Day by day, the demand for portable, low cost, and efficient chemical/gas-sensing devices is increasing due to worldwide industrial growth for various purposes such as environmental monitoring and health care. To fulfill this demand, nanostructured metal oxides can be used as active materials for chemical/gas sensors due to their high crystallinity, remarkable physical/chemical properties, ease of synthesis, and low cost. In particular, (1D) one-dimensional metal oxides nanostructures, such as nanowires, exhibit a fast response, selectivity, and stability due to their high surface-to-volume ratio, well-defined crystal orientations, controlled unidirectional electrical properties, and self-heating phenomenon. Moreover, with the availability of large-scale production methods for nanowire growth such as thermal oxidation and evaporation-condensation growth, the development of highly efficient, low cost, portable, and stable chemical sensing devices is possible. In the last two decades, tremendous advances have been achieved in 1D nanostructured gas sensors ever since the pioneering work by Comini on the development of a SnO2 nanobelt for gas sensor applications in 2002, which is one such example from which many researchers began to explore the field of 1D-nanostructure-based chemical/gas sensors. The Sensor Laboratory (University of Brescia) has made major contributions to the field of metal oxide nanowire chemical/gas-sensing devices. Over the years, different metal oxides such as SnO2, ZnO, WO3, NiO, CuO, and their heterostructures have been grown for their nanowire morphology and successfully integrated into chemoresistive gas-sensing devices. Hence in this invited feature article, Sensor Laboratory research on the synthesis of metal oxide nanowires and novel heterostructures and their characterization and gas-sensing performance during exposure to different gas analytes has been presented. Moreover, some new strategies such as branched-like nanowire heterostructures and core-shell nanowire structures adopted to enhance the performance of nanowire-based chemical sensor are presented in detail.
Day by day, the demand for portable, low cost, and efficient chemical/gas-sensing devices is increasing due to worldwide industrial growth for various purposes such as environmental monitoring and health care. To fulfill this demand, nanostructured metal oxides can be used as active materials for chemical/gas sensors due to their high crystallinity, remarkable physical/chemical properties, ease of synthesis, and low cost. In particular, (1D) one-dimensionalmetal oxides nanostructures, such as nanowires, exhibit a fast response, selectivity, and stability due to their high surface-to-volume ratio, well-defined crystal orientations, controlled unidirectional electrical properties, and self-heating phenomenon. Moreover, with the availability of large-scale production methods for nanowire growth such as thermal oxidation and evaporation-condensation growth, the development of highly efficient, low cost, portable, and stable chemical sensing devices is possible. In the last two decades, tremendous advances have been achieved in 1D nanostructured gas sensors ever since the pioneering work by Comini on the development of a SnO2 nanobelt for gas sensor applications in 2002, which is one such example from which many researchers began to explore the field of 1D-nanostructure-based chemical/gas sensors. The Sensor Laboratory (University of Brescia) has made major contributions to the field of metal oxide nanowire chemical/gas-sensing devices. Over the years, different metal oxides such as SnO2, ZnO, WO3, NiO, CuO, and their heterostructures have been grown for their nanowire morphology and successfully integrated into chemoresistive gas-sensing devices. Hence in this invited feature article, Sensor Laboratory research on the synthesis of metal oxide nanowires and novel heterostructures and their characterization and gas-sensing performance during exposure to different gas analytes has been presented. Moreover, some new strategies such as branched-like nanowire heterostructures and core-shell nanowire structures adopted to enhance the performance of nanowire-based chemical sensor are presented in detail.
From
its beginning, the electronics industry was ruled by silicon.
In parallel to its evolution, there is a continuous effort to find
alternative materials due to the high cost of silicon-based electronic
devices and most importantly to avoid relying on a single material.
Thus, as an alternatives, many materials such as organic semiconductors[1] and pervoskites[2] have
been explored by researchers over the years. In 2010, when the Nobel
Prize in Physics was announced, graphene[3] was immediately considered to be the material of the century. However,
among all of these, metal oxides (MOXs) were silently doing their
job, and nowadays they are used in many modern electronic device applications
such as thin film transistors,[4] chemical
sensors,[5] biosensors,[6] and solar cells.[7] The reason
behind their success is high stability, abundance on earth, and remarkable
chemical/physical properties that can be tuned according to the requirements
for particular applications.Among the successful exploitation
of MOXs, there are commercially
available indium gallium zinc oxide (IGZO)-based high-mobility transistors.[8,9] MOXs are also considered to be potential candidates for future transparent
electronic devices due to their high band gap in the ultraviolet region
that makes them transparent in the visible region of the spectrum.[10−12]Another important area of application in which MOXs are immensely
explored is chemical/gas sensors due to their properties such as low
cost, compact size, ease of fabrication, and high abundance on the
earth’s crust.[13,14] For example, tin dioxide (SnO2) is one of the most explored materials in the field of gas
sensors.[15−17] A chemical sensor is a device that convert a chemicalsignal obtained via the interaction of a chemical analyte with an
active sensing materials (such as MOX) into a measurable signal (optical,
electrical, and magnetic etc.).[18] In the
last two decades, chemoresistive sensors (measurable signal: resistance
or conductance) have been extensively investigated to detect a large
number of chemical analytes such as volatile organic compounds,[19] toxic gases,[20] explosives,[21] and environment pollutants.[22] The performance of these sensing devices largely depends
upon the microstructural properties of the active sensing material.
In this regard, nanostructured metal oxide-based gas sensors are attracting
attention due to their fast response and high sensitivity.[23−25] However, the selectivity of these devices is still a major issue,
and many different strategies such as surface functionalization have
been explored to limit or overcome this challenging issue.[26,27] Moreover, MOXs in nanostructured form possess a high surface-to-volume
ratio, a higher degree of crystallinity, and better stoichiometry.[23] Another important aspect of MOXs is the possibility
to grow them with different morphologies such as nanowires,[5] nanobelts,[28] and nanodots.[29] These MOX nanostructures can be grown by using
physical,[30] chemical,[31] and solution-processable techniques.[32]Among these nanostructured forms, 1D MOX nanowires
(NWs) possess
well-defined crystal orientations and single crystallinity that leads
to controlled reactions and increased stability of the sensing devices
based on them.[23,33] The MOX NW gas sensors had faster
response dynamics because there was no need for gas diffusion prior
to surface reactions. Moreover, very interesting effects such as self-heating,
which can be exploited in gas sensing, are effective only for nanowire
morphology.[5,34] For recent developments in nanostructured
metal oxide gas sensors, the reader can also refer to other interesting
review articles.[35−37]In the field of MOX NW-based gas sensors, the
Sensor Laboratory
(University of Brescia) has done pioneering work concerning the growth,
integration, functional characterization, and improvements of the
MOX sensing performance. We have grown MOX NWs such as ZnO, SnO2, WO3, TiO2, CuO, and NiO using different
techniques and procedures. These techniques are mainly based on two
principles: thermal oxidation and vapor-phase growth using vapor–solid
(VS) and vapor–liquid–solid (VLS) mechanisms. In all
of these cases, laboratory-made equipment has been developed by the
Sensor Laboratory.In this invited feature article, the contributions
of the Sensor
Laboratory to the development of MOX NW-based chemical/gas sensors
will be presented. In particular, the working principles of chemoresistive
sensors, the gas-sensing mechanism, the device structure, and the
techniques used for nanowire synthesis and their growth mechanism
will be described. Moreover, their functional properties, measured
using different techniques, will be discussed. In the final sections,
their sensing performance and new strategies to enhance their performance
will be presented.
Metal Oxide Gas-Sensing Mechanism and Device
Structure of a
Conductometric Gas Sensor and Their Working Principles
Gas-Sensing
Mechanism
In order to understand the gas-sensing
mechanism of n- and p-type semiconductor MOXs, it is important to
understand the origin of their semiconducting nature. It is well known
that, in Si-based semiconductors, the majority charge carriers (electrons
or holes) can be manipulated by doping with donor or acceptors impurities.[38] However, in wide-band-gap MOX, the nonstoichiometry
determines the majority charge carriers if no intentional doping has
been introduced.[39,40] For example, the NiO p-type semiconducting
character can be explained by the deficiency in metal ions, while
SnO2 n-type behavior is a result of the generation of free
electrons, as oxygen vacancies are formed.[39] In semiconductor MOX-based chemical/gas sensors, the high response
toward specific molecules can be achieved by operating the sensors
at a particular optimal temperature that changes the concentration
of a majority of the charge carriers and the chemical interaction
with the surrounding atmosphere. Furthermore, at elevated temperatures
(100–500 °C), oxygen molecules are chemisorbed and ionized
(O2–, O–, and O2–) by capturing the electrons from the semiconductor
surface.[41] The chemisorption of oxygen
ions that occurs on the MOX surface at different temperatures is shown
in the following equations:[42]Thus, at temperatures of less than
100 °C,
adsorbed oxygen ions capture electrons from the MOX surface and become
O2–, while in the temperature range of
100–300 °C, O2– captures
electrons from the MOX surface and becomes O–. Finally,
at temperatures greater than 300 °C, O2– exists
on the surface of MOX. This adsorption of oxygen ions leads to the
formation of an electron core–core–shell configuration.
