Lubomír Prokeš1, Magdaléna Gorylová2, Kateřina Čermák Šraitrová3, Virginie Nazabal4,2, Josef Havel1, Petr Němec2. 1. Department of Chemistry, Faculty of Science, Masaryk University, Kamenice 5/A14, 62500 Brno, Czech Republic. 2. Department of Graphic Arts and Photophysics, Faculty of Chemical Technology, University of Pardubice, Studentská 573, 53210 Pardubice, Czech Republic. 3. Institute of Applied Physics and Mathematics, Faculty of Chemical Technology, University of Pardubice, Studentská 573, 53210 Pardubice, Czech Republic. 4. Univ Rennes, CNRS, ISCR UMR6226, ScanMAT UMS 2001, F-35000 Rennes, France.
Abstract
Pulsed UV laser deposition was exploited for the preparation of thin Sn50-x As x Se50 (x = 0, 0.05, 0.5, and 2.5) films with the aim of investigating the influence of low arsenic concentration on the properties of the deposited layers. It was found that the selected deposition method results in growth of a highly (h00) oriented orthorhombic SnSe phase. The thin films were characterized by different techniques such as X-ray diffraction, scanning electron microscopy with energy-dispersive X-ray spectroscopy, atomic force microscopy, Raman scattering spectroscopy, and spectroscopic ellipsometry. From the results, it can be concluded that thin films containing 0.5 atom % of As exhibited extreme values regarding crystallite size, unit cell volume, or refractive index that significantly differ from those of other samples. Laser ablation with quadrupole ion trap time-of-flight mass spectrometry was used to identify and compare species present in the plasma originating from the interaction of a laser pulse with solid-state Sn50-x As x Se50 materials in both forms, i.e. parent powders as well as deposited thin films. The mass spectra of both materials were similar; particularly, signals of Sn m Se n + clusters with low m and n values were observed.
Pulsed UV laser deposition was exploited for the preparation of thin Sn50-x As x Se50 (x = 0, 0.05, 0.5, and 2.5) films with the aim of investigating the influence of low arsenic concentration on the properties of the deposited layers. It was found that the selected deposition method results in growth of a highly (h00) oriented orthorhombic SnSe phase. The thin films were characterized by different techniques such as X-ray diffraction, scanning electron microscopy with energy-dispersive X-ray spectroscopy, atomic force microscopy, Raman scattering spectroscopy, and spectroscopic ellipsometry. From the results, it can be concluded that thin films containing 0.5 atom % of As exhibited extreme values regarding crystallite size, unit cell volume, or refractive index that significantly differ from those of other samples. Laser ablation with quadrupole ion trap time-of-flight mass spectrometry was used to identify and compare species present in the plasma originating from the interaction of a laser pulse with solid-state Sn50-x As x Se50 materials in both forms, i.e. parent powders as well as deposited thin films. The mass spectra of both materials were similar; particularly, signals of Sn m Se n + clusters with low m and n values were observed.
