The effect of the conductivity of a film located near a piezoelectric resonator with a lateral electric field based on the PZT ceramics on its characteristics.

In this paper, we investigated theoretically and experimentally the effect of the conductivity of the film located in the immediate vicinity of the free side of a piezoelectric resonator based on the PZT ceramics on its characteristics. It is shown that with increasing the conductivity of the film at first the parallel resonant frequency does not change, then it decreases in a certain interval and after that remains practically constant. With increasing the width of the gap between the film and the resonator, the resonant frequency increases and reaches the saturation. At that the degree of the total frequency change decreases with decreasing the conductivity of the film. We also investigated the dependence of the maximum value of the real part of the electrical impedance on the film conductivity at the different values of the width of the gap between the film and the resonator. The dependences of the maximum value of the real part of the electrical impedance on the width of the gap between the film and the resonator are also obtained for different values of the film conductivity. A comparison of the theoretical and experimental data showed their good qualitative agreement.