In n-type MOX such as SnO2, due to oxygen ion sorption,
an electron depletion layer (EDL) and a shell around the semiconducting
core are formed, while in p-type MOX a hole accumulation layer (HAL)
and a shell near the surface and around the insulating core are formed.
The core–shell configuration of both n- and p-type semiconductors
is shown in Figure .[39]
Figure 1
Schematic of formation of electronic core–shell
structures
in (a) n-type and (b) p-type metal oxide semiconductors. Redrawn from
ref (39).
Schematic of formation of electronic core–shell
structures
in (a) n-type and (b) p-type metal oxide semiconductors. Redrawn from
ref (39).In order to further elaborate on the formation of the EDL
layer
in n-type MOX, a band diagram before and after the chemisorption of
oxygen is presented in Figure .[40,43] In vacuum, the bands are flat and the surface
states are completely empty. However, when MOX is exposed to air,
oxygen chemisorption occurs on their surface. These chemisorbed ions
capture electrons from the conduction band of MOX and induce the band-bending
phenomenon (upward band bending). The captured electrons trapped on
the surface of MOX in the form of negative ions and the EDL on n-type
metal oxides is formed.[43] On the other
hand, the chemisorption of oxygen on p-type metal oxides forms the
HAL.
Figure 2
Band-bending phenomenon in n-type metal oxides due to the chemisorption
of oxygen. EO, EC, EV, and EF represent the vacuum level, conduction band, valence band,
and Fermi level energies of the semiconductor.
Band-bending phenomenon in n-type metal oxides due to the chemisorption
of oxygen. EO, EC, EV, and EF represent the vacuum level, conduction band, valence band,
and Fermi level energies of the semiconductor.Interestingly, Iwamoto et al.[44] have
found that the numbers of oxygen ions adsorbed on the surface of n-
and p-type semiconductors are considerably different. The total amount
of oxygen desorbed below 560 °C (V560) for 16 MOX was measured through the use of temperature-programmed
desorption (TPD). The experiments proved that a large number of adsorbed
oxygen species (large value of V560) exist
on p-type metal oxides (MnO2, NiO, Co3O4, and Cr2O3) in comparison to the n-type
ones (SnO2, TiO2, ZnO, and Fe2O3). However, among the n-type MOX, transition MOX (i.e., Fe2O3) had the highest V560 value since their oxidation state may vary. Thus, the low stability
of transition-metal oxides (NiO, Co3O4, MnO2, and Cr2O3) is the basic reason behind
the greater ionosorption of oxygen.[44]By taking into account the core–shell configuration of MOX,
the resistance of n-type MOX-based chemical/gas sensors is determined
by the resistive contacts between shells (shell-to-shell contacts).[39] If we define Rcore and Rshell as the resistances of a semiconducting
core and a resistive interparticle shell, respectively, then the total
resistance of the n-type MOX gas sensor will be the series combination
of both of these, while in the p-type MOX sensors, the conduction
can be explained by the parallel path created between the wide resistive
core (Rcore) and narrow conducting shell
(Rshell).[40] Therefore, when n-type MOXs are exposed to a reducing gas such as
carbon monoxide (CO), electrons are transferred to the semiconductor
and CO is oxidized by the reaction with the surface-adsorbed oxygen
ions. This results in a decrease in sensor resistance (increase in
conductance) which is proportional to the gas analyte concentration
and can be described by the following equations:The overall effect is a change in the density
of adsorbed oxygen ions that is detected as a decrease in sensor resistance.
On the other hand, the interaction of n-type metal oxides with a strong
electronegative gas such as NO2 (oxidizing gas) increases
the sensor resistance as[45]The electron injection into a p-type MOX by
the interaction with a reducing gas (CO) decreases the hole concentration
in the HAL layer, thus increasing the sensor resistance. According
to the literature, n-type MOX sensors generally have a higher response
(measured as the change in the sensor resistance/conductance when
exposed to the chemical compound relative to its value in air) as
compared to p-type MOX.[46] This is the basic
reason that p-type MOXs have been less-frequently investigated as
compared to the n-type ones. It is always a challenge to fabricate
highly sensitive p-type MOX chemical/gas sensors. The conduction in
p-type semiconductors occurs mainly in the narrow HAL, and the hole–electron
recombination (electrons donated by the reducing gas) does not affect
the overall resistance of the sensor significantly.[39] Hence, the response of p-type MOX sensors is usually lower
than that of n-type MOX sensors. If Sp and Snare the responses of p- and n-type
MOX sensors for particular gas analytes and semiconductor materials
with the same morphology, then according to Hubner et al.[47] they can be related by the following equation:Hence according to the above equation,
it
is very difficult to develop a highly sensitive gas sensor based on
p-type MOX.However, p-type metal oxidesare still considered
to be potential
materials for new chemoresistive gas sensors due to their unique physical/chemical
properties. Moreover, due to the advance in the field of nanotechnology,
continuous effort has been expended in the development of p-type gas
sensors. For example, sensor NiO nanowires were grown for the first
time using the VLS mechanism, and they were integrated into conductometric
chemical sensors that exhibited remarkable performance toward H2.[48]To determine the final
sensing performances, apart from the chemical
reaction and conduction mechanism mentioned above, other important
parameters such as the surface morphology, nanocrystalline properties,
and the large surface-to-volume ratio have to be taken into account.
For this reason, it is very challenging to predict the sensing behavior
of an active material without experimental tests. However, in order
to understand the gas-sensing mechanism of metal oxides, in situ operando
experiments such as X-ray absorption spectroscopy have been performed
in the past.[17,49,50]
Device Structure and Working Principle of a Conductometric Sensor
The three main components of a conductometric gas sensor device
are the following:An active sensing material that must
be deposited on the substrate;Electrodes for the functional measurement;
andA heater that keep
the sensor at the
desired working temperatureThese three
main components are considered while making
conductometric sensing devices. However, the simplest form of a conductometric
gas-sensing device can be an active sensing material (thin film, nanowires,
and nanobelts) deposited between the two metal electrodes. Thanks
to advances in micro/nanofabrication, different structures and dimensions
can be achieved. At the Sensor Laboratory, sensing devices were prepared
via dc magnetron sputtering having dimensions that were as small as
2 × 2 mm2.[48] The step-by-step
fabrication of a conductometric sensor and the picture of a complete
sensing device are shown in Figure .
Figure 3
(a) Picture of the real gas-sensing device used in the
Sensor Laboratory
(UniBs). (b) Step-by-step fabrication of a conductometric device.
(a) Picture of the real gas-sensing device used in the
Sensor Laboratory
(UniBs). (b) Step-by-step fabrication of a conductometric device.In particular, the first step involves the growth
of nanowires
on insulating substrates, such as aluminum oxide, using different
growth techniques. For the electrode deposition, first an alloy of
Ti/W and Pt soldering pads was deposited on the substrate using sputtering.
Afterward, the interdigitated Pt electrodes were deposited on the
nanowires by using shadow masking in order to have higher electrical
conductance and mechanically stable gold wire bonding. The pads were
used for the electro-soldering of gold wire. For temperature-dependent
sensing measurements, Pt heating elements were also deposited using
dc magnetron sputtering on the back side of the substrates. To achieve
this, the successive deposition of Pt pads (using a Ti/W adhesion
layer) and Pt contacts has been performed. Prepared devices were finally
mounted on TO packages using electro-soldered gold wires (Figure b).The working
principle of chemoresistive gas sensors relies on the
change in electrical resistance/conductance of the active sensing
materials upon interaction with the gas analyte. The nature of the
sensitive materials (n-type or p-type) and the target gas (oxidizing
or reducing) governs the increase or decrease in electrical resistance.
In the class of solid-state metal oxide-based chemical/gas sensors,
conductometric ones are the most investigated and exploited devices
and are designed for the detection of toxic as well as inflammable
gases in the surrounding atmosphere and for monitoring technological
processes.[51−53] In gas-sensing measurements, the change in electrical
conductance or resistance of a sensor upon interaction with the gas
is measured at an optimal working temperature. A constant dc voltage
whose value may vary depending on the resistance of the sensor is
kept constant during the measurement. To find the optimal working
temperature of the sensor for a particular gas analyte, the response
of the sensor is recorded at different temperatures. The maximum in
the response vs temperature plot for a given gas analyte is considered
to be the optimal working temperature. The main advantages of metaloxide conductometric sensors are low production cost, ease of fabrication,
and simple operation thanks to their intrinsic properties as well
as manufacturing techniques.[54] This implies
that mass production at reasonable cost is possible using well-engineered
metal oxide conductometric sensors. Brief details of the conductometric
gas-sensing measurement setup developed and used in the Sensor Laboratory
are described in the Supporting Information.
Important Sensing Parameters
In general, the electrical
conductance/resistance of the metal oxide-based conductometric gas
sensors changes with exposure to the target gas. The nature of the
sensitive materials (n-type or p-type metal oxide semiconductors)
and the target gas (oxidizing or reducing) governs the electrical
resistance increase or decrease. For example, when an n-type semiconductor
is exposed to a reducing gas, the resistance decreases, whereas upon
exposure to an oxidizing gas, the resistance increases. Figure reports the typical dynamic
response curve of a gas sensor. According to this curve, a change
in conductance or resistance is registered when it is exposed to a
gas analyte (“gas on”). After reaching a stable conductance
value in the presence of the gas, the air flow is restored (“gas
off”) and the sensor recovers to its initial value (baseline
conductance and resistance). In Figure , the response and recovery times of sensors can be
determined.
Figure 5
(a) VLS mechanism for the growth of nanowires. (b) Schematics of
the custom tubular furnace used for the fabrication of MOX nanowires.
(c) Steps involved in the growth process of nanowires.
Figure 4
Typical response curve of a conductometric gas sensor.
Typical response curve of a conductometric gas sensor.Some of the important sensing parameters that are used to
characterize
the sensing performances are the following:[55]Thus, according to the above equation, selectivity
is the ability of the sensor to discriminate the response for a particular
gas analyte from other interfering gases.Sensitivity
(S): Sensitivity can be
defined as the change in the measured signal per analyte concentration
unit (i.e., the slope of a calibration curve). It should be noted
that the calibration curve is a log–log graph between the sensor
response and the analyte concentration.Selectivity: Selectivity determines
whether a sensor can respond selectively to a group of analytes or
even specifically to a single analyte. It generally expressed asResponse time: This is defined as the
time required for a sensing device to respond to a step concentration
change from zero to a certain concentration value. In addition, the
response time can be calculated as the time required for a sensor
resistance/conductance to reach 90% of the equilibrium value during
exposure to a gas analyte. The response time indicates how fast or
slow a sensor can respond when a gas analyte is introduced into the
test chamber.Recovery
time: When the step concentration
changes from a certain value to zero, the recovery time is the time
taken by the sensor to return to its initialsignal value. In addition,
the recovery time can be calculated as the time required for the sensor
resistance/conductance to return to 70% of its original value of resistance/conductance
in air. The recovery time indicates how quickly or slowly the sensor
recovers to its initial conductance when the air flow is restored.Stability: This defines
the ability
of a sensor to provide reproducible results for a certain period of
time.Detection limit:
This can be defined
as the lowest concentration of gas analyte detected by the sensor
under experimental conditions such as temperature. The detection limit
can be calculated by fitting the log–log plot of response vs
different gas concentrations (calibration curve). It is the minimum
concentration that a sensing device can detect under optimized conditions
by giving a detectable signal.Optimal working temperature: This corresponds
to the temperature at which the sensor gives the maximum response
to the gas analyte.All of the above-mentioned
parameters are used to characterize
the sensor performance. An ideal sensor should be highly sensitive,
selective, and stable with a low detection limit and a short response
time. However, it is very difficult to optimize all of these parameters
together in a single sensing device, and researchers usually make
an effort to approach only some of them.
Fabrication of Metal Oxide-Based
One-Dimensional Nanostructures
and Their Characteristics
For 1D nanostructure fabrication,
the most important requirements
are dimensions, morphology control, crystalline properties, and uniformity.[23,41] Furthermore, a preferential growth direction with a faster growth
rate and higher yield is mandatory.One-dimensional nanostructures
can be prepared by following two
different technologies: bottom-up and top-down.[56] Top-down technology is based on standard microfabrication
equipment with the deposition and etching of planar structures to
reduce their lateral dimensions down to the nanoscale level. Other
techniques such as focused ion beams, electron beams, and X-ray lithography
have been used.[57−59] The major hindrances that come with top-down approaches
are the long preparation time and remarkably elevated costs. However,
one should not forget the positive aspects of this approach, such
as using a well-known technology coming from the semiconductor industry.
In addition, the structures can be prepared directly on planar substrates,
which allows for easier successive electrical connection with the
macro world. In the literature, many reports have been published on
the fabrication of 1D nanostructures with a top-down approach.[60−63]On the contrary, bottom-up synthesis is based on the assembly
of
molecular building blocks or chemical synthesis directly into nanosized
morphology. This approach presents many advantages such as high purity,
crystallinity, and the easy achievement of reduced dimensions of the
fabricated materials, in addition to the low cost of the experimental
setups together with the possibility to easily vary the intentional
doping and formation of junction-based devices.[19,64] However, the major issue regards the integration into planar substrates
necessary to take full advantage of the useful properties. Furthermore,
nanostructure patterning and alignment may be difficult.Thus,
bringing together both the bottom-up (for the fabrication
of the nanostructures) and top-down (for large scale fabrication)
approaches is the most promising scheme for producing highly functional
materials.To grow MOX nanowires, various techniques such as
the hydrothermal
method,[65] sol–gel chemistry,[66] and electrospinning[67] have been proposed and successfully implemented by the researchers
for gas-sensing applications. However, in this review we will mainly
focus on the bottom-up growth techniques (i.e., vapor/liquid phase
growth methods and thermal oxidation that were used in the Sensor
Laboratory).
Vapor-Phase Growth
Vapor-phase growth was proposed
by Wagner and Ellis in the early 1960s and is one of the first techniques
developed for preparing micro- and nanostructures.[68] It consists of the evaporation of source material in a
tubular furnace (Figure b). The evaporated source material is transported
by a carrier gas from a hotter region to a colder one. Here the material
condenses and nucleates on growth sites (Figure a). The actual idea was presented for silicon
whiskers and afterward was adapted for other materials such as metaloxides. Condensation on the substrate could occur according to two
different mechanisms: vapor–solid (VS) and vapor–liquid–solid
(VLS).(a) VLS mechanism for the growth of nanowires. (b) Schematics of
the custom tubular furnace used for the fabrication of MOX nanowires.
(c) Steps involved in the growth process of nanowires.The VS growth takes place when the NW crystallization emerges
from
the direct condensation of the source material without the presence
of any catalyst.[69] In this mechanism, source
materials are heated under high temperature from the vapors and directly
condensed on the target substrates placed in the relatively low temperature
region. Once the condensation process starts, the initially condensed
molecules create seed crystals that serve as nucleation sites for
the further growth of nanowires.[70]On the other hand, the VLS mechanism[71,72] is named after
the three different phases of material involved in the growth process:
the vapor state of the source material, a liquid catalyst droplet,
and the solid crystalline nanostructure that is produced. Catalysts
can be deposited on the substrates using different techniques such
as colloidal solutions and magnetron sputtering. Liquid metal clusters
or catalysts act as favorite adsorption sites for the vapor, and when
supersaturation is reached, there is a segregation normally at the
bottom of the cluster and the nanowire growth starts. Metal catalysts
are essential in the VLS mechanism, but not all metals can be effective.
These catalysts need to fulfill some requirements, such as they must
be liquid at the deposition temperature, they must be inert to chemical
reactions, the vapor pressure of the catalyst component over the liquid
alloy should be small, and they must not make intermediate solids.[73−75]The most widely used catalysts are noble metals such as gold,
ruthenium,
platinum, and palladium.[75] The dimensions
of the nanowires can be directly related to the size of the catalyst
clusters.[41,76] This can be either by matching the size
or by the process involving the catalyst curvature in which lattice
matching and strain matching are important.[75]One-dimensional nanostructure growth via the VLS or VS mechanism
can be achieved using a tubular furnace that is able to reach the
high temperatures necessary for material evaporation.[19,77,78] In order to reduce and control
the pressure inside the alumina tube, the system must be connected
to vacuum pumps. This will reduce the evaporation temperature and
avoid the inclusions of unintentional dopants into the growing nanostructures.
In order to ease the mass transport, a gas carrier is normally used,
and mass flow controllers inject the carrier gases (normally argon)
inside the system (Figure b). For better reproducibility, a homemade NI LabVIEW virtual
instrument (VI) that fully controls the system has been used to control
the whole process. MOX powder is placed in an alumina boat, in the
middle of the alumina tube, at a temperature which is high enough
to induce the evaporation of source material. The growth substrates
(with and without catalyst) are placed on the alumina substrate holder
in a colder region of the tube. During the heating step, the flow
of the carrier gas is restricted to the reverse direction, from the
substrates to the powder, in order to avoid any undesired condensation
of the powder under undesired growth conditions. As the furnace reaches
the desired temperature, the flow is switched to the direct direction,
from powder to the substrates, and the deposition begins. The deposition
time depends on the different growth parameters such as the amount
of material desired, the preferred morphology, and so on. During cooling,
the flow is kept in the reverse direction (Figure c). It is possible to tune the achieved morphology
by changing the pressure inside the alumina tube, the condensation
temperature, the carrier gas flow, the deposition time, and the catalyst
used for the fabrication process.Different n-type ZnO,[79−82] SnO2,[83−86] In2O3,[87−89] and WO3[77] and p-type NiO[48,78,90] metal oxide nanowires deposited
on various substrates were successfully used in the Sensor Laboratory
with this experimental setup. Some major advantages and disadvantages
related to the vapor-phase growth technique in tabular form are presented
in the Supporting Information.
Structural
and Morphological Characterization
Tin dioxide
(SnO2) is a MOX that has been extensively exploited for
gas-sensing application in many different forms such as thick films,
thin films, and nanowires.[83,84,91,92] Our group[28] was the first to present a report on the synthesis of tin
dioxide nanobelts using the simple catalyst-assisted evaporation–condensation
of source material (in powder form) for gas-sensing application. This
work encouraged many researchers worldwide to work in the field of
nanostructured MOX synthesis for gas-sensing application. Furthermore,
in 2007 our group[85] reported on the conductometric
gas-sensing application of tin dioxide nanowires grown by VLS and
VS mechanisms. For VLS growth, platinum (Pt) is used as the catalyst
to promote the nucleation of nanowire growth. The evaporation of source
material (SnO2) was performed at 1370 °C and the substrate
were placed at 470 °C to achieve nanowire growth by VLS, while
for catalyst free growth (VS), the substrates were placed at 330 °C.
The higher temperature permits the formation of melted Pt–Sn
clusters, which aids nanowire nucleation. HR-TEM reveals that the
growth of nanowires proceeds along a specific crystallographic direction
(i.e., [100]). No evidence of the epitaxial relationship between the
nanowires and the substrate was established in the case of VS growth.
Instead, in the VLS process, the presence of the Pt catalyst was attributed
to the promotion and formation of aligned nanowires.Following
this interesting work, many other works on the synthesis of SnO2 nanowires using the same technique but optimizing the growth
condition for different substrates and catalysts have been reported.[83,86,93,94] Gold (Au) is another optimal catalyst for the synthesis of SnO2 nanowires with a diameter of 100 nm to 1 μm.[93] Interestingly, throughout the literature many
different catalysts (Au, Pt, Ag, and Sn)[86,94,95] were used in order to obtain NW morphology
for chemical/gas sensing, which also confirms that SnO2 is one of the profoundly exploited materials.Figure shows the
high-resolution images and crystalline pattern of a ZnO nanowire grown
by the VS mechanism on an alumina substrate.[82] The nanowire features a diameter ranging between 72 and 78 nm and
appears uniform with a tapered termination, likely to be determined
by the crystalline aspect. The nanowire grown by this method exhibits
single-crystal growth.
Figure 6
(Left) TEM bright-field image, (center) electron diffraction
pattern
of the ZnO nanowire, and (right) high-resolution image of the crystalline
arrangement. Adapted with permission from ref (82). Copyright (2007) IOPscience.
(Left) TEM bright-field image, (center) electron diffraction
pattern
of the ZnO nanowire, and (right) high-resolution image of the crystalline
arrangement. Adapted with permission from ref (82). Copyright (2007) IOPscience.A number of reports has been published in the past
decade on ZnO
nanowire synthesis using the VLS mechanism to study the influence
of substrate temperatures and catalysts.[79,96,97] The most prominent catalysts are noble metals
such as Au and Pt. However, the use of different types of substrates,
such as crystalline instead of polycrystalline substrates, influences
the ZnO nanowire growth.[98] In this particular
case, the nanowires process a diameter ranging from 50 to 100 nm with
a random orientation, along with some planar structures such as platelets
that were also observed. However, the nanowires were found to be single-crystalline
in nature. According to the literature, it has been observed that
the ZnO nanowires grown using the vapor-phase technique are very sensitive
to the substrate type and temperature.[79,96]In a
recent report, the vapor-phase growth has also been successfully
used for the synthesis of WO3 nanowires.[77] In the case of WO3, this method has been rarely
used.[99] It has been observed that the evaporation
and substrates temperatures for the nanowire growth are lower compared
to the ones used for other n-type semiconductor materials (SnO2 and In2O3). The influence of different
catalysts (Au and Pt), substrate temperatures, and deposition time
was analyzed. In the case of a platinum catalyst, no growth of nanowires
was observed at substrate temperatures of 525 and 580 °C. On
the other hand, using Au as a catalyst, the nanowire growth is uniform,
and when the substrate temperature was increased to 580 °C, the
nanowires grow longer as shown in Figure . Their diameter was found to be in the range
of 10–30 nm with a length of less than 100 nm.
Figure 7
SEM images of WO3 nanowires at an evaporation temperature
of 1100 °C, a pressure of 1 mbar, and an argon flow of 100 sccm
for Au and Pt catalysts at substrate temperatures of 525 and 580 °C,
respectively. Adapted with permission from ref (77). Copyright (2019) American
Chemical Society.
SEM images of WO3 nanowires at an evaporation temperature
of 1100 °C, a pressure of 1 mbar, and an argon flow of 100 sccm
for Au and Pt catalysts at substrate temperatures of 525 and 580 °C,
respectively. Adapted with permission from ref (77). Copyright (2019) American
Chemical Society.On the other hand, p-type
metal oxides have been the least studied
using this growth technique. Kaur et al.[48] at the Sensor Laboratory were the first to report NiO nanowires
synthesis using VLS for the integration into gas-sensing devices.
The required evaporation temperature and the optimal growth temperature
were higher with respect to the previously reported n-type semiconducting
materials. For the first time, the authors presented details of the
growth, including the effect of different experimental parameters
such as the catalyst (Au, Pt, or Pd), substrate temperature, and different
carrier gas flows. The achieved nanowires were uniform and very dense
using Au as a catalyst with an Ar flow of 100 sccm and 930 °C
as the condensation temperature. The deposited nanowires were long
and thin and had a denser morphology with diameters ranging from 16
to 50 nm and were single-crystalline in nature using Au in comparison
to other catalysts.
Thermal Oxidation
Thermal oxidation
is among the easiest
and highest-yielding techniques for growing different metal oxide
nanostructures.[100−102] This technique has several advantages such
as the production of highly crystalline materials, easy patterning,
scalability for a large amount of production with high yields, and
possible operation at atmospheric pressure for some materials.[5] However, the major drawback is the time required
for the growth process, which can be hours.For some specific
metal oxides such CuO, the growth mechanism is fully understood. Zappa
et al. have described that during the formation of thermally oxidized
CuO NWs, first the metallicCu oxidized to form a Cu2O
film (Cu +O2 → Cu2O). This Cu2O film further oxidized to CuO (Cu2 O + O2 →
CuO) and produced CuO NWs. Moreover, Arafat et al.[100] have investigated the effect of mechanicalstress on thermally
oxidized TiO2 nanowire growth. Indeed, the induced stress
has significantly improved the nanowire coverage and confinement.
