Fabrication of hybrid Fabry-Pérot microcavity using two-photon lithography for single-photon sources.

For an efficient single-photon source a high-count rate into a well-defined spectral and spatial mode is desirable. Here we have developed a hybrid planar Fabry-Pérot microcavity by using a two-photon polymerization process (2PP) where coupling between single-photon sources (diamond colour centres) and resonance modes is observed. The first step consists of using the 2PP process to build a polymer table structure around previously characterized nitrogen-vacancy (NV) centres on top of a distributed Bragg reflector (DBR) with a high reflectivity at the NV zero-phonon line (ZPL). Afterwards, the polymer structure is covered with a silver layer to create a weak (low Q) cavity where resonance fluorescence measurements from the NVs are shown to be in good agreement with analytical and Finite Difference Time Domain (FDTD) results.