Because of their two-dimensional
(2D) character, tin selenides
are studied as prospective anode materials for ion batteries[1] and capacitors for energy storage.[2] Tin selenide (SnSe)[3,4] and its composites
with graphene oxide[5] are perspective materials
for electronics, optoelectronics, and solar cells[6] and also analytical voltammetry.[7] Moreover, SnSe has interesting thermoelectric properties in terms
of low thermal conductivity and high thermoelectric figure of merit.[8,9] Tin forms basically two selenides—SnSe and SnSe2.[10,11] Another Sn–Se compound with stoichiometry
Sn3Se4 is stable only at high pressures (18–70
GPa).[12]Tin diselenide (SnSe2) is a material suitable for infrared[13] and ultraviolet[14] photodetection, photocatalysis,[15] surface-enhanced
Raman scattering (SERS) spectrometry,[16] and as sensors for gases[17] or ammonia
ions.[18] Tin selenides of different stoichiometry
(SnSe, SnSe2, and Sn2Se3) were also
investigated for their potential phase-change memory applications.[19]To improve the properties of SnSe, many
elements or compounds have
been studied as potential dopants, such as Ag,[20] Zn,[21] Cu,[22] etc. for p-type doping and Bi[23] for n-type doping. To influence the formation and concentration
of native defects in SnSe (i.e., Sn and/or Se vacancies or Se interstitials),
another strategy employing doping with elements of ambivalent nature
could be used. It has been shown that one of such doping elements
could be arsenic, which was recently studied as a dopant for single-crystalline
SnSe materials.[24] Importantly, the authors
report a profound increase in concentration of tin vacancies and formation
of a cluster of divacancies, which is believed to be an essential
attribute of effective phase-change memory materials.[25] Moreover, they observed an unprecedented 2-orders-of-magnitude
decrease in free carrier concentration induced by As-doping.[24] However, for applications in the field of phase-change
memory materials, it is required to fabricate tin selenides in the
form of thin films. For Sn–Se thin-film deposition, different
techniques have been already studied, such as sputtering,[26] evaporation,[27] spray
pyrolysis,[28] atomic layer deposition,[29] molecular beam epitaxy,[19] pulsed laser deposition (PLD),[30] etc.
Among them and according to the material being deposited, PLD is of
large interest due to its flexibility, undemanding control of the
deposition process, ability to prepare multilayered structures, and
often stoichiometric material transfer from the target to the films.[31,32] More specifically, the other advantages of UV PLD are represented
by the large absorption of UV light in many materials leading to small
penetration depth and by the flat-top energy distribution of the excimer
laser beams (typically used for UV PLD), which causes a homogeneous
energy density distribution in the ablated area. It is worth to mention
that other thermoelectric thin films such as Ag-modified PbTe were
deposited by PLD.[33]Based on the
information summarized above, SnSe thin layers doped
with arsenic were prepared by pulsed laser deposition in this work
to study the effect of doping on the properties of the films. The
thin films were characterized in terms of their structure, chemical
composition, morphology, topography, electrical, vibrational, and
optical properties. Attention was paid to the mass spectrometry study
of the species formed via interaction of UV laser pulses with the
films and related powdered precursors as laser ablation with quadrupole
ion trap time-of-flight mass spectrometry (QIT-TOFMS) has already
been shown to be an important and powerful methodology to study the
formation of clusters originating from solid-state materials.[34−37] The results of QIT-TOFMS may help us understand the processes involved
in the plasma plume during pulsed laser deposition with implications
for related thin-film growth and the structure of deposited layers.
Results and Discussion
The chemical composition of
prepared thin films as determined via
energy-dispersive X-ray spectroscopy (EDS) in terms of tin and selenium
content corresponds very well with the nominal composition of the
used Sn50–AsSe50 (x = 0, 0.05, 0.5 and 2.5)
targets: at maximum, the differences are ∼1.5 and 2.2 atom
% of Sn and Se, respectively. The quantitative determination of As
by EDS is problematic due to its low content; however, qualitatively
arsenic was clearly identified. It is important to note that the error
limit of the used EDS method is ±1 atom %.The thin layers’
morphology investigated by scanning electron
microscopy (SEM) showed a smooth surface of the films (Figure ). The presence of cracks or
holes was not identified. A few (sub)micrometer-sized droplets are
seen in SEM images, which is a common phenomenon for the PLD technique.
The good quality of the deposited films is also evidenced by the atomic
force microscopy (AFM) scans (Figure ). For all deposited thin films, root-mean-square roughness
values (Sq) determined by AFM were found
to be lower than ∼0.8 nm, confirming the relatively smooth
surface of the layers. The preliminary temperature-dependent electrical
resistance measurements showed that all samples except the one doped
with 2.5 atom % of As exhibited a resistance drop of 3–4 orders
of magnitude upon heating up to 400 °C. However, we observed
some peculiar features for all samples, which require a further detailed
study.
Figure 1
AFM images (2 μm × 2 μm) with root-mean-square
roughness values (upper row) and SEM micrographs (bottom row) of PLD
thin films: (a, b) Sn47.5As2.5Se50; (c, d) Sn49.5As0.5Se50; (e, f)
Sn49.95As0.05Se50; and (g, h) Sn50Se50.
