Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments.

Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry-Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry.