| Literature DB >> 32439790 |
Wei Sun1,2, Jie Shen3,2, Zhao Zhao3,4,5, Noel Arellano6, Charles Rettner6, Jianshi Tang7, Tianyang Cao3, Zhiyu Zhou3, Toan Ta6, Jason K Streit8, Jeffrey A Fagan8, Thomas Schaus3,2, Ming Zheng8, Shu-Jen Han7, William M Shih3,4,5, Hareem T Maune6, Peng Yin1,2.
Abstract
Precise fabrication of semiconducting carbon nanotubes (CNTs) into densely aligned evenly spaced arrays is required for ultrascaled technology nodes. We report the precise scaling of inter-CNT pitch using a supramolecular assembly method called spatially hindered integration of nanotube electronics. Specifically, by using DNA brick crystal-based nanotrenches to align DNA-wrapped CNTs through DNA hybridization, we constructed parallel CNT arrays with a uniform pitch as small as 10.4 nanometers, at an angular deviation <2° and an assembly yield >95%.Entities:
Year: 2020 PMID: 32439790 DOI: 10.1126/science.aaz7440
Source DB: PubMed Journal: Science ISSN: 0036-8075 Impact factor: 47.728