Due to the high thermal energy, the surface reactions are occurring
with oxygen atoms present in the atmosphere (Figure a,b).[103] The process
of nucleation starts due to oxygen atom diffusion inside the metal
layer because of the mechanicalstress. Furthermore, the nanowire
growth is also promoted by the presence of in-phase tensile stresses
(Figure c), and the
uppermost layer is highly defective, porous, and oxidized. For further
oxidation, metal atoms find two pathways, lattice or grain-boundary
diffusion to reach the interface of oxide/air. Due to the lattice
diffusion, the oxide layer thickness increases, while the diffusion
at grain boundaries results in nanowire formation (Figure d).[103−105]
Figure 8
Growth
mechanism of thermal oxidation. (a) Presence of oxygen ions
in the atmosphere. (b) Surface reactions between oxygen ions and metallic
atoms. (c) Diffusion of oxygen into the metal and nucleation of nanowires.
(d) Growth of nanowires and oxidation.
Growth
mechanism of thermal oxidation. (a) Presence of oxygen ions
in the atmosphere. (b) Surface reactions between oxygen ions and metallic
atoms. (c) Diffusion of oxygen into the metal and nucleation of nanowires.
(d) Growth of nanowires and oxidation.The growth of nanostructures consists of two steps: the deposition
of a metallic layer followed by the thermal oxidation shown in Figure . For the metal layer
deposition, different techniques can be applied such as electrodeposition,
magnetron sputtering, and thermal evaporation. The substrate with
the patterned metal deposition must undergo thermal oxidation treatment;
therefore, it is placed in the tubular furnace in an oxidizing atmosphere
(a mixture of oxygen and argon). Controlling different parameters
such as the furnace temperature, deposition time, atmospheric composition,
and gas flow allow the control of nanostructure morphology and uniformity.
Using this technique, ZnO,[105] WO3,[30,106] Nb-doped WO3,[107,108] and CuO[109] nanowires have been prepared
for the chemical sensing application.Some major advantages
and disadvantages related to the thermal
oxidation technique in tabular form are presented in the Supporting Information.
Structural and Morphological
Characterization
Assorted
metal oxide-based nanowires grown by using thermal oxidation techniques
are presented in the literature. Adopting this technique also provides
the flexibility to fabricate the nanowires directly onto the active
transducer. ZnO is one of the most exploited materials in different
applications.[80,110,111] Using thermal oxidation, highly scalable ZnO nanowires have been
prepared directly on alumina substrate.[105] The morphology largely depends on the oxidation temperature and
oxidation time. Figure shows the temperature-dependent morphology of ZnO nanostructures
grown using thermal oxidation. Clearly, between 400 and 600 °C,
nanowire morphology was observed under a controlled atmosphere of
oxygen and argon, while at 200 °C, ZnO nanoparticles are formed.
Figure 9
Influence
of oxidation temperature: (a) 200, (b) 300, (c) 400,
(d) 500, (e) 600, (f) 700, and (g) 800 °C. The atmospheric composition
was 100% O2, while the metallic zinc sputtering time was
3 h (4.5 μm) at RT. All images are at 20K magnification. Adapted
with permission from ref (105). Copyright (2013) IOPscience.
Influence
of oxidation temperature: (a) 200, (b) 300, (c) 400,
(d) 500, (e) 600, (f) 700, and (g) 800 °C. The atmospheric composition
was 100% O2, while the metallic zinc sputtering time was
3 h (4.5 μm) at RT. All images are at 20K magnification. Adapted
with permission from ref (105). Copyright (2013) IOPscience.Larger nanoparticles are obtained at 700 and 800 °C with a
porous-like structure. However, ZnO nanostructures obtained by thermal
oxidation are less well defined in comparison with the ones prepared
by VLS. Furthermore, the oxygen composition strongly affects the morphology.
At 400 °C, the decreasing oxygen ratio at atmospheric composition
promotes the formation of dense and longer nanowires, although the
same composition has no effect on the morphology at lower temperatures.[105]In the case of WO3 nanowire
growth by thermal oxidation,
the thickness of the metallic film and the temperature play fundamental
roles.[106] This report presents two different
metallic tungsten layer thicknesses (18 and 180 nm) and film deposition
temperatures (200 and 300 °C) via thermal oxidation in the tubular
furnace at 550 °C for 1 h with an oxygen flow of 2 sccm. The
morphological investigation shows that the sputtering temperature
seems to have a strong influence on the nanowire size. The nanowires
have a larger diameter and a longer length for a layer produced at
300 °C than for one produced at 200 °C; however, the average
diameter in both cases is 40 nm as shown in Figure . The influence is more prominent in the
case of the metallic layer prepared at 300 °C rather than 200
°C, which is due to the abundance of bulk tungstenmetal present
underneath nanowires (confirmed from the GI-XRD study). However, after
the thermal treatment at temperatures of around 400 °C, this
metal layer is also oxidized.
Figure 10
SEM pictures of oxidized 18 and 180 nm
tungsten films deposited
at different temperatures by rf magnetron sputtering. Adapted with
permission from ref (106). Copyright (2014) Royal Society of Chemistry.
SEM pictures of oxidized 18 and 180 nm
tungsten films deposited
at different temperatures by rf magnetron sputtering. Adapted with
permission from ref (106). Copyright (2014) Royal Society of Chemistry.In a recent article, a successful attempt to grow Nb-doped tungstenoxide nanowires by thermal oxidation has been reported.[107] To achieve Nb-WO3 nanostructures,
the metal layer deposition was performed with magnetron sputtering
using a target of W with a variable number of niobium insets. An alloy
of metallic tungsten–niobium was deposited on an alumina substrate,
with a composition that varies with the number of Nb insets. With
only four stubs inserted, the presence of Nb was 3 atom %. Increasing
the number of stubs to 12, about 9.5 atom % was achieved. Furthermore,
the functional analyses showed that Nb-WO3 nanowires have
an excellent hydrogen-sensing capability compared to that of pristine
ones. This new and simple perspective of doping nanostructures by
the thermal oxidation technique opens a new possibility to change
the sensing response of these nanostructured chemical/gas sensors.Thermal oxidation used for p-type semiconducting materialCuO shows
a complex process for the nanostructures’ growth. A metalliccopper layer (from 300 nm to 3 μm) was deposited by rf magnetron
sputtering on alumina substrates at RT and 200, 300, and 400 °C.[109,112] Copper is a very reactive metal. It reacts with oxygen in the ambient
atmosphere and creates a thin layer of copper oxide. This thin layer
is pernicious to nanowire growth; therefore, it is essential to remove
this layer before thermal oxidation. Techniques such as wet chemical
etching and plasma etching can be used to remove this layer.The complete oxidation process first involves the oxidation of
metallicCu to a Cu2O film, after which the Cu2O film is further oxidized to CuO, generating CuO nanostructures.[113] The oxidation temperature has a huge influence
on nanowire morphology and uniformity. Figure shows the morphology variation as the oxidation
temperature increases from 200 to 600 °C. However, the best growth
temperature was found to be around 400 °C for vertically aligned
nanowires and 300 °C for randomly oriented nanowires.
Figure 11
Influence
of oxidation temperature: (a) 600, (b) 500, (c) 400,
(d) 300, (e) 250, and (f) 200 °C. The atmospheric composition
was 80% O2 and 20% Ar, while the sputtering time was 3
h at RT (1.8 μm). All images are at 20K magnification. Adapted
with permission from ref (109). Copyright (2013) Elsevier.
Influence
of oxidation temperature: (a) 600, (b) 500, (c) 400,
(d) 300, (e) 250, and (f) 200 °C. The atmospheric composition
was 80% O2 and 20% Ar, while the sputtering time was 3
h at RT (1.8 μm). All images are at 20K magnification. Adapted
with permission from ref (109). Copyright (2013) Elsevier.
Metal Oxide Nanowire Chemoresistive Gas Sensors
As discussed
previously, our group[85] has reported the
growth of uniform single-crystalline SnO2 nanowires using
the VLS mechanism on a polycrystalline alumina substrate.
This report serves as a benchmark for their further application in
chemical sensing. Chemical sensors based on SnO2 nanowires
for the detection of chemical warfare agents (CWAs) such as dimethyl
methyl phosphonate (DMMP) were developed.[83] SnO2 nanowire sensors showed superior performance (Figure ) as compared to
SnO2 thin films which were prepared using a rheotaxial
growth and thermal oxidation (RGTO) technique. Indeed, the SnO2 nanowire sensors showed high sensitivity toward a lower concentration
of DMMP, even lower than the respective CWAs IDLH values (immediately
dangerous to life and health).
Figure 12
Dynamic response of SnO2 nanowires
(black line) and
RGTO (gray line) sensors to different injections of ethanol (25 ppm)
and DMMP (0.2 ppm). The comparison between the ethanol sequence and
the ethanol–DMMP sequence shows the poisoning effects due to
DMMP exposure, also at weak concentrations. Adapted with permission
from ref (83). Copyright
(2009) Elsevier.
