| Literature DB >> 33804599 |
Errol Zalmijn1,2, Tom Heskes1, Tom Claassen1.
Abstract
Similar to natural complex systems, such as the Earth's climate or a living cell, semiconductor lithography systems are characterized by nonlinear dynamics across more than a dozen orders of magnitude in space and time. Thousands of sensors measure relevant process variables at appropriate sampling rates, to provide time series as primary sources for system diagnostics. However, high-dimensionality, non-linearity and non-stationarity of the data are major challenges to efficiently, yet accurately, diagnose rare or new system issues by merely using model-based approaches. To reliably narrow down the causal search space, we validate a ranking algorithm that applies transfer entropy for bivariate interaction analysis of a system's multivariate time series to obtain a weighted directed graph, and graph eigenvector centrality to identify the system's most important sources of original information or causal influence. The results suggest that this approach robustly identifies the true drivers or causes of a complex system's deviant behavior, even when its reconstructed information transfer network includes redundant edges.Entities:
Keywords: complex systems; coupled Lorenz systems; eigenvector centrality; node importance; original information; time series; transfer entropy
Year: 2021 PMID: 33804599 PMCID: PMC8003657 DOI: 10.3390/e23030369
Source DB: PubMed Journal: Entropy (Basel) ISSN: 1099-4300 Impact factor: 2.524
Figure 1(a) Time series of system composed of bidirectionally delay-coupled Lorenz systems and , generated from Equations (5a)–(5f). (b) Heatmaps of detection count per cause–effect relation, for FaultMap (left) and PCMCI (right). Direct cause–effect relations are denoted by (*).
Figure 2Information transfer network of two bidirectionally delay-coupled Lorenz systems. Edges indicate direct (⟶) or transitive indirect (⤏) information transfer. Edge annotations denote information transfer delay (sec). Node importance indicates a node’s global network influence. Edge-weight represents level of information transfer ().
Figure 3Dynamic information transfer via bidirectional delay-coupling of Lorenz systems and , and dynamic importance of the Lorenz system state variables. (a) Dynamic information transfer (delay) via bidirectional delay-coupling between Lorenz systems and . (b) Distribution of information transfer (delay) in 3a. (c) Dynamic importance of state variables in delay-coupled Lorenz systems and . (d) Distributions of Lorenz system state variable importance in 3c.
Figure 4Top-ranked node (root cause) transfers original information towards event via a network of collateral effects within an ASML subsystem. (Figure 2 legend applies here.)