| Literature DB >> 30560117 |
Yannick Bleu1, Florent Bourquard1, Teddy Tite1, Anne-Sophie Loir1, Chirandjeevi Maddi1, Christophe Donnet1, Florence Garrelie1.
Abstract
Graphene is a remarkable two-dimensional (2D) material that is of great interest to both academia and industry. It has outstanding electrical and thermal conductivity and good mechanical behavior with promising applications in electronic devices, supercapacitors, batteries, composite materials, flexible transparent displays, solar cells, and sensors. Several methods have been used to produce either pristine graphene or doped graphene. These include chemical vapor deposition (CVD), mechanical exfoliation, decomposition of SiC, liquid-phase exfoliation, pulsed laser deposition (PLD). Among these methods, PLD, which is routinely used for growing complex oxide thin films has proved to be an alternative to the more widely reported CVD method for producing graphene thin films, because of its advantages. Here we review the synthesis of graphene using PLD. We describe recent progress in preparing pristine graphene and doped graphene by PLD, including deposition processes and characterization. The goal of this complete survey is to describe the advantages of using the technique for graphene growth. The review will also help researchers to better understand graphene synthesis using the PLD technique.Entities:
Keywords: 2D materials; doped graphene; graphene; pulse laser ablation deposition; sensors
Year: 2018 PMID: 30560117 PMCID: PMC6284203 DOI: 10.3389/fchem.2018.00572
Source DB: PubMed Journal: Front Chem ISSN: 2296-2646 Impact factor: 5.221
Figure 1The graphene building block for various carbon allotropes [Reproduced from Wan et al. (2012) with permission of American Chemical Society].
Figure 2(A) Publications on graphene from 2007 to August 2017, and expected to reach at least 40,000–45,000 publication by the end of 2017 [Source: Web of Science], (B) proportion of total publications per country and (C) per sector.
Figure 3Armchair (red) and zigzag (blue) edges in monolayer graphene.
The most exceptional properties of single layer graphene.
| Optical transparency | 97.7% | Nair et al., |
| Electron mobility | 200,000 cm2 v−1 s−1 | Bolotin et al., |
| RT Thermal conductivity | 5,000 W m−1 K−1 | Balandin et al., |
| Specific surface area | 2,630 m2g−1 | Edwards and Coleman, |
| Breaking strength | 42 N.m−1 | Hsu, |
| Elastic modulus | 1 TPa | Lee et al., |
| Fermi velocity | 1 × 106 m s−1 | Du et al., |
Figure 4Overview of graphene applications in various sectors (from https://www.pgmcapital.com/why-investing-in-graphene-can-be-lucrative/).
Figure 5Main advantages and drawbacks of graphene reported in references (Allen et al., 2010; Skulason et al., 2010).
Figure 6Schematic diagram of a representative laser deposition tool.
Summary of graphene grown on different substrates using the PLD technique without a catalytic layer.