Dynamic response of SnO2 nanowires
(black line) and
RGTO (gray line) sensors to different injections of ethanol (25 ppm)
and DMMP (0.2 ppm). The comparison between the ethanol sequence and
the ethanol–DMMP sequence shows the poisoning effects due to
DMMP exposure, also at weak concentrations. Adapted with permission
from ref (83). Copyright
(2009) Elsevier.In both of the above-mentioned
works,[83,85] Pt was used as a catalyst to grow SnO2 nanowires. However,
recently Zappa et al.[114] have grown SnO2 nanowires using three different catalysts (Au, Pd, and Sn)
with VLS that have been integrated into gas-sensing devices. Interestingly,
at high temperatures, Pd-catalyzed SnO2 nanowires exhibited
better performance than did Au and Sn nanowires. However, the reason
behind this behavior is still not clear.Furthermore, WO3 nanowires have been grown using both
the VLS mechanism and thermal oxidation for chemical sensing applications.
In the VLS-grown WO3 nanowires, two different catalysts
(i.e., Pt and Au) have been used, and the conductometric sensors based
on these nanowires showed remarkable performance with respect to O3 and H2S as compared to the other interfering compounds
such as ethanol and acetone (Figure ).[77]
Figure 13
Temperature-dependent
response of the WO3 sensing device
measured with a relative humidity of 50% at 20 °C. Adapted with
permission from ref ([77]). Copyright (2019) American Chemical Society.
Temperature-dependent
response of the WO3 sensing device
measured with a relative humidity of 50% at 20 °C. Adapted with
permission from ref ([77]). Copyright (2019) American Chemical Society.Kaur et al.[77] have suggested that when
H2S gas molecules interact with the surface-adsorbed O2– ions (present on WO3 nanowires), extra
electrons are donated to WO3, resulting in a decrease in
the depletion layer thickness (Figure a) and hence an increase in the conductance
of WO3 sensors. The whole process can be explained by the
following equationWhen O3 gas molecules interact
with the WO3 nanowires, due to their highly accepting character,
the concentration of the surface-adsorbed O– ions
increases, which increases the electron depletion layer thickness
(Figure b). Hence,
the conductance of the WO3 sensor decreases when interacting
with ozone. The whole process can be explained using the following
equationIt should be noted that the optimal operating
temperatures for H2S and O3 were 400 and 200
°C, respectively, which increase the selectivity toward a specific
gas by varying the sensor temperature.
Figure 14
Sketch of the proposed
gas-sensing mechanism of the WO3 nanowire sensor system
toward (a) H2S and (b) O3. Adapted with permission
from ref ([77]). Copyright
(2019) American Chemical Society.
Sketch of the proposed
gas-sensing mechanism of the WO3 nanowire sensor system
toward (a) H2S and (b) O3. Adapted with permission
from ref ([77]). Copyright
(2019) American Chemical Society.On the other hand, WO3 nanowires grown using thermal
oxidation[106] showed excellent performance
toward gases such as CO and NO2. Interestingly, in this
work, the WO3 nanowire sensors prepared from the thermal
oxidation of a 180 nm W metal film showed better performance as compared
to those prepared from an 18 nm metal film (Figure ). Zappa et al.[106] suggested that the 180 nm metal film exhibits a higher density of
nanowires compared to the 18 nm film. Hence, the increased surface
area results in an enhancement of the sensing performance.
Figure 15
Dynamic response
of the WO3 sensing devices toward some
oxidizing (NO2, aquamarine color, 1–3–9 ppm)
and reducing (ethanol, blue color, 5–5–20–50
ppm) (carbon monoxide, red color, 50–50–200–500
ppm) gas chemical compounds, measured at 200 °C with a relative
humidity of 50% at 20 °C. Adapted with permission from ref (106). Copyright (2014) Royal
Society of Chemistry.
Dynamic response
of the WO3 sensing devices toward some
oxidizing (NO2, aquamarine color, 1–3–9 ppm)
and reducing (ethanol, blue color, 5–5–20–50
ppm) (carbon monoxide, red color, 50–50–200–500
ppm) gas chemical compounds, measured at 200 °C with a relative
humidity of 50% at 20 °C. Adapted with permission from ref (106). Copyright (2014) Royal
Society of Chemistry.Similar to WO3, ZnO nanowires were also prepared using
both VLS growth and thermal oxidation and were integrated into chemical
sensing devices. Those prepared using VLS showed excellent performance
toward acetone and ethanol with a detection limit lower than 1 ppm.[79]Figure shows their response as a function of acetone and ethanol
concentrations.
Figure 16
Response of zinc oxide nanowires toward acetone and ethanol
as
a function of the concentration at an operating temperature of 400
°C. The response follows the power behavior and reveals a very
low detection limit. Adapted with permission from ref (79). Copyright (2007) Springer
Nature.
Response of zinc oxide nanowires toward acetone and ethanol
as
a function of the concentration at an operating temperature of 400
°C. The response follows the power behavior and reveals a very
low detection limit. Adapted with permission from ref (79). Copyright (2007) Springer
Nature.The ones prepared by thermal oxidation
(grown at 500 °C) showed
a selective response toward NO2 gas at 200 °C with
a detection limit of about 200 ppb.[105] At
higher temperatures (500 °C), the response to ethanol and acetone
increased as compared to the response to H2, but there
is not a selective detection among these VOCs. Figure reports the response vs temperature graph
of thermally oxidized ZnO nanowires for different gases. Here, ZnO_T400
and ZnO_T500 represent the ZnO nanowires grown at 400 and 500 °C,
respectively.
Figure 17
Sensitivity toward target gases at various temperatures
for ZnO
T400 (left) and ZnO T500 (right). The relative humidity was set at
50% at 20 °C. Adapted with permission from ref (105). Copyright (2013) IOPscience.
Sensitivity toward target gases at various temperatures
for ZnO
T400 (left) and ZnO T500 (right). The relative humidity was set at
50% at 20 °C. Adapted with permission from ref (105). Copyright (2013) IOPscience.p-type MOX semiconductors are consistently classified
as secondary
choices in several applications. In gas sensing, the trend is also
similar.[39] At the Sensor Laboratory, in
the past few years different p-type metal oxides such as CuO[109] and NiO[48,90,109] have been explored. NiO exhibits better overall sensing performance
comparing to CuO, even though CuO is one of the most studied p-type
materials in the literature.[115−117] More interesting, as discussed
earlier, NiO nanowires were for the first time grown by vapor-phase
techniques, and they were successfully integrated into gas-sensing
devices.[48] The fabricated NiO nanowire-based
sensors exhibit a stronger response toward hydrogen at 300 °C;
however, their response toward VOCs is very weak (Figure ).
Figure 18
(Left) Response of NiO
nanowires toward target gases: hydrogen
(blue) 50 ppm, acetone (red) 100 ppm, ethanol (green) 50 ppm, and
carbon monoxide (purple) 50 ppm. Relative humidity 50% at 20 °C.
(Right) Calibration curves for NiO sensor devices toward hydrogen_1
V (blue) at 300 °C, acetone (green) and ethanol (red) at 500
°C, and carbon monoxide (purple) at 300 °C. Relative humidity
50% at 20 °C. Adapted with permission from ref (48). Copyright (2016) IOPscience.
(Left) Response of NiO
nanowires toward target gases: hydrogen
(blue) 50 ppm, acetone (red) 100 ppm, ethanol (green) 50 ppm, and
carbon monoxide (purple) 50 ppm. Relative humidity 50% at 20 °C.
(Right) Calibration curves for NiO sensor devices toward hydrogen_1
V (blue) at 300 °C, acetone (green) and ethanol (red) at 500
°C, and carbon monoxide (purple) at 300 °C. Relative humidity
50% at 20 °C. Adapted with permission from ref (48). Copyright (2016) IOPscience.Furthermore, in a recent study by Kaur et al.,[78] the detection of NO2 using the VLS-grown
NiO
nanowires is reported. These nanowires exhibited superior response
and selectivity toward NO2 at an operating temperature
of 200 °C in comparison to other gas analysts (Figure a). Indeed, the lower detection
limit was found to be at the parts per billion level. The average
exposure to NO2, over a period of 1 h, should be less than
0.2 ppm following the European Union (EU) Air Quality Standards.[118] The response of NiO NWs is sufficiently higher
and can easily detect such a low concentration, exhibiting a response
of approximately 15 for 0.2 ppm, which makes NiO NWs a straightforward
ideal candidate. Moreover, in the same article, a shelf life study
of sensors stored in an ambient environment over a period of approximately
6 months (Figure b) is reported. The effect of atmospheric gases and humidity on the
baseline conduction and their effect on the response are evidenced.
