Structure-Induced Method for Circular Cross-Sectional Nanochannel Fabrication.

Nanochannels are key elements in building nano-systems for many applications, such as ion transportation, single molecule manipulation, and protein analysis. Commercially manufacturing of nanosystems lies in the development of a low-cost and concise method for nanochannels fabrication. In the present work, a novel PDMS nanochannels fabrication method was proposed based on PDMS spin-coating on a structure-induced wafer. All the influencing parameters which can affect the shape and size of PDMS nanochannels were optimized by proposed simulation method. The comparison between experiments and simulation showed good agreement and confirmed the developed simulation method. By the optimized conditions, 64 nm wide and 37 nm deep PDMS nanochannels can be fabricated.