An ionization gauge for ultrahigh vacuum measurement based on a carbon nanotube cathode.

This work reports on the complete design and the properties of an ionization gauge based on a carbon nanotube cathode, which can measure ultrahigh vacuum without thermal effects. The gauge is composed of a pressure sensor and an electronic controller. This pressure sensor is constructed based on a hot-cathode ionization gauge, where the traditional hot filament is replaced by an electron source prepared with multi-wall nanotubes. Besides, an electronic controller was developed for bias voltage supply, low current detection, and pressure indication. The gauge was calibrated in the pressure range of 10-8 to 10-4 Pa in a XHV/UHV calibration apparatus. The gauge shows good linear characteristics in different gases. The calibrated sensitivity is 0.035 Pa-1 in N2, and the standard deviation of the sensitivity is about 1.1%. In addition, the stability of the sensitivity was learned in a long period. The standard deviation of the sensitivity factor "S" during one year is 2.0% for Ar and 1.6% for N2.