Two-dimensional grating guided-mode resonance tunable filter.

A two-dimensional (2D) grating guided-mode resonance (GMR) tunable filter is experimentally demonstrated using a low-cost two-step nanoimprinting technology with a one-dimensional (1D) grating polydimethylsiloxane mold. For the first nanoimprinting, we precisely control the UV LED irradiation dosage and demold the device when the UV glue is partially cured and the 1D grating mold is then rotated by three different angles, 30°, 60°, and 90°, for the second nanoimprinting to obtain 2D grating structures with different crossing angles. A high-refractive-index film ZnO is then coated on the surface of the grating structure to form the GMR filter devices. The simulation and experimental results demonstrate that the passband central wavelength of the filter can be tuned by rotating the device to change azimuth angle of the incident light. We compare these three 2D GMR filters with differential crossing angles and find that the filter device with a crossing angle of 60° exhibits the best performance. The tunable range of its central wavelength is 668-742 nm when the azimuth angle varies from 30° to 90°.