a voxel. A negative voltage
is applied between the substrate and the quasi-reference/counter-electrode.
(I,II) The pipette approaches the substrate until the current drops
below a preset threshold value due to the formation of a liquid meniscus.
The copper cations in the electrolyte are reduced to copper on the
substrate. (III) To prevent copper growth into the nozzle, the pipette
is retracted immediately after the faradaic current reaches the threshold
until the meniscus is broken and hence electrodeposition is halted.
(IV,V) This procedure is repeated until a certain voxel height is
reached. The gray arrows next to the nozzle indicate the direction
of the vertical movement of the nozzle. The current and distance graphs
in the top row depict the vertical piezo displacement (upper, red)
and the evolution of the electrical current (lower, blue) during the
printing process. (c–e) Electron microscope images of 3D printed
structures with a 253 nm nozzle. (c) Sideview of a 10 × 10 array
of pillars (656 voxels) forming a Gaussian peak with increasing heights
toward the center of the array. Side (d) and top (e) view on four
helical structures printed with a center-to center spacing of 500
nm.
(a) Schematic of the
printing setup. The nozzle, containing the
electrolyte solution and the quasi-reference counter electrode, is
placed above a conductive substrate that constitutes the working electrode
of the two-electrode electrochemical cell. The substrate and the nozzle
are translated with respect to each other by piezoelectric nanopositioners.
(b) Schematic of the printing process of a voxel. A negative voltage
is applied between the substrate and the quasi-reference/counter-electrode.
(I,II) The pipette approaches the substrate until the current drops
below a preset threshold value due to the formation of a liquid meniscus.
The copper cations in the electrolyte are reduced to copper on the
substrate. (III) To prevent copper growth into the nozzle, the pipette
is retracted immediately after the faradaic current reaches the threshold
until the meniscus is broken and hence electrodeposition is halted.
(IV,V) This procedure is repeated until a certain voxel height is
reached. The gray arrows next to the nozzle indicate the direction
of the vertical movement of the nozzle. The current and distance graphs
in the top row depict the vertical piezo displacement (upper, red)
and the evolution of the electrical current (lower, blue) during the
printing process. (c–e) Electron microscope images of 3D printed
structures with a 253 nm nozzle. (c) Sideview of a 10 × 10 array
of pillars (656 voxels) forming a Gaussian peak with increasing heights
toward the center of the array. Side (d) and top (e) view on four
helical structures printed with a center-to center spacing of 500
nm.Herein, we employed quartz nanopipettes
with opening diameters
of 1.6 ± 0.7, 2 ± 1, 45 ± 10 and 253 ± 88 nm (Supporting Information SI-1) as print nozzles.
As the probability of aperture clogging by the electrodeposited feature
increases at the nanoscale, we introduced an automated feedback mechanism
that eliminates this issue. The operational principle is illustrated
in Figure b. The nozzle
approaches the biased substrate while the electrical current is constantly
monitored (I) with a high gain current amplifier. The bias is chosen
to a value more negative than the onset potential of the electroreduction
(−0.29 V for copper, Supporting Information SI-2). When the nozzle is suspended in air, no electrical current
is measured and the signal is determined by the electrical noise.
As the tip of the nanopipette is brought close enough to the substrate,
a liquid meniscus is formed that completes the electrical flow path
and the electrodeposition process starts. The magnitude of the current
rapidly increases and as soon as it exceeds the user-defined threshold
(II) the pipette is retracted until the current value drops below
the set point (III). If the feedback threshold is small enough, the
meniscus breaks and the current stops flowing. Then, the pipette reapproaches
the substrate (IV) and the process repeats (V) until the desired voxel
height is printed, as monitored by the piezopositioner’s sensor.
