Literature DB >> 30012591

Wafer-recyclable, environment-friendly transfer printing for large-scale thin-film nanoelectronics.

Dae Seung Wie1, Yue Zhang2, Min Ku Kim1, Bongjoong Kim1, Sangwook Park3, Young-Joon Kim4, Pedro P Irazoqui4,5,6, Xiaolin Zheng3, Baoxing Xu7, Chi Hwan Lee8,5,6.   

Abstract

Transfer printing of thin-film nanoelectronics from their fabrication wafer commonly requires chemical etching on the sacrifice of wafer but is also limited by defects with a low yield. Here, we introduce a wafer-recyclable, environment-friendly transfer printing process that enables the wafer-scale separation of high-performance thin-film nanoelectronics from their fabrication wafer in a defect-free manner that enables multiple reuses of the wafer. The interfacial delamination is enabled through a controllable cracking phenomenon in a water environment at room temperature. The physically liberated thin-film nanoelectronics can be then pasted onto arbitrary places of interest, thereby endowing the particular surface with desirable add-on electronic features. Systematic experimental, theoretical, and computational studies reveal the underlying mechanics mechanism and guide manufacturability for the transfer printing process in terms of scalability, controllability, and reproducibility.

Keywords:  Internet of Things; delamination; nondestructive wafer recycling; thin-film nanoelectronics; transfer printing method

Year:  2018        PMID: 30012591      PMCID: PMC6077709          DOI: 10.1073/pnas.1806640115

Source DB:  PubMed          Journal:  Proc Natl Acad Sci U S A        ISSN: 0027-8424            Impact factor:   11.205


  32 in total

1.  Large-scale, heterogeneous integration of nanowire arrays for image sensor circuitry.

Authors:  Zhiyong Fan; Johnny C Ho; Zachery A Jacobson; Haleh Razavi; Ali Javey
Journal:  Proc Natl Acad Sci U S A       Date:  2008-08-06       Impact factor: 11.205

2.  Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures.

Authors:  Kibum Kang; Kan-Heng Lee; Yimo Han; Hui Gao; Saien Xie; David A Muller; Jiwoong Park
Journal:  Nature       Date:  2017-09-20       Impact factor: 49.962

3.  Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics.

Authors:  Cheng-Wei Cheng; Kuen-Ting Shiu; Ning Li; Shu-Jen Han; Leathen Shi; Devendra K Sadana
Journal:  Nat Commun       Date:  2013       Impact factor: 14.919

4.  GaAs photovoltaics and optoelectronics using releasable multilayer epitaxial assemblies.

Authors:  Jongseung Yoon; Sungjin Jo; Ik Su Chun; Inhwa Jung; Hoon-Sik Kim; Matthew Meitl; Etienne Menard; Xiuling Li; James J Coleman; Ungyu Paik; John A Rogers
Journal:  Nature       Date:  2010-05-20       Impact factor: 49.962

5.  High Performance Ultrathin GaAs Solar Cells Enabled with Heterogeneously Integrated Dielectric Periodic Nanostructures.

Authors:  Sung-Min Lee; Anthony Kwong; Daehwan Jung; Joseph Faucher; Roshni Biswas; Lang Shen; Dongseok Kang; Minjoo Larry Lee; Jongseung Yoon
Journal:  ACS Nano       Date:  2015-09-16       Impact factor: 15.881

6.  Ultrathin compound semiconductor on insulator layers for high-performance nanoscale transistors.

Authors:  Hyunhyub Ko; Kuniharu Takei; Rehan Kapadia; Steven Chuang; Hui Fang; Paul W Leu; Kartik Ganapathi; Elena Plis; Ha Sul Kim; Szu-Ying Chen; Morten Madsen; Alexandra C Ford; Yu-Lun Chueh; Sanjay Krishna; Sayeef Salahuddin; Ali Javey
Journal:  Nature       Date:  2010-11-11       Impact factor: 49.962

7.  Activating and optimizing MoS2 basal planes for hydrogen evolution through the formation of strained sulphur vacancies.