| Graphene/Si <100> | Nd:YAG, λ = 532 nm, τ = 7 ns, ν = 10 Hz, fluence = 7J/cm2 | 10−5 Pa | RT and 900°C/15min | HOPG | 5 cm | Nano sized graphene clusters | Cappelli et al., |
| Graphene/Si <100> | Nd:YAG, λ = 1,064 nm, τ = 7 ns, ν = 10 Hz, fluences = 7.8, 11 et 14 J/cm2 | 10−4 Pa | RT to 800°C | Graphite | N/A | Well-ordered nanographene | Cappelli et al., |
| Graphene/Si | Nd:YAG, λ = 532 nm, τ = 7 ns, ν = 1 Hz, fluences = 0.8–20 J/cm2 | 10−5 Torr—grown in 1 Torr argon gas | RT | HOPG | 15–60 mm | Freestanding 2D few-layer | Qian et al., |
| Graphene/SiO2/Si, Graphene/SiNx/Si Graphene/p-Si | KrF, λ = 248 nm, τ = 20 ns, ν = 10 H, fluences = 3, 5, and 6 J/cm2 | 10−8 mbar—grown in 20 mTorr Ar/O2 gas | 300, 593, and 973 K | HOPG | 15–60 mm | Nanostructured graphene | Sarath Kumar and Alshareef, |
| Graphene/SiNx/SiNGraphene/SiNx/Si | KrF laser, λ = 248 nm, | Gr is grown in 20 mTorr ArN-Gr is grown in 20, 100, 250, and 500 mTorr N2 gas | 973 K | HOPG | N/A | Graphene thin films of both p and n-types | Sarath Kumar et al., |
| Graphene/SiO2 | Nd:YAG, fluence = 5 J/cm2 | 10−6 mbar + ambient oxygen during carbon deposition | RT to 800°C/15 min | Graphite | 3 cm | Multi-few layer graphene | Kumar and Khare, |
| Graphene/Quartz Graphene/Sapphire Graphene/n-Si | KrF, λ = 248 nm, τ = 25 ns, ν = 5 Hz, fluence = 4 J/cm2 | 10−5 Pa—grown in 10 Pa Ar gas | 750°C/90 s | HOPG | 5 mm | Few-layer graphene | Xu et al., |
| Graphene/Sapphire | Nd:YAG, λ = 266 nm, τ = 20 ns, ν = 10 Hz, fluence = 1,2 J/cm2 | 10−5 Torr | 400, 500, and 600 °C/90 s | HOPG | 40 mm | Few-layer graphene | Na et al., |
| Graphene/n-Si(100) | Ti:sapphire fs laser, λ = 800 nm, τ = 80 fs, ν = 1 Hz, fluences = 0.1, 0.3, and 0.5 J/cm2 | 10−6 Torr | 300 and 473 K | HOPG | 50 mm | Few-layer graphene | Xiangming Dong et al., |
| Graphene/Cu foil | Nd:YAG, λ = 1064 nm, τ = 6 ns, ν = 5 Hz, laser energy = 50 mJ/pulse | 10−5 Torr | 300, 400, and 500°C | Graphite | 5 mm | Few-layer graphene | (Abd Elhamid A. E. M. et al., |
| N-Graphene/SiO2/Si | KrF laser, λ = 248 nm, τ = 20 ns, ν = 10 Hz, laser energy = 100 mJ | Gr is grown in 10−5 Pa N-Gr is grown in 9, 50, 100, 240 Pa of nitrogen gas | 1053K | Graphite | 5 cm | N-doped graphene | Ren et al., |
Summary of graphene grown on different substrates using the PLD technique with a catalytic layer.
| a-C/Ni/Si | ArF laser, λ = 193 nm, τ = 20–30 ns, ν = 10 Hz, laser energy = 300 mJ | 10−6 Torr | 1100, 1200, 1300°C | Pyrolyticcarbon | X | Ni (500 nm) | 1100, 1200, 1300°C before C deposition | Transparent Few-layer | Zhang and Feng, |
| a-C(7 nm)/Ni/n-Si | KrF, λ = 248 nm, τ = 25 ns, ν = 10 Hz, laser energy = 50 mJ | 5.10−6 Torr | 750°C −1.5 min | Graphite | X | Ni (600 nm) | 750°C−1.5 min during C deposition | Few-layer | Koh et al., |
| a-C(6 nm)/Ni/SiO2/Si | KrF, λ = 248 nm, fluence (Ni) = 5.43 J/cm2, fluence 4.40 J/cm2, ν = 4 Hz | 2.10−6 Torr | RT (Ni deposition) 650°C (C deposition) | Nickel Graphite | 35 mm | Ni (25–75nm) | 650°C-1 h before C deposition | Few-layer | Wang et al., |