The sensor performances show no significant degradation over these
long-term tests.
Figure 19
(a, Left) Cross-sensitivity response of the NiO sensor
toward various
gas analysts (H2, 50 ppm; acetone, 30 ppm; ethanol, 20
ppm; CO, 50 ppm; and NO2, 1 ppm). (Right) Calibration curve
(response vs NO2 concentration) at the optimal working
temperature of 200 °C. (b, Left) Trend of baseline conductance
of NiO sensors on different measurement days. (Right) Sensing response
of the NiO nanowire-based sensor over a period of 200 days toward
1 ppm of NO2. Adapted with permission from ref (78). Copyright (2019) Springer.
(a, Left) Cross-sensitivity response of the NiO sensor
toward various
gas analysts (H2, 50 ppm; acetone, 30 ppm; ethanol, 20
ppm; CO, 50 ppm; and NO2, 1 ppm). (Right) Calibration curve
(response vs NO2 concentration) at the optimal working
temperature of 200 °C. (b, Left) Trend of baseline conductance
of NiO sensors on different measurement days. (Right) Sensing response
of the NiO nanowire-based sensor over a period of 200 days toward
1 ppm of NO2. Adapted with permission from ref (78). Copyright (2019) Springer.These studies show that in the n-type MOX-dominated
gas sensor
world there are still chances for p-type metal oxides as a potential
candidate for developing sensing devices.In Table S2, we have compared the sensing
performance of different metal oxide nanowires prepared by the Sensor
Laboratory with some recent articles. For the comparison, different
forms of metal oxides such as nanorods and thin films reported by
different researchers have been considered to be limited data on nanowires.
The sensor working temperature, type and concentration of gas analyte,
sensor response, and technique used to fabricate the metal oxide nanostructures
have been presented in Table S2.
Strategies
for the Improvement of the Sensing Performance of
One-Dimensional Nanostructure Devices
To further enhance
the sensing performances of the 1D nanostructures,
new strategies such as surface functionalization NWs, developing a
heterojunction with a high specific surface area, and a full depletion
region are auspicious candidates.[19,80,119−122] Many recent studies have demonstrated that
sensitivity, selectivity, and other chemical sensing properties of
chemoresistive metal oxide sensors can be adequately improved by engaging
a secondary material to functionalize 1D nanostructures (nanowire
doping,[107,108] surface functionalization of nanowires,[80,123−128] branch-like nanostructures,[19,129] and core–shell
nanowires[130]). For instance, as previously
discussed, Nb doping in WO3 nanowires enhances the sensing
performance with respect to H2.[107] In a similar framework, surface functionalization with metal clusters
and 2D materials can also be used to further improve the sensing performance.
In a recent report, SnO2 nanowires were functionalized
with a graphene oxide layer for low-temperature NO2 sensing
in the presence of UV light.[123]On
the other hand, creating a heterojunction by combining two metaloxides on a sensing platform can bring about new possibilities and
further improve the sensing performance. The fabrication of composite
nanostructures, involving the integration of n-type and p-type metaloxides, allows the combination of the different individual properties
into a single system. For 1D nanostructures, this can be done using
various strategies and synthesis techniques, and branched heterostructures
or core–shell heterostructures can easily be achieved.[131−133]Indeed, branched 1D heterostructures exhibit strong interactions
between tightly packed interfaces that can improve their performances,
but they are complex to predict. In 2018, Kaur et al.[19] demonstrated the growth of NiO/ZnO branched heterostructures
by a two-step vapor-phase growth method. NiO nanowires grown by VLS
act as backbones for ZnO nanostructure condensation. The selected-area
electron diffraction data (SAED) demonstrate that the ZnO nanowires
were grown epitaxially along (101) planes on the strongly oriented
NiO nanowires along (200) crystallographic planes shown in Figure .
Figure 20
(a) HRTEM image of NiO/ZnO
heterostructures. (b) FFT of heterostructure
reported in (c). Colored representation of NiO and ZnO planes. Adapted
with permission from ref (19). Copyright (2018) Elsevier.
(a) HRTEM image of NiO/ZnO
heterostructures. (b) FFT of heterostructure
reported in (c). Colored representation of NiO and ZnO planes. Adapted
with permission from ref (19). Copyright (2018) Elsevier.Their sensing performances were superior to those of different
VOCs such as ethanol and acetone in comparison with those of bare
NiO nanowires. Calculated detection limits of 7 and 11 ppm
have been found for ethanol and acetone, respectively. Furthermore,
the possible interpretation given by the authors for the sensing response
enhancement relies on the junction formation by charge transfer as
the two Fermi levels come to equilibrium, further extending the charge
depletion region. This in turn increases the overall heterostructure
resistance, leading to the sensing property enhancement for the heterostructured
material. The sensing performance of fabricated NiO/ZnO heterostructures
compared with that of NiO nanowires is shown in Figure .
Figure 21
(a) Dynamic response
of the NiO/ZnO heterostructure sensing device.
(b, Left) Dynamic response of the NiO sensing device toward reducing
gases (ethanol, black, 5–5–20–50 ppm at 400 °C;
acetone, red, 10–10–30–100 ppm at 400 °C)
measured at a relative humidity of 50% at 20 °C. (Right) Response
of the NiO/ZnO heterostructure and NiO nanowire sensors toward target
gases: NiO/ZnO acetone (brown), NiO acetone (yellow), 30 ppm; NiO/ZnO
ethanol (blue), NiO ethanol (green), 20 ppm. RH 50% at 20 °C.
Adapted with permission from ref (19). Copyright (2018) Elsevier.
(a) Dynamic response
of the NiO/ZnO heterostructure sensing device.
(b, Left) Dynamic response of the NiO sensing device toward reducing
gases (ethanol, black, 5–5–20–50 ppm at 400 °C;
acetone, red, 10–10–30–100 ppm at 400 °C)
measured at a relative humidity of 50% at 20 °C. (Right) Response
of the NiO/ZnO heterostructure and NiO nanowire sensors toward target
gases: NiO/ZnO acetone (brown), NiO acetone (yellow), 30 ppm; NiO/ZnOethanol (blue), NiO ethanol (green), 20 ppm. RH 50% at 20 °C.
Adapted with permission from ref (19). Copyright (2018) Elsevier.Furthermore, 1D-core/shell structures are another promising type
of heterostructure that can be exploited in chemical sensing. Several
methods were used to create core–shell morphologies.[134−138] However, one of the most used and promising is the ALD (atomic-layer
deposition) method of depositing a thin layer of a material on top
of nanowires. In a recent report, the synthesis of 1D n-SnO2-core/p-NiO-shell nanowires (CSNWs) on an alumina substrate by using
vapor phase growth (VLS) and atomic layer deposition techniques was
presented.[130]The thickness of the
NiO-shell layer varies from a range of 2 to
8.2 nm. After the NiO coating on SnO2 NWs, the electrical
conductance of the sensors decreases by many orders of magnitude.
This suggested that the conductivity of the sensors is majorly dominated
by Schottky barrier junctions across the interface of n–p (core/shell).
The author presented the gas-sensing response of pristine SnO2 and SnO2/NiO core–shell heterostructure
sensors with different NiO-shell thicknesses toward H2 at
various temperatures. Three different ALD cycles (50, 100, and 200)
were applied to modulate the thickness of NiO on SnO2 nanowires.
Comparing the responses showed that SnO2/NiO-100 exhibits
the best performance (shell thickness ca. 4.1 nm) due to the maximized
radial modulation of the depletion region (Figure ).
Figure 22
Sensing response of the SnO2/NiO-X
CSNWs heterostructures
as a function of the NiO-shell layer thickness toward 200 ppm of hydrogen
at 500 °C. Adapted with permission from ref (130). Copyright (2020) American
Chemical Society.
Sensing response of the SnO2/NiO-X
CSNWs heterostructures
as a function of the NiO-shell layer thickness toward 200 ppm of hydrogen
at 500 °C. Adapted with permission from ref (130). Copyright (2020) American
Chemical Society.The authors proposed
two possible mechanisms for this behavior:
(i) a hole-accumulation layer within the NiO shell and (ii) the barrier
height at the interface of NiO-SnO2. As in the case of
heterostructures, a p–n junction is created at the interface,
which results in the Fermi level modulation. This induces band bending
and the formation of a depletion region, which leads to an increase
in resistance. As the sensor is exposed to air, an oxygen species
adsorbs onto the NiO surface, trapping electrons and creating a hole-accumulation
layer (HAL) in the near-surface region. The concentration of holes
increased in the NiO-shell, which causes the enhancement of the charge
gradient near the junction. This leads to an expansion of the depletion
region and increases the barrier height at the junction. Due to this,
the overall resistance of the system increases (Figure ).
