Silicon photonic integrated circuit for fast and precise dual-comb distance metrology.

We demonstrate an optical distance sensor integrated on a silicon photonic chip with a footprint of well below 1 mm2. The integrated system comprises a heterodyne receiver structure with tunable power splitting ratio and on-chip photodetectors. The functionality of the device is demonstrated in a synthetic-wavelength interferometry experiment using frequency combs as optical sources. We obtain accurate and fast distance measurements with an unambiguity range of 3.75 mm, a root-mean-square error of 3.4 µm and acquisition times of 14 µs.