Literature DB >> 32159943

Macroscopic Alignment of Block Copolymers on Silicon Substrates by Laser Annealing.

Arkadiusz A Leniart1, Przemyslaw Pula1, Andrzej Sitkiewicz1, Pawel W Majewski1.   

Abstract

Laser annealing is a competitive alternative to conventional oven annealing of block copolymer (BCP) thin films enabling rapid acceleration and precise spatial control of the self-assembly process. Localized heating by a moving laser beam (zone annealing), taking advantage of steep temperature gradients, can additionally yield aligned morphologies. In its original implementation it was limited to specialized germanium-coated glass substrates, which absorb visible light and exhibit low-enough thermal conductivity to facilitate heating at relatively low irradiation power density. Here, we demonstrate a recent advance in laser zone annealing, which utilizes a powerful fiber-coupled near-IR laser source allowing rapid BCP annealing over a large area on conventional silicon wafers. The annealing coupled with photothermal shearing yields macroscopically aligned BCP films, which are used as templates for patterning metallic nanowires. We also report a facile method of transferring laser-annealed BCP films onto arbitrary surfaces. The transfer process allows patterning substrates with a highly corrugated surface and single-step rapid fabrication of multilayered nanomaterials with complex morphologies.

Entities:  

Keywords:  block copolymers; directed self-assembly; laser annealing; multilayers; nanopatterning; photothermal processing

Year:  2020        PMID: 32159943     DOI: 10.1021/acsnano.0c00696

Source DB:  PubMed          Journal:  ACS Nano        ISSN: 1936-0851            Impact factor:   15.881


  3 in total

Review 1.  Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective.

Authors:  Eleanor Mullen; Michael A Morris
Journal:  Nanomaterials (Basel)       Date:  2021-04-22       Impact factor: 5.076

Review 2.  Recent Advances in Sequential Infiltration Synthesis (SIS) of Block Copolymers (BCPs).

Authors:  Eleonora Cara; Irdi Murataj; Gianluca Milano; Natascia De Leo; Luca Boarino; Federico Ferrarese Lupi
Journal:  Nanomaterials (Basel)       Date:  2021-04-13       Impact factor: 5.076

3.  Pathway-Dependent Grain Coarsening of Block Copolymer Patterns under Controlled Solvent Evaporation.

Authors:  Arkadiusz A Leniart; Przemyslaw Pula; Robert W Style; Pawel W Majewski
Journal:  ACS Macro Lett       Date:  2021-12-30       Impact factor: 6.903

  3 in total

北京卡尤迪生物科技股份有限公司 © 2022-2023.