High-speed random access optical scanning using a linear MEMS phased array.

We demonstrate a high-speed linear microelectromechanical systems (MEMS) phase modulator capable of random access scanning at 350 kHz, so that any state can be accessed in 2.9 μs from any other state. 670 scan lines with a .87 deg field of view (FOV) are demonstrated in a Fourier regime, with a projected far-field response of 660 lines with an 18 deg FOV after magnification.