AFM images (2 μm × 2 μm) with root-mean-square
roughness values (upper row) and SEM micrographs (bottom row) of PLD
thin films: (a, b) Sn47.5As2.5Se50; (c, d) Sn49.5As0.5Se50; (e, f)
Sn49.95As0.05Se50; and (g, h) Sn50Se50.X-ray diffraction (XRD) measurements of the thin films deposited
on glass substrates revealed that all of the layers are crystalline—as
documented in Figure , the XRD patterns clearly show peaks indexed to the (200), (400),
(600), and (800) planes, indicating the highly (h00) oriented orthorhombic SnSe phase. We note that no signal from
the substrate was detected in XRD data.
Figure 2
XRD patterns of PLD Sn50–AsSe50 (x = 0, 0.05,
0.5, and 2.5) thin films deposited on glass substrates. Vertical lines
in the bottom panel indicate the orthorhombic SnSe as a reference
(PDF # 01-089-0241 card).
XRD patterns of PLD Sn50–AsSe50 (x = 0, 0.05,
0.5, and 2.5) thin films deposited on glass substrates. Vertical lines
in the bottom panel indicate the orthorhombic SnSeas a reference
(PDF # 01-089-0241 card).It was found that the crystallite size and full width at half-maximum
(FWHM) of dominant XRD peaks depend on the arsenic concentration but
do not vary linearly with the increasing content of arsenic. In fact,
the crystallite size is within the range of ∼58–68 nm
with a minimum of ∼39 nm for thin films containing 0.5 atom
% of As. Consequently, FWHM varied within the range of ∼0.14–0.12°
but exhibited a maximum of ∼0.21°, which was again identified
for films with 0.5 atom % of As. The unit cell volume is influenced
by the arsenic content too. Whereas the changes in a and c lattice parameters are within the experimental
error, the b parameter shows a minimum for the layer
containing 0.5 atom % of As. Due to this minimum value, the unit cell
volume presents also a minimum for the same content of dopant. We
note that these extreme values of parameters for 0.5 atom % of As
sample coincide with the highest concentration of vacancies in SnSe
single crystals doped with As.[24]Raman scattering spectra of fabricated Sn50–AsSe50 thin
films (measured from 50 cm–1) are presented in Figure a. The decomposition
of the Raman spectra by fitting with six Gaussians is exemplified
in Figure b. The main
features of the spectra are as follows: (i) a relatively sharp Raman
band peaking at ∼67 cm–1, (ii) a broad band
of lower amplitude with flat maxima at ∼96 cm–1, and (iii) a band peaking at ∼153 cm–1.
The band peaking at ∼67 cm–1 is asymmetric
due to the presence of two bands with maxima at ∼67 and ∼58
cm–1 (Figure b). The broad band covering the range of ∼80–130
cm–1 is composed of two bands peaking at ∼95
and ∼110 cm–1. The Raman band with a maximum
at ∼153 cm–1 has a small shoulder, which
was fitted with a Gaussian band of low intensity peaking at ∼179
cm–1.
Figure 3
(a) Raman scattering spectra of PLD Sn50–AsSe50 (x = 0, 0.05, 0.5, and 2.5) thin films; (b) decomposition
of the Raman
spectrum of Sn50Se50 thin film using six Gaussians
(the baseline was subtracted).
