Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch.

A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm3, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-winding stators and a multipole rotator were adopted to increase the output torque of the actuator. The actuator's working principle and magnetic circuit were analyzed. The calculation results show that the actuator's output torque is decisive to the air gap's magnetic flux density between the stators and the swing disc. NiFe alloy magnetic cores were embedded into each winding center to increase the magnetic flux density. A special manufacturing process was developed for fabricating the stator windings on the ferrite substrate. Six copper windings and NiFe magnetic cores were electroplated onto the ferrite substrates. The corresponding six magnetic poles were configured to the SmCo permanent magnet on the swing disc. A magnetizing device with a particular size was designed and fabricated to magnetize the permanent magnet of the swing disc. The actuator prototype was fabricated, and the performance was tested. The results show that the actuator has a large output torque (40 μNm), fast response (5 ms), and a large swing angle (22°).