High-resolution micro-grating accelerometer based on a gram-scale proof mass.

Micro-grating accelerometer detecting small displacement by an optical system can be widely applied in inertial navigation and seismic monitoring. We proposed a micro-grating accelerometer prototype with a proof mass of gram-scale to decrease the thermal mechanical noise, which is the fundamental limit of a high-resolution accelerometer. The theoretical model for the contrast ratio of a micro-grating accelerometer is established based on Gaussian beam theory, and the adjustment method based on a scanning slit beam profiler improves the contrast ratio of 0th order effectively. Compared to our former prototype, experiment results indicate the noise floor is decreased from 0.9 mg/√Hz to 137 ng/√Hz, and the bias stability is decreased from 0.35 mg to 3.1 µg.