Accuracy enhanced and synthetic wavelength adjustable optical metrology via spectrally resolved digital holography.

This paper demonstrates the usefulness of spectrally resolved digital holography for dual-wavelength optical metrology. Based on the large degree of phase information available, multiple de-correlated dual-wavelength phase maps can be generated, which, when averaged, result in a signal-to-noise-ratio improvement. Compared with single-wavelength averaging, no further post-processing of the reconstructed dual-wavelength phase map is required. Moreover, the constraint imposed on the wavelength stability, as experienced in the conventional dual-wavelength method, can be relaxed, and the corresponding synthetic wavelength is adapted to the object under investigation. In addition, the possibility of optical sectioning based on the narrow-width coherence envelope is also demonstrated in transmission mode.