(a) Raman scattering spectra of PLD Sn50–AsSe50 (x = 0, 0.05, 0.5, and 2.5) thin films; (b) decomposition
of the Raman
spectrum of Sn50Se50 thin film using six Gaussians
(the baseline was subtracted).Based on available literature data, bands with maxima at ∼67
and ∼153 cm–1 could be associated with A1g and A3g Raman-active modes, respectively.[38−40] Using the 785 nm excitation laser, it is observed that the band
at 153 cm–1 has a higher intensity compared to the
other main bands than the one with excitation at 532 nm. Similarly,
Gong et al.[40] observed that the A3g/A1g intensity ratio is lower at 532 nm.A plausible
assignment of the ∼96 cm–1 broad band composed
of two bands peaking at ∼110 and ∼95
cm–1 might be that it is coming from the overlap
of A2g and B3g modes (identified at ∼130
and ∼108 cm–1 in SnSe single crystals[38]), whose frequencies are somewhat shifted due
to the strongly preferential orientation of SnSe orthorhombic crystals
as confirmed through XRD data. All mentioned Ag modes as
well as the B3g mode are rigid shear modes of a layer with
respect to its adjacent layers; they determine the characteristic
planar vibration modes of the SnSe orthorhombic structure.[38,41] It was also observed by Gong et al.[40] that when the PLD films were annealed, the two bands peaking at
∼110 and ∼95 cm–1 tended to shift
to higher wavenumbers (127 and 104 cm–1) and to
be better resolved, which was associated with better crystallinity
of the layers. The B1g mode shows two Raman-active components
(∼133 and 57 cm–1) in SnSe single crystals.[38] The first component probably contributes to
the Raman band with a maximum at 110 cm–1. The second
component may form a weak Raman band, which was fitted with a maximum
at 58 cm–1. Finally, the origin of the low-intensity
band coming from the Raman spectra decomposition (∼179 cm–1) is not clear and is not observed in the case of
the 532 nm excitation.One could speculate about the possible
presence of tin oxides on
the surface of the deposited PLD films. It cannot be completely excluded;
however, there is no evidence for common tin oxides, whose Raman-active
vibrations are located at 112 and 210 cm–1 (Eg and A1g modes of SnO)[42] or at 476, 638 and 782 cm–1 (Eg, A1g, and B2g modes of SnO2).[43]The thickness of the deposited samples
under study, determined
by ellipsometry, was in the range of ∼170–180 nm (Table ). The values of surface
roughness found by fitting of ellipsometry data are in the 3.5–4.3
nm range with a subtle maximum for thin films containing 0.5 atom
% of As. These values are substantially larger than the values obtained
by AFM (Figure ).
However, this discrepancy is in line with the fact that in ellipsometry,
surface roughness is fitted using effective medium approximation,
which includes both physical roughness and surface native oxides,
which might be present. Moreover, the measurement spot is much larger
in case of ellipsometry.[32]
Table 1
Characteristics of Sn50–AsSe50 (x = 0, 0.05,
0.5, and 2.5) Thin Films Prepared by PLD Determined
via Ellipsometrya
thin film
Sn50–xAsxSe50
d (nm)
surface roughness
(nm)
Eg (eV)
Eu (eV)
n@400 nm
n@1550 nm
x = 0
182
3.5
0.90
0.28
3.42
4.91
x = 0.05
181
3.8
0.90
0.29
3.51
4.85
x = 0.5
167
4.3
0.96
0.23
3.63
4.77
x = 2.5
166
4.2
0.96
0.22
3.26
4.90
Thickness d (±2
nm), surface roughness (±0.2 nm), band gap Eg (±0.04 eV), Urbach energy Eu (±0.01 eV), and refractive index n at
both 400 and 1550 nm (±0.01).
