Effect of grinding parameters on surface roughness and subsurface damage and their evaluation in fused silica.

Based on micro-indentation mechanics and kinematics of grinding processes, theoretical formulas are deduced to calculate surface roughness (SR) and subsurface damage (SSD) depth. The SRs and SSD depths of a series of fused silica samples, which are prepared under different grinding parameters, are measured. By experimental and theoretical analysis, the relationship between SR and SSD depth is discussed. The effect of grinding parameters on SR and SSD depth is investigated quantitatively. The results show that SR and SSD depth decrease with the increase of wheel speed or the decrease of feed speed as well as cutting depth. The interaction effect between wheel speed and feed speed should be emphasized greatly. Furthermore, a relationship model between SSD depth and grinding parameters is established, which could be employed to evaluate SSD depth efficiently.