In each cycle, the meniscus exists for only a few milliseconds (∼1000
times faster than in other approaches[24]), and the electroreduction results in a few nanometers-thick chemically
pure metal layer (Supporting Information SI-3 and SI-4).Figure c–e
demonstrate the capabilities of this approach for submicroscale AM
with a relatively large nozzle (diameter 253 nm). An array of pillars
forming a 3D Gaussian peak (Figure c) was printed in a layer-by-layer approach comprising
656 voxels with 240 nm individual voxel heights. The surface of the
pillars reveals single layers resulting from individual cycles of
electrodeposition. Figure d,e demonstrates that this approach is also suitable for producing
more intricate geometries that deviate from the simple straight vertical
shapes and highlights the method’s 3D capabilities. The layer-by-layer
fabrication of four curved helix-like features further illustrates
this, with the top view of the helices in Figure e showing the precision and print quality
of the closely positioned features.
Control of the Printing
Process
Interestingly, the
feature size strongly depends on the electrodeposition parameters,
namely, the printing voltage and the faradaic current (feedback threshold).
These determine the quantity of metal deposited at each cycle of the
process. Figure a,b
reveals the effect of the printing potential (−0.55 to −0.35
V with a constant feedback threshold of −4 pA) on the feature
size, printed with a 45 nm aperture nozzle. The diameters of the printed
pillars extracted from the electron microscope image and as estimated
from the data (Supporting Information SI-5) are summarized in Figure b. Estimating the feature size is convenient to track the
printing process in situ, but there is a certain
mismatch between the estimation and SEM measurement that originates
from numerical errors in the current integration. The feature size
increases linearly with the increase of the cathodic potential from
59 nm (±3 nm) at −0.35 V to 106 nm (±3 nm) at −0.55
V. Most likely, this result is caused by electrowetting that leads
to a change in the solid–electrolyte contact angle at larger
voltages, resulting in a larger meniscus footprint (Supporting Information SI-6). Also, the higher cathodic potential
leads to increased current amplitudes and thus faster rate of deposition. Figure c shows the current
trace of one of the printed columns in the array shown in Figure a. Despite the fixed
threshold current of −4 pA, at larger cathodic voltages the
currents tend to overshoot this value since the meniscus is not broken
instantaneously. The zoomed-in view of single current peaks illustrates
this effect in more detail. Although the threshold current for all
the peaks is the same, at higher cathodic potentials the quick rise
of the current significantly overshoots the set value of 4 pA, for
example, −839 pA at −0.55 V, exceeding the threshold
by >200-fold. The thickness of a single printed layer increases
from
3 nm (±0.1 nm) at −0.35 V to 3.6 nm (±0.14 nm), 4.8
nm (±0.3 nm), 7.1 nm (±0.6 nm) and 10.7 nm (±1.1 nm)
with each additional −0.05 V increment in voltage. This also
has a drastic effect on the printing rate, which increases exponentially
from 6.6 nm s–1 (±1.1 nm s–1) at −0.35 V and reaching 69.7 nm s–1 (±7.4
nm s–1) at −0.55 V (Supporting Information SI-7).
Figure 2
Voltage and set point control of the printing
process. (a) False
color SEM image of a 5 by 6 array of pillars with a height of 3 μm.
The overlaid text indicates the voltage at which the pillars of the
respective line were printed. (b) Printed pillar diameters as a function
of printing voltage as measured (from SEM image in (a), blue diamonds)
and calculated (red circles) from Faraday’s law of electrolysis.
The dotted lines show the linear trend relating pillar diameter and
printing voltage. (c) Current traces for the voltage test (top) and
individual peaks at different voltages. (d) Printed pillar diameters
as the function of threshold current. (e) Current trace of pillars
printed at different threshold set points (top) with close ups of
individual current peaks at thresholds of −5, −20, and
−30 pA, as indicated by the red dotted lines. (f) SEM image
of pillars with (front row) and without (rear row) diameter modulation
printed with a pipette with an opening size of about 50 nm. All pillars
were printed layer by layer with voxel heights of 100 nm. For the
front row the voltages were alternated between −0.5 and −0.35
V, as illustrated with the red solid lines along two pillars. The
rear row was consistently printed with −0.5 V. By changing
the voltage the voxel diameter is changed by 19 nm ranging from 78
nm (±1.7 nm, −0.35 V) to 97 nm (±1.7 nm, −0.5
V).
