| Literature DB >> 30012591 |
Dae Seung Wie1, Yue Zhang2, Min Ku Kim1, Bongjoong Kim1, Sangwook Park3, Young-Joon Kim4, Pedro P Irazoqui4,5,6, Xiaolin Zheng3, Baoxing Xu7, Chi Hwan Lee8,5,6.
Abstract
Transfer printing of thin-film nanoelectronics from their fabrication wafer commonly requires chemical etching on the sacrifice of wafer but is also limited by defects with a low yield. Here, we introduce a wafer-recyclable, environment-friendly transfer printing process that enables the wafer-scale separation of high-performance thin-film nanoelectronics from their fabrication wafer in a defect-free manner that enables multiple reuses of the wafer. The interfacial delamination is enabled through a controllable cracking phenomenon in a water environment at room temperature. The physically liberated thin-film nanoelectronics can be then pasted onto arbitrary places of interest, thereby endowing the particular surface with desirable add-on electronic features. Systematic experimental, theoretical, and computational studies reveal the underlying mechanics mechanism and guide manufacturability for the transfer printing process in terms of scalability, controllability, and reproducibility.Keywords: Internet of Things; delamination; nondestructive wafer recycling; thin-film nanoelectronics; transfer printing method
Year: 2018 PMID: 30012591 PMCID: PMC6077709 DOI: 10.1073/pnas.1806640115
Source DB: PubMed Journal: Proc Natl Acad Sci U S A ISSN: 0027-8424 Impact factor: 11.205