Authors:  Hong Li; Charlie Tsai; Ai Leen Koh; Lili Cai; Alex W Contryman; Alex H Fragapane; Jiheng Zhao; Hyun Soon Han; Hari C Manoharan; Frank Abild-Pedersen; Jens K Nørskov; Xiaolin Zheng
Journal:  Nat Mater       Date:  2015-11-09       Impact factor: 43.841

8.  Single-crystalline germanium nanomembrane photodetectors on foreign nanocavities.

Authors:  Zhenyang Xia; Haomin Song; Munho Kim; Ming Zhou; Tzu-Hsuan Chang; Dong Liu; Xin Yin; Kanglin Xiong; Hongyi Mi; Xudong Wang; Fengnian Xia; Zongfu Yu; Zhenqiang Jack Ma; Qiaoqiang Gan
Journal:  Sci Adv       Date:  2017-07-07       Impact factor: 14.136

9.  High-Speed Scalable Silicon-MoS2 P-N Heterojunction Photodetectors.

Authors:  Veerendra Dhyani; Samaresh Das
Journal:  Sci Rep       Date:  2017-03-10       Impact factor: 4.379

10.  Heterojunction hybrid devices from vapor phase grown MoS2.

Authors:  Chanyoung Yim; Maria O'Brien; Niall McEvoy; Sarah Riazimehr; Heiko Schäfer-Eberwein; Andreas Bablich; Ravinder Pawar; Giuseppe Iannaccone; Clive Downing; Gianluca Fiori; Max C Lemme; Georg S Duesberg
Journal:  Sci Rep       Date:  2014-06-26       Impact factor: 4.379

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  7 in total

1.  Programmable and scalable transfer printing with high reliability and efficiency for flexible inorganic electronics.

Authors:  Chengjun Wang; Changhong Linghu; Shuang Nie; Chenglong Li; Qianjin Lei; Xiang Tao; Yinjia Zeng; Yipu Du; Shun Zhang; Kaixin Yu; Hao Jin; Weiqiu Chen; Jizhou Song
Journal:  Sci Adv       Date:  2020-06-17       Impact factor: 14.136

2.  Protocol on the fabrication of monocrystalline thin semiconductor via crack-assisted layer exfoliation technique for photoelectrochemical water-splitting.

Authors:  Yonghwan Lee; Bikesh Gupta; Hark H Tan; Chennupati Jagadish; Jihun Oh; Siva Karuturi
Journal:  STAR Protoc       Date:  2022-01-07

3.  Controlled self-assembly of block copolymers in printed sub-20 nm cross-bar structures.

Authors:  Tae Wan Park; Young Lim Kang; Myunghwan Byun; Suck Won Hong; Yong-Sik Ahn; Junghoon Lee; Woon Ik Park
Journal:  Nanoscale Adv       Date:  2021-08-02

4.  Fabrication of a 100 × 100 mm2 nanometer-thick graphite pellicle for extreme ultraviolet lithography by a peel-off and camphor-supported transfer approach.

Authors:  Ki-Bong Nam; Qicheng Hu; Jin-Ho Yeo; Mun Ja Kim; Ji-Beom Yoo
Journal:  Nanoscale Adv       Date:  2022-08-09

Review 5.  Sensors Made of Natural Renewable Materials: Efficiency, Recyclability or Biodegradability-The Green Electronics.

Authors:  Benoît Piro; Hoang Vinh Tran; Vu Thi Thu
Journal:  Sensors (Basel)       Date:  2020-10-19       Impact factor: 3.576

6.  Thermally assisted nanotransfer printing with sub-20-nm resolution and 8-inch wafer scalability.

Authors:  Tae Wan Park; Myunghwan Byun; Hyunsung Jung; Gyu Rac Lee; Jae Hong Park; Hyun-Ik Jang; Jung Woo Lee; Se Hun Kwon; Seungbum Hong; Jong-Heun Lee; Yeon Sik Jung; Kwang Ho Kim; Woon Ik Park
Journal:  Sci Adv       Date:  2020-07-29       Impact factor: 14.136

Review 7.  Layer-Scale and Chip-Scale Transfer Techniques for Functional Devices and Systems: A Review.

Authors:  Zheng Gong
Journal:  Nanomaterials (Basel)       Date:  2021-03-25       Impact factor: 5.076

  7 in total

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