Voltage and set point control of the printing
process. (a) False
color SEM image of a 5 by 6 array of pillars with a height of 3 μm.
The overlaid text indicates the voltage at which the pillars of the
respective line were printed. (b) Printed pillar diameters as a function
of printing voltage as measured (from SEM image in (a), blue diamonds)
and calculated (red circles) from Faraday’s law of electrolysis.
The dotted lines show the linear trend relating pillar diameter and
printing voltage. (c) Current traces for the voltage test (top) and
individual peaks at different voltages. (d) Printed pillar diameters
as the function of threshold current. (e) Current trace of pillars
printed at different threshold set points (top) with close ups of
individual current peaks at thresholds of −5, −20, and
−30 pA, as indicated by the red dotted lines. (f) SEM image
of pillars with (front row) and without (rear row) diameter modulation
printed with a pipette with an opening size of about 50 nm. All pillars
were printed layer by layer with voxel heights of 100 nm. For the
front row the voltages were alternated between −0.5 and −0.35
V, as illustrated with the red solid lines along two pillars. The
rear row was consistently printed with −0.5 V. By changing
the voltage the voxel diameter is changed by 19 nm ranging from 78
nm (±1.7 nm, −0.35 V) to 97 nm (±1.7 nm, −0.5
V).Similarly, the current threshold
can be employed to control the
feature size (Figure d). As shown, voxel diameters vary from 38 nm (±2 nm) at −5
pA to 71 nm (±3 nm) at −30 pA, thus depicting a similar
trend as for varying voltage: larger quantity of injected charge results
in a larger amount of electrodeposited material and thicker features.
The current set point value, however, cannot strictly control the
exact quantity of electrodeposited material, since on average the
magnitude of the current at the peak overshoots this threshold by
a few picoamperes higher (Figure e). Even at relatively low printing voltage as in this
example (−0.35 V), the set point is exceeded by 1–5
pA. This overshoot is attributed to slow dynamics of the piezo actuators
(typically, it takes 2–5 ms to break the meniscus after the
set point is reached) as well as low data acquisition rates. Nevertheless,
using appropriate set point values, stable and well-defined current
maxima are established leading to uniformly grown structures.
Changing
Voxel Size on-the-Fly
The possibility to alter
feature dimensions by changing electrodeposition parameters allows
one to vary the voxel size on-the-fly, that is, to 3D print objects
consisting of features with variable diameter, which at the moment
is offered only by a limited number of electrochemical AM techniques.[22] To demonstrate this capability, we repeatedly
varied the electrodeposition voltage between −0.35 and −0.5
V within pillar structures constructed of 100 nm tall voxels fabricated
in a layer-by-layer fashion with a 45 nm aperture nanopipette. Using
the voltage to control the voxel dimensions is more practical as compared
to the threshold current. Since eligible threshold current set points
are dependent on the nozzle and meniscus geometry as well as the present
current signal noise, thus more prone to miscalibration. Figure f demonstrates the
result, where pillars in the front row contain voxels with iterative
diameters (78 and 97 nm (both ±1.7 nm, about 20% change), and
the pillars in the rear row are printed as a control at a constant
voltage of −0.5 V with a consistent diameter of 85 nm (±2.1
nm) throughout. Being able to change the diameter on-the-fly while
printing without the need to change the print nozzle adds another
degree of freedom to the manufacturing process and is a rather unexpected
capability of meniscus-confined fabrication at this scale.
Nanoscale
Tilted and Overhanging Structures
Layer-by-layer
deposition is an almost absolute necessity for printing complex structures.
To demonstrate the truly additive nature of the technique, we fabricated
tilted structures and overhanging (up to 89°) parts. This can
be achieved without the need for support structures. For tilted features,
the printing principle is rather intuitive (inset of Figure a): each subsequent layer is
shifted laterally by a small offset that determines the tilt angle.
