Literature DB >> 30002853

Erratum: Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum.

Mika Pflüger1, Victor Soltwisch1, Jürgen Probst2, Frank Scholze1, Michael Krumrey1.   

Abstract

[This corrects the article DOI: 10.1107/S2052252517006297.].

Keywords:  GISAXS; beam footprint; gratings; grazing-incidence small-angle X-ray scattering; lithographic inspection

Year:  2018        PMID： 30002853      PMCID： PMC6038946          DOI： 10.1107/S2052252518008497

Source DB:  PubMed          Journal:  IUCrJ        ISSN： 2052-2525            Impact factor:   4.769


In the article by Pflüger et al. (2017 ▸), there is an error in equation (5) (§2, p. 433). The arcsin function should be arctan. The corrected equation thus reads
  1 in total

1.  Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams.

Authors:  Mika Pflüger; Victor Soltwisch; Jürgen Probst; Frank Scholze; Michael Krumrey
Journal:  IUCrJ       Date:  2017-05-24       Impact factor: 4.769
  1 in total

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