Thickness d (±2
nm), surface roughness (±0.2 nm), band gap Eg (±0.04 eV), Urbach energy Eu (±0.01 eV), and refractive index n at
both 400 and 1550 nm (±0.01).The values of band gap estimated via the Cody–Lorentz
(CL)
model are between 0.90 and 0.96 eV (Table ). Nevertheless, it is difficult to see any
trend as the error bars are of the order of 0.04 eV. To see a comparison,
bulk SnSe has an indirect band gap of ∼0.90 eV and a direct
band gap of ∼1.30 eV.[44] Further,
indirect band-gap values of SnSe nanosheets, nanoflowers, nanocolumns,
and nanoplates were reported as 0.86, 0.95,[45] 0.93, and 0.96 eV,[46] respectively. The
indirect band gap of vacuum-deposited polycrystalline thin films was
reported to be 0.935[47] or 0.895 eV.[48] Thermally evaporated polycrystalline SnSe thin
films exhibit a range of indirect band-gap values depending on the
deposition rate (0.87–0.97 eV) and thickness (0.87–1.13
eV).[41] Laser-ablated thin films showed
a direct band gap of 0.94 eV.[49] It can
be concluded that the optical band-gap values obtained from the CL
model for PLD Sn50–AsSe50 thin films are in very good agreement
with already published results.Urbach energy (Eu), which represents
the width of the localized-states tail (present in the forbidden gap)
typically associated with the amorphous state, was deducted from the
CL model; the obtained values are given in Table . One can see that with increasing arsenic
content in the Sn50–AsSe50 layers, the values of Urbach
energy decrease, implying that the width of the localized-states tail
is getting smaller. The Eu values reported
in this work are coherent with those published for thermally evaporated
SnSe thin films of comparable thickness (Eu ∼ 0.23 eV for ∼150 nm thick layers).[50]Best-fit optical functions, i.e., refractive index
and extinction
coefficient spectral dependencies, deducted from spectroscopic ellipsometry
data analysis for PLD Sn50–AsSe50 thin films are shown in Figure . As seen, in the
studied spectral region, the refractive index and extinction coefficient
vary drastically. Table gives the refractive index values at two wavelengths, i.e., at 400
and 1550 nm. It is important to note that reported values indicate
that the refractive index depends on the arsenic concentration in
the layers. In detail, the films containing 0.5 atom % of As present
the largest refractive index value at 400 nm and lowest value at 1550
nm. Regarding the refractive index, the data presented in this work
are not well comparable with literature;[48,51] however, we believe that our values are reliable because of the
good quality of the variable-angle spectroscopic ellipsometry data
fitting, which is documented by the low values of mean square errors
reaching 4.1 at maximum.
Figure 4
Optical functions of PLD Sn50–AsSe50 (x = 0, 0.05, 0.5 and 2.5) thin films: spectral dependencies
of refractive
indices (top) and extinction coefficients (bottom).
Optical functions of PLD Sn50–AsSe50 (x = 0, 0.05, 0.5 and 2.5) thin films: spectral dependencies
of refractive
indices (top) and extinction coefficients (bottom).It is noteworthy to mention the extraordinary behavior of
thin
films with 0.5 atom % of As, which show the lowest crystallite size,
maximum FWHM of XRD peaks, lowest unit cell volume, as well as largest
values of refractive index at 400 nm and lowest values at 1550 nm.
These findings can be linked with the high concentration of Sn vacancies
and divacancies.[24] A large number of vacancies
is an important attribute of a “good” phase-change material.[25] Even if the films studied in this work are crystalline,
we believe that further increase of the amount of vacancies might
be possible, which may lead to the amorphous state. The fabrication
of amorphous pure or doped Sn–Se thin films will be the focus
of our next investigation exploiting a simple strategy of changing
the basic stoichiometry from Sn50Se50 to compositions
richer in selenium, keeping in mind the work of Chung.[19]The clusters generated via laser ablation
of Sn50–AsSe50 thin
films and powders were studied by employing QIT-TOFMS. For the Sn50–AsSe50 powders, majority of the clusters were found in the
mass-to-charge ratio (hereinafter m/z) range of 90–700. The mass spectra produced in the negative
ion mode were of lower intensity in comparison with the positive mode.
The effect of laser energy on the mass spectra intensities was thus
studied in the positive mode (Figure ).
Figure 5
Effect of laser energy on the mass spectra intensities
of Sn50Se50 powder sample (normalized to 19
mV).
Effect of laser energy on the mass spectra intensities
of Sn50Se50 powder sample (normalized to 19
mV).The maximum intensities were found
for a laser energy of 160 au.
Apart from Sn+, Se+, and SnSe+ clusters (Table ), several oxygen (hydrogen)-containing
clusters were also detected, such asSnO+, SnOH+, SeO+, and SnSeO+. Examples
of selected mass spectra are given in Figure , where stoichiometries of the identified
clusters are also provided. The oxygen-containing clusters may originate
from a negligible oxide thin layer on the sample surface. Due to laser
ablation of the sample surface, oxygen-containing species are detected.