Larger offset distances result in higher tilt. Here, the lateral offsets
were varied in a range from 0 (vertical pillar) to 14 nm to form tilted
features at 0°, 11°, 22°, 31°, 39°, 45°,
50°, and 54° with 10 nm tall voxels (nozzle opening about
45 nm). Taking the vertical pillar as a reference, the resulting structures
are tilted by 0°, 6°, 13°, 16°, 24°, 25°,
26°, and 37° (Figure a). These deviations (up to 62%) to the set tilt angles show
the limitations of the method at the nanoscale. Drift of the piezo
actuators as well as mechanical vibrations can lead to either missing
of the last printed voxel or cause a mismatch between the subsequent
layers.
Figure 3
Printed tilted and overhanging features all printed with a 45 nm
nozzle opening. (a) SEM images of tilted pillars, printed by stacking
voxels with a lateral shift as illustrated in the inset. All pillars
were printed with voxel heights of 10 nm. The lateral shift was increased
by 2 nm from pillar to pillar, starting in the back with 0 nm up to
a 14 nm lateral shift per voxel for the front most pillar. Each pillar
has a vertical base voxel of 145 nm height. The SEM image shown is
a combination of 5 SEM images shot at an 80° tilt angle overlaid
to show all pillars in focus. (b) A schematic showing printing strategy
employed to print overhanging voxels as the meniscus was established
and broken laterally. (c) The letters “E”, “T”,
and “H” printed using this method (image taken at a
30°). The scale bar is the same for all three micrographs of
the separate letters.
Printed tilted and overhanging features all printed with a 45 nm
nozzle opening. (a) SEM images of tilted pillars, printed by stacking
voxels with a lateral shift as illustrated in the inset. All pillars
were printed with voxel heights of 10 nm. The lateral shift was increased
by 2 nm from pillar to pillar, starting in the back with 0 nm up to
a 14 nm lateral shift per voxel for the front most pillar. Each pillar
has a vertical base voxel of 145 nm height. The SEM image shown is
a combination of 5 SEM images shot at an 80° tilt angle overlaid
to show all pillars in focus. (b) A schematic showing printing strategy
employed to print overhanging voxels as the meniscus was established
and broken laterally. (c) The letters “E”, “T”,
and “H” printed using this method (image taken at a
30°). The scale bar is the same for all three micrographs of
the separate letters.Printing at angles >45°
is challenging, as new layers grow
on a small footprint of the previously printed structure. For these
high tilt angles and for overhanging features (parallel to the substrate),
the printing methodology needs to be adapted. For example, Hu and
Yu[23] modified the pipette using focused
ion beam milling to cut open one side of the nozzle, enabling lateral
printing but only in the direction opposite to the cut. Here, another
approach is introduced for fabrication of overhanging features. Instead
of establishing and breaking the meniscus via the vertical translation,
the nozzle movement occurs horizontally as shown schematically in Figure b. This way the meniscus
is established and broken laterally, which causes the features to
grow in this direction as well. Figure c illustrates the freestanding letters “ETH”
printed in a layer-by-layer fashion with a mix of the two printing
modes and a 45 nm diameter nozzle. Both the vertical and the horizontal
features have a diameter of about 90 nm (±11 nm). One of the
challenges in this printing mode, however, is creating a connection
with other features, as evidenced by an incomplete horizontal bridge
in the letter “H”, although the gap is somewhat similar
in dimensions to the voxel size itself. This issue arises due to a
small nanoscale mismatch between the features to be connected. Despite
that, printing overhangs from the same point, like in the letters
“T” and “E”, is trouble-free as evidenced
by the well-defined features that form these structures.
Where Are the
Limits of Electrochemical Printing?
To
answer this question, we employed nozzles with 1.6 and 2 nm apertures.
