| Literature DB >> 29606846 |
Yousuf Almoallem1, Hongrui Jiang2.
Abstract
We demonstrate the design methodology, geometrical analysis, device fabrication, and testing of a double-sided design (DSD) of tunable-focus dielectrophoretic liquid miniature lenses. This design is intended to reduce the driving voltage for tuning the lens, utilizing a double-sided electrode design that enhances the electric field magnitude. Fabricated devices were tested and measurements on a goniometer showed changes of up to 14° in the contact angle when the dielectrophoretic force was applied under 25 Vrms. Correspondingly, the back focal length of the liquid lens changed from 67.1 mm to 14.4 mm when the driving voltage was increased from zero to 25 Vrms. The driving voltage was significantly lower than those previously reported with similar device dimensions using single-sided electrode designs. This design allows for a range of both positive and negative menisci dependent on the volume of the lens liquid initially dispensed.Entities:
Keywords: MEMS actuator; dielectrophoretic; electrohydrodynamic; miniature lens; optofluidics; tunable lens
Year: 2017 PMID: 29606846 PMCID: PMC5875936 DOI: 10.1109/JMEMS.2017.2711966
Source DB: PubMed Journal: J Microelectromech Syst ISSN: 1057-7157 Impact factor: 2.417