Terahertz sensor based on a three-dimensional double I-type metamaterial integrated microfluidic channel.

Terahertz metamaterial sensors have received extensive attention in biosensing applications. However, sensitivity toward terahertz frequencies emitted by liquid samples remains challenging because of the strong absorption of terahertz waves by water. Here, we present a highly sensitive terahertz sensor based on a three-dimensional double I-type metamaterial integrated microfluidic channel. The designed sensor produces an inductive-capacitive (LC) resonance with a high quality factor of approximately 72, while demonstrating a maximum sensitivity of 832 GHz/RIU. Furthermore, we analyzed the relationship between the resonance frequency and ethanol concentration. These findings would promote the application of terahertz technology in label-free and rapid biomedical sensing as well as substance detection.