These, to the best of our knowledge, are the smallest ever reported,
not only for 3D printing but also for other applications, including
electrochemical imaging[27] or single-molecule
detection techniques. Figure a,b depicts the SEM images of the typical reproducibly printed
features, where the diameters of the printed pillars are 25 nm (±2
nm). At this scale, even slight misalignment or vibrations could lead
to buckles and bends in the printed pillars, and this effect is drastically
more pronounced on thinner features than on larger objects. As illustrated
in Figure c, in some
rare cases printing of features as small as 14 nm (±2 nm) is
also possible with the estimate from the printing data being around
16–18 nm (±1.4–2.7 nm, Figure d). This result, however, is irreproducible.
In this example, after the ninth pillar the nozzle broke, most likely
due to clogging, causing the following pillars to be larger as evidenced
with higher printing currents (Figure e). As shown, the printing resolution approaches that
of focused electron beam techniques and is at least an order of magnitude
ahead of other similar electrochemical methods.
Figure 4
Approaching the resolution
limit for electrochemical printing.
SEM images of the smallest reproducible structures, printed with (a)
1.6 and (b) 2 nm aperture nozzles. (c) SEM image of the finest printed
pillars observed in this work (irreproducible). After the 9th pillar,
the nozzle seems to break probably due to clogging and the subsequent
pillars were all fabricated with a thicker diameter. The inset in
(c) shows a 14 nm (±2 nm) pillar (inset) lying on the substrate
after having been printed upright (confirmed by growth data). (d)
Estimated pillar diameters (from Faraday’s law) and (e) the
corresponding raw printing data illustrating the evolution of electrochemical
currents during the printing. The arrow points at the time of nozzle
breakage and thus increasing currents and larger diameters.
Approaching the resolution
limit for electrochemical printing.
SEM images of the smallest reproducible structures, printed with (a)
1.6 and (b) 2 nm aperture nozzles. (c) SEM image of the finest printed
pillars observed in this work (irreproducible). After the 9th pillar,
the nozzle seems to break probably due to clogging and the subsequent
pillars were all fabricated with a thicker diameter. The inset in
(c) shows a 14 nm (±2 nm) pillar (inset) lying on the substrate
after having been printed upright (confirmed by growth data). (d)
Estimated pillar diameters (from Faraday’s law) and (e) the
corresponding raw printing data illustrating the evolution of electrochemical
currents during the printing. The arrow points at the time of nozzle
breakage and thus increasing currents and larger diameters.These results also indicate that there is a limit
in printing resolution
using the electrochemical meniscus-confined approach and features
below 25–30 nm in size are difficult to fabricate even with
ultrasmall nozzles. To determine where this limit is coming from,
one has to consider the feedback that underlies the printing process.
Here, it relies on the detection of the current flow during the meniscus
presence on the substrate. Also, the faradaic current determines the
amount of charge exchanged at the interface and therefore the amount
of material plated. The smaller the meniscus, the taller a single
deposited layer. In other words, with reducing the nozzle size the
probability of the nozzle clogging increases, thus faster feedback
is required.To illustrate this quantitatively, one can calculate
the limits
of the nozzle size with the following assumptions (for our instrumentation):
(i) currents as small as 3 pA can be reliably measured given the typical
noise level; (ii) the shortest residence time of the meniscus on the
substrate is about 3 ms; (iii) the printed feature size equals that
of the nozzle aperture; and (iv) the meniscus height is roughly equal
to the radius of the opening.[28] With these
assumptions, one can estimate that when the nozzle diameter is about
9.4 nm, the height of the printed layer will be just below the meniscus
height (Supporting Information SI-8). For
smaller apertures, the clogging is inevitable: the thickness of the
printed layer for our smallest nozzles with 1.6 nm opening is estimated
to be 164.5 nm (>200 times than the meniscus height). The experimental
results shown above are in good agreement with these calculations,
indicating that the nozzles with single nanometer openings have a
high propensity for clogging, resulting in their tips breaking off