On the other hand, due to the small quantity of oxides, these are
not detected via “bulk” methods like XRD or Raman scattering
spectrometry.
Table 2
Clusters Identified in the Mass Spectra
of Sn50–AsSe50 (x = 0, 0.05, 0.5, and
2.5) Powdersa
Gray color indicates
low-intensity
species.
Figure 6
Example of the part of the measured mass spectrum of Sn50Se50 powder for a laser energy of 150 au and a
model mass
spectrum (for resolutions of 3500, 100× Sn2Se2, 15× Sn2Se2O, 50× Sn3Se, 40× Sn4).
Example of the part of the measured mass spectrum of Sn50Se50 powder for a laser energy of 150 au and a
model mass
spectrum (for resolutions of 3500, 100× Sn2Se2, 15× Sn2Se2O, 50× Sn3Se, 40× Sn4).Gray color indicates
low-intensity
species.In the case of
Sn50–AsSe50 thin films, measurements were
again more effective in positive ion mode, as the clusters produced
in negative ion mode were of lower intensities. The clusters were
formed in the m/z range of 90–350.
The effect of laser energy on the mass spectra intensities was thus
also studied in the positive ion mode (Figure ). The maximum intensities were found for
a laser energy of 170 au. Apart from Sn+, low-intensity Se+ and SnSe+ clusters (Table ) and several oxygen (hydrogen)-containing clusters were also
detected, especially SnO+, SnOH+, and SnSeO+. We note that in comparison
with an earlier report,[49] the number of
species identified in this work is higher, probably due to the better
sensitivity/resolution of the exploited QIT-TOFMS system.
Figure 7
Effect of laser
energy on the mass spectra intensities of a Sn50Se50 thin film (normalized to 43 mV).
Table 3
Clusters Identified in the Mass Spectra
of Sn50–AsSe50 (x = 0, 0.05, 0.5, and
2.5) PLD Thin Filmsa
Gray color indicates
low-intensity
species.
Effect of laser
energy on the mass spectra intensities of a Sn50Se50 thin film (normalized to 43 mV).Gray color indicates
low-intensity
species.Clusters containing
arsenic (oxygenated/hydrogenated) were identified
in both Sn50–AsSe50 powders (H3As2O+) and thin layers (HAs3O6+ and H3As3O6+) due to
differences between the measured mass spectra and model isotopic distributions.
Signals of these clusters were unambiguously detectable only in the
QIT-TOFMS spectra of samples with higher arsenic content.To
the best of our knowledge, the clusters in the Sn–Se
system (and their structure) are known only for elements, i.e., tin[52−54] and selenium.[55−57] The structure of common SnSe is analogical to that
of black phosphorus, where phosphorus atoms are replaced by Sn and
Se atoms. The interlayer bonding in SnSe across the cleavage plane
is between unlike atoms, i.e., Sn–Se. Adjacent layers are bound
to each other with a combination of van der Waals and long-range electrostatic
attractions.[3,44,58−60]Probably due to alternation of the Sn and Se
atoms in the SnSe
structure, primarily peaks of SnSe+ clusters with low m and n values were identified in the mass spectra
of both the Sn50–AsSe50 powders and thin films. On the other
hand, the peaks related to clusters with high m or n values were of low intensity or absent. The main difference
between the mass spectra of Sn50–AsSe50 powders and thin films
was that peaks related to the clusters with m/z > 350 Da were not found in the mass spectra of the
layers
(Figures and 7). However, analogical clusters were found in the
mass spectra of the studied powders and thin films (Tables and 3), differing in some cases in their relative intensities. In the
case of thin films, the ablation threshold and optimum laser energy
values were a bit higher in comparison with the powders.