| a-C/Ni/n-Si | KrF, λ = 248 nm, τ = 25 ns, ν = 10 Hz, laser energy = 50 mJ | 5.10−4 Pa | 750°C −1.5 min | Carbon | X | Ni, Cu, Co, Fe | 750°C −1.5 min during C deposition | Few-layer | Koh et al., |
| a-C/Ni/SiO2/Si | KrF, λ = 248 nm, τ = 20 ns, ν = 10 Hz, laser energy = 75 mJ | 5–6.10−6 Torr | 1010°C | Carbon | X | Ni (300 nm) | 1010°C during C deposition | Monolayer/Bilayer Few-layer | Hemani et al., |
| Ni/a-C (20 nm)/n-Si | KrF laser, λ = 248 nm, τ = 20 ns, ν = 10 Hz, fluence = 15 J/cm2 | 10−4 Pa | RT- 10 min | Graphite | 3.6 cm | Ni (150 nm) | 780°C −45 min | Few-layer | Tite et al., |
| a-C(5 nm)/Ni/n-Si | KrF laser, λ = 248 nm, τ = 20 ns, ν = 10 Hz, fluence = 15 J/cm2 | 10−4 Pa | RT- 150 s | Graphite | 3.6 cm | Ni (150 nm) | 780°C −45 min after C deposition | Textured few layer | Tite et al., |
| a-C (40 nm)/Ni/n-Si | KrF, λ = 248 nm, τ = 20 ns, ν = 10 Hz, fluence = 40 J/cm2 | 10−4 Pa | RT | Graphite | 3.6 cm | Ni (300 nm) | 780°C −45 min after C deposition | Self-organized multilayer | Fortgang et al., |
| a-C/Ni/Si(111) a-C/Cu/Si(100) | Nd: YAG, λ = 355 nm, τ = 8 ns, ν = 10 Hz, fluence = 3.18 J/cm2 | 10−5 Torr | 700, 750, 800°C 100 s | HOPG | 50 mm | Ni (150-250 nm) Cu (150-250 nm) | 700, 750, 800°C - 100 s during C deposition | Few- and multilayer | Kumar et al., |
| a-C/Ni/a-C/Ni/Si(100) | Ti:sapphire, λ = 800 nm, τ = 35 ns, ν = 1 kHz, laser energy = 3.5 mJ/pulse | 10−5 Torr | 500°C | HOPG | 60 mm | double Ni (100 nm) | 500°C during C deposition | Large-area, Few-layer | Dong et al., |
| Sn/a-C/SiO2/Si | ν = 10 Hz, laser energy = 30mJ | 5.10−5 Pa | RT | Carbon | 5 cm | Sn (500nm) | 250°C, after C, Sn deposition | Multilayer | Vishwakarma et al., |
| a-C/Cu foil | Nd: YAG, λ = 1064 nm, τ = 6 ns, ν = 5 Hz, laser energy = 50 mJ/pulse | 10−5 Torr | 300, 400, 500°C −2 and 30 min | Graphite | 5 cm | Cu foil | 300, 400, 500°C −2 and 30 min during C deposition | Few-layer | (Abd Elhamid A. E. M. et al., |
| a-C/Ni-Cu alloy | Nd:YAG, λ = 1064 nm, τ = 6 ns, ν = 10 Hz, laser energy = 150 mJ for (Ni) ν = 5 Hz, laser energy = 100 mJ for (C) | 4.10−6 Torr | RT or 600°C for Ni deposition RT for C deposition | HOPG | 5 cm | Ni-Cu alloy | 600°C −30 min before C deposition | Few-layer | (Abd Elhamid A. M. et al., |
| a-C/Cu foil | CO2 laser, λ = 10.6 μm | 4.10−6 Torr | RT | Pyrolytic Graphite | 50 mm | Cu foil | RT to 700°C 15 min | Sharp folded, Wrinkled graphene | Kaushik et al., |
| Ni/a-C:N/SiO2 | femtosecond laser, λ = 800 nm, τ = 60 fs, ν = 1 kHz, fluence = 5 J/cm2 | N2 pressure: 0.5, 1 and 10 Pa | RT | Graphite | 36 mm | Ni (150 nm) | 780°C −30 min after Ni deposition | Tri-layer bernal ABA configuration | Maddi et al., |
Figure 7Different stacking orders using Ni on graphene growth (A) Sequence: Ni/a-C/substrate. (B) Sequence: a-C/ Ni/substrate.
Figure 8Raman spectrum at 442 nm of Ni/a-C(20 nm)/Si after thermal annealing at 780°C ([Reproduced from Tite et al. (2014) with permission of AlP Publishing].