until the aperture size reaches dimensions where the risk of clogging
greatly reduces. For larger apertures, this is not a problem anymore
as the height of the deposited metal layer drops to about 0.6 nm for
nozzles with 25 nm opening. Hence, as predicted by theory and confirmed
by our experimental results, reproducible printing is only possible
at scales from 25 nm and above.Could this limitation be overcome,
and electrochemical 3D printing
limits be brought to a single-digit nanometer scale? In principle,
this could be achieved by reducing the quantity of metal electrodeposited
in a single printing cycle by about 3 orders of magnitude. This small
amount of charge would approach the level of several attocoulombs
(10–18 C), which is equivalent to only a few electrons
transferred onto metal ions during a printing cycle. This miniscule
amount of charge that should be equivalent to almost atom-by-atom
fabrication, which is difficult to control at high acquisition rates
(∼kHz) required for reliable printing. Thus, electrochemical
AM at this scale would require a drastically different approach, where
the printing feedback will operate at fundamentally different (not
based on faradaic current measurement) physical principles.In summary, we demonstrated an approach to achieve nanoscale resolution
in electrochemical 3D printing, that allows manufacturing of metal
structures with dimensions <100 nm, unattainable by other electrochemical
methods. The printing process is broken down into repeated cycles
of forming and ripping the liquid droplet between the nozzle and the
substrate. This allows a controllable deposition of thin (few nm)
layers of material and a synchronized fully automated retraction of
the printing nozzle that eliminates the risk of nozzle clogging. This
methodology is suitable for nozzles with a range of dimensions, from
submicrometer down to only a few nanometers across, allowing full
layer-by-layer printing capacity with on-the-fly voxel size control.
We anticipate that further extension of this printing approach to
other materials (after optimization of printing inks and electroplating
conditions) will stimulate further development of 3D nanoprinting
for a broad range of applications.
Methods
Electrolyte
Solution
The electrolyte solution for printing
was prepared using 0.5 M of copper(II) sulfate pentahydrate (CuSO4·5H2O, Sigma-Aldrich, Switzerland) dissolved
in 1 M sulfuric acid (H2SO4, Sigma-Aldrich,
Switzerland). The concentration of 0.5 M was chosen in accordance
with our preliminary experiments. It guarantees high print rates due
to significant Cu2+ concentration and does not seem to
cause issues with nozzle clogging. The final solution had a pH value
of 0.4. Aqueous solutions were prepared using ultrapure deionized
water with resistivity 18.2 MΩ cm at 25 °C
(Milli-Q, Merck).
Nanopipettes
Nanopipettes were pulled
using a commercial
laser pipette puller (P2000, Sutter Instruments). The pipettes with
50, 2, or 1.48 nm nozzle openings were pulled from quartz capillaries
with a filament and an outer diameter (OD) of 1 mm and an inner diameter
(ID) of 0.5 mm (QF100-50-10, Friedrich & Dimmock). The pipettes
with about 250 nm nozzle opening were pulled from borosilicate glass
capillaries with a filament with 1.2 mm OD and 0.69 mm ID (Harvard
Apparatus). The pulling parameters are listed in Supporting Information Table S1.
Electron Microscopy
Electron microscope images of nanopipettes
were acquired with a transmission electron microscope (JEM-1400, JEOL)
at 200 kV accelerating voltage. Printed metal structures were characterized
by a scanning electron microscope (Magellan 400, FEI Company). A Helios
5 UX DualBeam FIB-SEM (Thermo Fisher Scientific, U.S.A.) was used
to expose and image printed features’ cross sections.
Substrate
All structures fabricated within this work
were printed either on microscopy glass slides (Menzel) or silicon
wafers that were on one side sputter coated with a 25 nm gold film
on top of a sputter coated 3 nm Titanium film. No treatment or cleaning
was performed prior to printing on the substrate. The substrates were
glued with UV curable glue (3311, Loctite) onto aluminum SEM pin stubs
(12.7 mm, Zeiss) used for fixation while printing and for later SEM
analysis. Silver paint (EM-Tec AG15, Microtonano) was used to establish
an electrical connection between the stub and the substrates gold
surface.
Statistics
Statistical data is reported as a mean value
(N ≥ 3) with a 95% confidence interval where
appropriate.
Nanoprinting Setup
Using a custom-made
pipette holder,
the electrolyte-filled nanopipettes were mounted above the substrate.
