| Literature DB >> 3299769 |
Abstract
Many of the processes used in semiconductor fabrication involve chemical reactions. These reactions range from fundamental procedures such as electroplating and cleaning to plasma reactions and ion implantation. This article analyzes the various steps of the semiconductor fabrication process in light of their chemical nature.Mesh:
Substances:
Year: 1986 PMID: 3299769
Source DB: PubMed Journal: Occup Med ISSN: 0885-114X