Extracting Three-dimensional Information from SEM Images by Means of Photogrammetry.

Optical photogrammetry software has been applied to scanning electron microscope images to obtain 3D models and quantitative data on carbon particles and graphite nanoparticles. Image acquisition has been automated by the use of external macro software. Mesh data has been reconstructed from a number of images taken at multiple sample stage tilt angles with a supplementary measurement of TEM grids for method validation. This 3D model has been scaled and processed to obtain values such as the volume, height and surface area of the samples and has been quantitatively compared to 2D measurements.