Conclusions
Crystalline Sn50–AsSe50 (x = 0, 0.05,
0.5, and 2.5) thin films were fabricated from the corresponding hot-pressed
targets via pulsed laser deposition. The chemical composition of the
thin films is in good agreement with that of the targets. X-ray diffraction
results showed that the films had been grown in a highly (h00) oriented orthorhombic SnSe phase. The films containing
0.5 atom % of As exhibited the lowest crystallite sizes, maximum FWHM
of XRD peaks, and lowest unit cell volume. The temperature-dependent
electrical resistance measurements showed a resistance drop of 3–4
orders of magnitude upon heating up to 400 °C. Raman scattering
spectroscopy of the layers revealed A1g, B3g, A2g, and A3g modes. Band-gap values estimated
by the analysis of spectroscopic ellipsometry data are within the
range of 0.90–0.96 eV, being consistent with the data reported
for SnSe thin films fabricated via other deposition techniques or
nanosized SnSe. The refractive index spectral dependencies of PLD
Sn50–AsSe50 thin films differ particularly from literature data,
showing an extraordinary behavior for films doped with 0.5 atom %
of As. The mass spectra of Sn50–AsSe50 thin films and parent
powders were found to be similar: peaks of SnSe+ clusters with low m and n values predominate, while species
with high m or n values were of
low intensity or absent. Some differences between the QIT-TOFMS spectra
of thin films and powders were found in the ablation threshold, occurrence
of high m/z peaks, and relative
intensities of signals of certain clusters. Mass spectra signals related
to oxygenated/hydrogenated tin/selenium species were also identified.
Materials and Methods
Samples
Polycrystalline
samples with
the composition Sn50–AsSe50 (x = 0, 0.05,
0.5, and 2.5) were prepared by high-temperature reactions. Samples
were synthesized from the stoichiometric mixtures of the 5 N elements
(Sn and Se) and the compound (AsSn, synthesized). The AsSn compound
was prepared by heating the stoichiometric mixture of Sn (5 N) and
As (three times sublimed) at 933 K for 14 days in a vacuum-sealed
(∼10–3 Pa) quartz ampoule. Synthesis of the
samples was done in evacuated quartz ampoules by heating the stoichiometric
mixture (1.7 K/min) up to 1223 K. Ampoules were kept at this temperature
for 6 h followed by free cooling to room temperature in the turned-off
furnace.The resulting bulk materials were powdered in agate
mortar and hot-pressed at 713 K and 80 MPa for 1 h in a graphite die.
The sample with the highest x was hot-pressed at
a lower temperature (633 K) to keep suitable mechanical properties.
Compact disc-shaped samples (with diameter 25 mm and thickness ∼4
mm) reached 89–96% of the theoretical density. These discs
were consequently used as targets for PLD.Sn50–AsSe50 thin
films were obtained via PLD. Chalcogenide
targets were ablated with a KrF excimer laser emitting at 248 nm using
125 (±3) mJ output pulse energies, 30 ns pulse duration, and
20 Hz repetition rate. Laser energy density was set at ∼2 J/cm2. The thin films were deposited in a vacuum chamber (the pressure
during deposition: (5.7 × 10–6)–(1.6
× 10–5) Pa, background pressure: 4.2–(5
× 10–6 Pa)). To obtain films with good thickness
uniformity, the off-axis PLD technique exploiting rotating substrates
and targets was used. Rotation speeds were ∼5°/min for
both targets and substrates. Pieces of single-crystalline ⟨100⟩
oriented silicon wafers (boron doped, p-type; thickness 0.525 mm;
resistivity 75–95 Ω cm) and microscope glass slides (10
mm × 10 mm) were used as substrates; these were mounted parallel
to the target surface at a distance of 6 cm. The temperature of the
substrates was not controlled. The duration of the PLD process was
chosen to fabricate thin films with a thickness of ∼170–180
nm.
