Analysis of impedance matching for a spherical multi-degree-of-freedom ultrasonic motor.

A novel spherical multi-degree-of-freedom ultrasonic motor is designed, which can achieve three-degree-of-freedom motion through the cooperative drive of three built-in traveling wave stators. The novel ultrasonic motor has the characteristics of compact structure and high power density. Additionally, in order to solve the problem of impedance mismatch between the ultrasonic motor and the driving power supply, a semi-analytical method of impedance matching based on parallel resonance is proposed according to the impedance characteristics of ultrasonic motor. Through the combination of theoretical derivation and finite element simulation, the ultrasonic motor impedance matching on the impedance circle is analyzed. By this method, the optimum matching inductor of the motor is determined. After matching, the motor obtains a larger vibration amplitude and higher transmission efficiency. Finally, the reliability of the method is verified by simulation and experiment, which provides a reference for further improving the motor performance.