A silver wire (0.125 mm, GoodFellow), employed as a quasi-reference
counter electrode, was immersed into the electrolyte and connected
to a voltage source. Coarse manual positioning of the pipette was
performed with a micropositioner (MicroStage, MadCityLabs) for lateral
movement of the stage (XY-axis), a micropositioning
device (MMP1, MadCityLabs) to move the pipette vertical to the substrate
(Z-axis) and an optical microscope camera (AM7915MZTL
- EDGE, Dino Lite) for coarse optical control of the distance. To
automatically approach the substrate, prior to printing the pipette
was moved vertically by a piezo positioner (Nano-MET10, MadCityLabs)
at a speed of 1 μm s–1 (0.15 nm s–1 for 1 nm aperture nozzles). The approach rate was chosen to provide
a safe vertical nozzle translation without the risk of crashing into
the substrate before the meniscus can be detected, given the rate
of data acquisition (1953 Hz, sampling every 512 μs) and vertical
piezo position update rate (1 nm ms–1 or 0.15 nm
ms–1 for single nanometer nozzles). During the approach,
the current was recorded continuously using a current amplifier (DLPCA-200,
Femto). If a preset threshold current of −3 to −20 pA
was exceeded, marking the formation of a liquid meniscus between nozzle
tip and substrate, the pipette was immediately retracted. If no such
event was detected within the 10 μm range of the piezo positioner,
the positioner was retracted for 10 μm and the pipette was moved
to the substrate using the micropositioner by 10 μm. The actual
printing was performed using a subnanometer precision XY piezo stage (Nano-PDQ250, MadCityLabs). The approach rate used while
printing was 1 μm s–1 (0.15 nm s–1 for 1 nm aperture nozzles), while the retract speed to break the
meniscus was 30–50 times faster (30–50 μm s–1). Throughout the whole printing process, the pipette
position was monitored using the sensing capabilities of the piezo
positioners. Acquired z-coordinates at each landing
(when meniscus is detected) enabled one to precisely monitor the height
of each deposited layer with subnanometer resolution as well as to
track the overall progress in fabrication of the whole structure.
This data was later used to provide the height information for estimation
of the diameter using Faraday’s law (see Supporting Information SI-5). In combination with the X- and Y-coordinates at meniscus formation,
an observation of the printed structure during fabrication is possible.
The control of the setup and acquisition of the raw data was performed
using a PC equipped with an FPGA card (PCIe-7846, National Instruments)
and a custom-made LabVIEW program based on the WEC-SPM software package
(provided by Prof. Unwin, University of Warwick). The printing environment
was not controlled deliberately but the temperature was measured to
be stable at around 23 °C whereas the relative humidity deviated
between 30% and 60%. Preliminary experiments at different relative
humidity levels had no influence on the printing results, hence it
was not controlled in the current study.The meniscus formation
occurs by a mechanical contact between the substrate and a sessile
droplet at the hydrophilic tip of the glass pipette. No additional
pressure control is needed to initiate the formation of this droplet
or the liquid meniscus, allowing printing without additional microfluidic
instrumentation.To reduce the magnitude of electromagnetic
noise, the whole setup
was enclosed in a custom-made faraday cage. To reduce acoustic noise
and mechanical vibrations, the stage was placed on a benchtop vibration
isolation platform (BM-8, Minus K Technology) and the faraday cage
lined with acoustic foam.
Authors: Soheil Daryadel; Ali Behroozfar; S Reza Morsali; Salvador Moreno; Mahmoud Baniasadi; Julia Bykova; Rodrigo A Bernal; Majid Minary-Jolandan Journal: Nano Lett Date: 2017-12-22 Impact factor: 11.189
Authors: Simone Pagliano; David E Marschner; Damien Maillard; Nils Ehrmann; Göran Stemme; Stefan Braun; Luis Guillermo Villanueva; Frank Niklaus Journal: Microsyst Nanoeng Date: 2022-09-19 Impact factor: 8.006