| Literature DB >> 32015356 |
Alex Amato1, Silvana Terreni2, Massimo Granata3, Christophe Michel3, Benoit Sassolas3, Laurent Pinard3, Maurizio Canepa2,4, Gianpietro Cagnoli5.
Abstract
We have investigated by spectroscopic ellipsometry (SE, 190-1700 nm) the optical properties of uniform, amorphous thin films of Ta2O5 and Nb2O5 as deposited and after annealing, and after so-called "doping" with Ti atoms which leads to mixed oxides. Ta2O5 and Ti:Ta2O5 are currently used as high-index components in Bragg reflectors for Gravitational Wave Detectors. Parallel to the optical investigation, we measured the mechanical energy dissipation of the same coatings, through the so-called "loss angle" ϕ = Q-1, which quantifies the energy loss in materials. By applying the well-known Cody-Lorentz model in the analysis of SE data we have been able to derive accurate information on the fundamental absorption edge through important parameters related to the electronic density of states, such as the optical gap (Eg) and the energy width of the exponential Urbach tail (the Urbach energy EU). We have found that EU is neatly reduced by suitable annealing as is also perceptible from direct inspection of SE data. Ti-doping also points to a minor decrease of EU. The reduction of EU parallels a lowering of the mechanical losses quantified by the loss angle ϕ. The correlation highlights that both the electronic states responsible of Urbach tail and the internal friction are sensitive to a self-correlation of defects on a medium-range scale, which is promoted by annealing and in our case, to a lesser extent, by doping. These observations may contribute to a better understanding of the relationship between structural and mechanical properties in amorphous oxides.Entities:
Year: 2020 PMID: 32015356 PMCID: PMC6997387 DOI: 10.1038/s41598-020-58380-1
Source DB: PubMed Journal: Sci Rep ISSN: 2045-2322 Impact factor: 4.379
Figure 1Coating loss angle as function of frequency for Ta2O5 (blue) and Ti:Ta2O5 (green) coating before and after the annealing on the left, for Nb2O5 (orange) and Nb:TiO2 (violet) on the right.
Most relevant parameters of the mechanical and optical analysis of coating materials before and after the annealing.
| Coating | Thickness (nm) | MSE | |||
|---|---|---|---|---|---|
| Ta2O5 | 6.42 ± 0.15 | 579 ± 2 | 164 ± 8 | 4.1 ± 0.2 | 4.0 |
| Ti:Ta2O5 | 6.3 ± 0.2 | 500 ± 2 | 152 ± 5 | 3.6 ± 0.1 | 4.1 |
| Ta2O5 ann. | 4.77 ± 0.15 | 592 ± 2 | 130 ± 10 | 4.0 ± 0.1 | 11.0 |
| Ti:Ta2O5 ann. | 3.9 ± 0.2 | 509 ± 2 | 108 ± 5 | 3.6 ± 0.1 | 5.2 |
| Nb2O5 | 8.3 ± 1.3 | 470 ± 2 | 110 ± 10 | 3.4 ± 0.1 | 5.9 |
| Nb:TiO2 | 7.6 ± 0.5 | 482 ± 2 | 108 ± 5 | 3.3 ± 0.1 | 7.7 |
| Nb2O5 ann. | 4.5 ± 1.5 | 483 ± 2 | 80 ± 10 | 3.4 ± 0.1 | 7.1 |
| Nb:TiO2 ann. | 4.0 ± 0.4 | 490 ± 2 | 80 ± 5 | 3.3 ± 0.1 | 7.6 |
The reported coating loss angle is the value at 10 kHz obtained by applying to each data set shown in figure 3.1 a least-square regression fitting with a frequency-dependent loss. E and E are the Urbach energy and Energy gap, respectively. The fit uncertainty on optical parameters and the Mean Square Error (MSE) are provided by the regression code (WVASE).
Figure 2SE data for Ti:Ta2O5 coating. Comparison of (a) and Δ (b) for measurements acquired with an angle of incident of 60, before (blue) and after (green) the annealing. (c) and Δ (d) data acquired at different angles before the annealing compared to the CL model simulation (red).
Figure 3Absorption coefficient of Ta2O5 (top) and Nb2O5 (bottom) before and after the annealing, for undoped (left panels) and doped (right panels) material. The curves have been calculated starting from the extinction coefficient functions provided by the best fit CL model. The logarithmic scale emphasizes the exponential decay of absorption in the Urbach region. The dashes indicate regions where the sensitivity of the measurements is poor and curves should be intended as mere extrapolations of the model.
Figure 4Coating loss angle as function of Urbach energy. The circles and the squares refer to as deposited samples and samples after the heating treatment, respectively. Four different coatings are considered, the Ta2O5 (blue) and the Ti:Ta2O5 (green), the Nb2O5 (orange) and the Nb:TiO2 (violet).