Literature DB >> 3299769

The chemical nature of the microelectronics industry.

T Rohm, L Scarpace, L Fluer.   

Abstract

Many of the processes used in semiconductor fabrication involve chemical reactions. These reactions range from fundamental procedures such as electroplating and cleaning to plasma reactions and ion implantation. This article analyzes the various steps of the semiconductor fabrication process in light of their chemical nature.

Mesh:

Substances:

Year:  1986        PMID: 3299769

Source DB:  PubMed          Journal:  Occup Med        ISSN: 0885-114X


  1 in total

1.  Environmental and workplace contamination in the semiconductor industry: implications for future health of the workforce and community.

Authors:  P Edelman
Journal:  Environ Health Perspect       Date:  1990-06       Impact factor: 9.031

  1 in total

北京卡尤迪生物科技股份有限公司 © 2022-2023.