Development and Performance Analysis of Carbon Nanowall-Based Mass Sensor.

In this study, a mass sensor was fabricated using a carbon nanowalls, and its performance was analyzed. The substrate that was used to fabricate the mass sensor was a polyimide film, on which a SiO2 insulating layer and a copper electrode were deposited using an RF magnetron sputter. Thereafter, a carbon nanowalls was grown on the substrate until its size was 5 by 5 mm. The growth times of the completely grown carbon nanowalls were 20, 25, and 30 minutes, respectively. The performance of the mass sensors fabricated based on different carbon nanowalls grown for various growth times was analyzed according to the changing mass from 1 to 5 mg.