Figure 23
Schematics of the hydrogen-sensing
mechanism, electron-flow channel,
and corresponding proposed energy band diagrams for the pristine SnO2 NWs and SnO2/NiO CSNWs heterostructures. SnO2 NWs: (a) in vacuum, (b) in air, where the surface of the
NWs is under the electron depletion effect due to the adsorption of
the oxygen species, narrowing the conduction channel by creating a
potential barrier height at the surfaces and the grain–grain
contacts, and (c) in hydrogen, where the hydrogen reacts with the
adsorbed oxygen species and releases back electrons to the SnO2 surface by decreasing the potential barrier height broadening
the conduction channel. SnO2/NiO CSNWs at an optimized
shell thickness: (d) in vacuum, where as the NiO shell layer is deposited
onto the SnO2 core, a p–n junction is formed at
the interface of the two materials, (e) in air, where adsorbed oxygen
species withdraw electrons at the surface, creating a HAL and broadening
the SCR at the p–n junction with significant narrowing of the
conduction channel, and (f) in hydrogen, where the electrons released
back onto the NiO surfaces decrease the width of the HAL and SCR at
the p–n junction with the broadening of the conduction channel.
Abbreviations used in the diagrams are the hole-accumulation layer
(HAL), electron-depletion layer (EDL), hole-depletion layer (HDL),
and space–charge region (SCR). Values are shown for the work
functions (Φ) and energy band gaps (Eg). Adapted with permission from ref (130). Copyright (2020) American Chemical Society.
Schematics of the hydrogen-sensing
mechanism, electron-flow channel,
and corresponding proposed energy band diagrams for the pristine SnO2 NWs and SnO2/NiO CSNWs heterostructures. SnO2 NWs: (a) in vacuum, (b) in air, where the surface of the
NWs is under the electron depletion effect due to the adsorption of
the oxygen species, narrowing the conduction channel by creating a
potential barrier height at the surfaces and the grain–grain
contacts, and (c) in hydrogen, where the hydrogen reacts with the
adsorbed oxygen species and releases back electrons to the SnO2 surface by decreasing the potential barrier height broadening
the conduction channel. SnO2/NiO CSNWs at an optimized
shell thickness: (d) in vacuum, where as the NiO shell layer is deposited
onto the SnO2 core, a p–n junction is formed at
the interface of the two materials, (e) in air, where adsorbed oxygen
species withdraw electrons at the surface, creating a HAL and broadening
the SCR at the p–n junction with significant narrowing of the
conduction channel, and (f) in hydrogen, where the electrons released
back onto the NiO surfaces decrease the width of the HAL and SCR at
the p–n junction with the broadening of the conduction channel.
Abbreviations used in the diagrams are the hole-accumulation layer
(HAL), electron-depletion layer (EDL), hole-depletion layer (HDL),
and space–charge region (SCR). Values are shown for the work
functions (Φ) and energy band gaps (Eg). Adapted with permission from ref (130). Copyright (2020) American Chemical Society.Furthermore, in the presence of H2,
it reacts with the
adsorbed oxygen ions and releases electrons back into the system.
These released electrons recombine with the holes of NiO, which in
turn decrease the charge carrier concentration at the junction, resulting
in narrowing the space–charge region. Thus, in the presence
of the NiO layer the extent in the change of conductance is higher.
Another important fact to consider is the shell layer thickness because
it affects the depletion region formation at the interface. The highest
response was exhibited when the NiO shell thickness was 4.1 nm for
the SnO2/NiO-100 sensors, a value similar to the hole-accumulation
layer thickness, which is also related to the Debye length. Further
increasing the thickness of the layer decrease the response so that
the shell layer is no longer depleted. In Table S3, some interesting reports available in the literature along
with our team work are presented.
Conclusions and Future
Perspectives
Metal oxide nanowire-based chemical sensors
showed remarkable performance
and have been explored for the detection of various analytes such
as VOCs, toxic gases, environmental pollutants, and explosives. The
reasons behind their astonishing performances are high crystallinity,
well-defined crystal orientation, controlled electrical properties,
and a high surface-to-volume ratio. In the field of 1D MOX nanostructures,
the work done by our group in 2002 on the VLS synthesis of tin dioxide
(SnO2) nanobelts for the gas-sensing application inspired
many researchers, and afterward tremendous success until now has been
achieved. In MOX, the chemisorption of oxygen ions creates the EDL
on n-type semiconductors and HAL on p-type semiconductors, which determines
their sensing behavior. By operating at different temperatures, these
types of chemisorbed ions can be controlled, and the selectivity toward
a particular analyte can be achieved. For example, the presence of
O– ions on VLS-grown WO3 nanowires at
200 °C enhanced their reactivity toward O3, while
when sensors operated at 400 °C, they showed excellent performance
toward H2S due to the dominance of O2– ions on the WO3 surface.The surface morphology
of nanowires, which also play a major role
in determining the sensing performance, is largely dependent on the
growth technique used. Indeed, MOX nanowires grown using the vapor-phase
mechanism were found to be highly crystalline with minimal defects
and hence showed remarkable sensing performance. In MOX nanowires
growth by VLS, the type of metal catalyst (generally a noble metal)
affects the morphology of nanowires, which in turn influences the
sensing performance. Hence, the appropriate selection of a metal catalyst
in the VLS method is crucial, especially when one works on new material
growth. While optimizing ZnO and NiO nanowire growth, it has been
observed that the nanowires grown using Au catalysts possesses uniform
and dense morphology as compared to other catalysts (Pt, Pd, etc.).
On the other hand, thermal oxidation offers the possibility to grow
nanowires at relatively low temperatures, which is generally not possible
in vapor-phase growth.A recent achievement of our group is
the first-time growth of NiO
nanowires using the VLS mechanism and integration into conductometric
chemical-/gas-sensing devices for hydrogen and NO2 detection.
Indeed, NiO nanowire chemical-/gas-sensing devices show no major degradation
in their devices performance as measured for a period of 6 months.
This is remarkable work in the development of NiO-based gas-sensing
devices as only limited works have been presented on p-type metaloxides in comparison to n-type.Moreover, in this feature article
we presented an overview of different
approaches such as the fabrication of nanowires heterostructures used
to further improve the sensing performance of MOX-based gas sensors.
Branched-like NiO/ZnO nanowire heterostructure sensing devices using
the VLS mechanism showed superior performance compared to NiO nanowires
for ethanol and acetone detection. The reason behind their superior
performance was found to be the formation of junctions between NiO
and ZnO, increasing the resistance and in turn enhancing the sensing
performance. Moreover, the detailed microstructural investigation
reveals the epitaxial growth along the (101) planes of ZnO NWs on
strongly oriented NiO NWs. Furthermore, the 1D n-SnO2-core/p-NiO-shell
nanowire heterostructure synthesized by the VLS mechanism and ALD
showed excellent sensing performance toward hydrogen. The sensing
mechanism reveals that the formation of the hole-accumulation layer
within the NiO shell and the barrier height at the interface of NiO-SnO2 were the two major reasons behind their excellent sensing
behavior.However, besides the recent advance, the selectivity
of the metaloxide-based gas sensor is still an issue which requires further work.
We believe that with the availability of an advanced synthesis/characterization
technique and other processes such as surface functionalization, this
challenging issue will be partially addressed. Indeed, the surface
functionalization of MOX nanostructures using self- assembled monolayers
(SAM) which is majorly used in biosensing and synthesis of novel supramoleculararchitecture can also be adopted to improve the selectivity and performance
of gas sensors. The reason behind this perspective is the nature of
self-assembled monolayers such as silanes that can generate different
functional groups on the oxide surface and react only to the specific
gas analytes due to their functional properties. Another area that
requires further investigations is the theoretical explanation of
the chemical sensing mechanism, specifically for 1D nanostructured
MOX as the available ones hold for granular morphology. This requires
a great deal of work in the investigation of fundamental physical/chemical
properties of these materials especially using operando analyses.
Authors: M N M Nuzaihan; U Hashim; M K Md Arshad; A Rahim Ruslinda; S F A Rahman; M F M Fathil; Mohd H Ismail Journal: PLoS One Date: 2016-03-29 Impact factor: 3.240