Instrumentation
The chemical compositions
of the used targets and deposited layers were assessed by scanning
electron microscopy linked with an energy-dispersive X-ray spectroscopy
analyzer (SEM-EDS, JEOL JSM 6400). The morphology and topography of
pulsed laser-deposited Sn50–AsSe50 films were analyzed by atomic
force microscopy (AFM, Solver NEXT, NT-MDT). The tapping mode imaging
was used (scanned area 2 μm × 2 μm). The SEM technique
was also employed to observe the thin films’ morphology using
a field-emission gun SEM (JSM 6301F). The X-ray diffraction (XRD)
technique was exploited to determine the structure of Sn50–AsSe50 layers
using two instruments: D8-Advance diffractometer (Bruker AXS) and
MiniFlex 600 (Rigaku). The XRD patterns were measured at room temperature
from 5 to 90° (2θ) within 0.01 or 0.02° steps.Raman scattering data of the films were recorded in backscattering
geometry using a high-spectral-resolution (focal length 800 mm) LabRAM
HR Evolution Raman spectrometer (HORIBA Scientific) coupled to a confocal
microscope (objective 100×). For the excitation of Raman scattering
spectra, a laser emitting at 785 nm was employed, with power of a
few milliwatts to avoid the photosensitivity effect. The used grating
had 600 grooves/mm.The optical properties of the fabricated
layers were investigated
using two ellipsometers (VASE and IR VASE, J. A. Woollam Co.): the
first ellipsometer had an automatic rotating analyzer for the spectral
range 0.3–2.3 μm (UV–near-infrared (NIR)), measuring
100 revolutions with a resolution of 20 nm at selected angles of incidence
(65, 70, and 75°); the second ellipsometer had a rotating compensator
for the 1.7–10 μm range using angles of incidence as
mentioned above, 20 scans, 15 spectra per revolution, and a resolution
of 8 cm–1. For the analysis of ellipsometry data
in a broad, measured spectral region (0.3–10 μm), the
Cody–Lorentz oscillator model was used.[61,62]The measurements of temperature-dependent electrical resistance
were carried out in the heating stage MHCS622E (Microptik) using a
two-point method. The measurement was performed in a cell filled with
Ar with the pressure slightly above the atmospheric pressure. The
heating interval was set from room temperature to 400 °C with
a heating rate of 2 °C/min.Mass spectra were recorded
in both positive and negative ion modes
using the mass spectrometer AXIMA Resonance from Kratos Analytical
Ltd. (Manchester, U.K.) coupled with a quadrupole ion trap and time-of-flight
detection. This instrument was exploited for measurements from an m/z of ∼90. For lower m/z values, AXIMA CFR (Kratos Analytical Ltd.) was
employed. A reflectron mode was employed to record the mass spectra
in both ion modes. The instruments were equipped with a nitrogen pulsed
laser operating at a wavelength of 337 nm. The laser repetition rate
was set to 5 Hz with a pulse time width of 3 ns. In both ion modes,
the mass spectra were collected by accumulating the data from ∼1000
laser pulses. The laser energy varied in arbitrary units (au) in the
range of 0–180. Calibration of the mass spectrometer was made
using red phosphorus,[63] which was purchased
from Riedel de Haën (Hannover, Germany) and purified via sublimation
in a nitrogen atmosphere before the usage. For mass spectrometry measurements,
thin films on silicon substrates were fixed to the sample plate with
an adhesive tape. The corresponding Sn1–AsSe powder samples were suspended
in acetonitrile (1 mg/mL). From this suspension, 10 μL was deposited
on a sample plate and dried.
Software and Computation
Stoichiometry
of the detected clusters was determined via computer modelling of
the isotopic envelopes using Launchpad software (Kompact version 2.9.3,
2011) from Kratos Analytical Ltd. (Manchester, U.K.). However, for
low-intensity clusters, in negative mode especially, it was impossible
to identify the clusters unambiguously, because of the similar molecular
masses of Se3 (236.88 Da) and Sn2 (237.38 Da).
Authors: Iryna S Protsak; Simon Champet; Chang-Yang Chiang; Wuzong Zhou; Srinivas R Popuri; Jan-Willem G Bos; Dinesh K Misra; Yevhenii M Morozov; Duncan H Gregory Journal: ACS Omega Date: 2019-03-29