Figure 9Chemical investigation of the nitrogen chemistry of the graphene layers. (A) XPS N K-edge of N-doped graphene (2.4%N); (B) XAS N K-edge of N-doped graphene; (C,D) ARXPS N K-edge of the N-doped graphene with an emission angle of 28 and 68°; (E) Ratio of intensity I1 (from ARXPS with 68°) to intensity I2 (from ARXPS with 28°) for each of the four nitrogen chemical contributions deduced from XPS, giving rise to a surface predominance of the pyrrolic from (green signal); (F) molecular scheme of the various N chemical forms identified by XPS and XAS in a N-doped graphene monolayer [Reproduced from Maddi et al. (2018) with permission of Nature Publishing Group].
Figure 10SEM images of a-C (5 nm)/Ni/Si after thermal processing at (a) 500 × and 12,000 × magnifications for the areas A (b) and B (c) showing a 3D porous structure; (d) typical Raman spectra at 442 nm taken in regions A and B. Raman mapping at 442 nm of the intensity ratio on 40 μm × 40 μm of (e) D/G and (f) 2D/G, respectively. The dashed lines are guides delimiting regions A and B [Reproduced from Tite et al. (2016) with permission of Elsevier].
Figure 11(A) Raman spectra of graphene films deposited on Ni/Si substrate at three different growth temperatures; (B) ID/IG and I2D/IG intensity ratios of graphene layers as a function of the growth temperature [Reproduced from Kumar et al. (2017) with permission of Springer]. (B) shows the ID/IG and I2D/IG ratios as a function of growth temperature. Clearly, the intensity ratios ID/IG and I2D/IG increased with the increase in growth temperature. The I2D/IG ratio for the graphene film deposited at 750°C was 0.15, confirming the formation of multi-layer graphene (7–8 layers). The I2D/IG ratio for graphene films grown at 800°C was 0.27, corresponding to few-layer graphene (4–5 layers).
Figure 12(A) Schematic image of the laser deposition system; steps (B–F) are used in few-layer graphene deposition [Reproduced from Dong et al. (2017) with permission of Springer].
Figure 13Raman spectra of samples with single- and bilayer catalysts deposited at 3 mJ [Reproduced from Dong et al. (2017) with permission of Springer].
Intensities and intensity ratios of D, G, and 2D peaks for films deposited on single- and bilayer Ni catalysts using laser energy of 3 mJ (Dong et al., 2017).
| 1 | 506 | 493 | 137 | 1.03 | 0.28 |
| 2 | 692 | 2,194 | 1,524 | 0.32 | 0.69 |
Figure 14(A) Raman spectra at 633 nm of methyl parathion (MP) on Au-fl-G concentrated at 10–5 M and 10–4 M at liquid and dry states. (B) Raman spectra at 633 nm of p-ATP(10–5 M) on Si, p-ATP(10–5 M) on AuNPs deposited on Si, fl-graphene, AuNPs/fl-G, and p-ATP on AuNPs/fl-G at different p-ATP concentration (10–6 M, 10–5 M, 10–4 M, 10–3 M) [Reproduced from Tite et al. (2016) with permission of Elsevier].
Figure 15Cyclic voltammograms of a 3D self-organized graphene of 0.5 mM ferrocene dimethanol solution in 0.1 M NaClO4 aqueous electrolyte. The two vertical dashed lines help read the theoretical ΔEp value of 59 mV (Reproduced from Fortgang et al. (2016) with permission of ACS Publications].
Figure 16Illustration of the two-step functionalization of a 3D graphene electrode: (Step 1) Electrochemical reduction through cyclic voltammetry of in situ generated diazonium salts for covalent immobilization of 4-ethynylphenyl moieties; (Step 2) CuI-catalyzed Huisgen 1,3-dipolar cycloaddition between the immobilized alkyne functions and the ferrocene derivatives bearing the corresponding azide group; CuI was obtained by reducing CuII with ascorbic acid [Reproduced from Fortgang et al. (2016) with permission of ACS Publications].