Beam shaping with tip-tilt varifocal mirror for indoor optical wireless communication.

MEMS mirrors are currently used in many applications to steer beams of light. An area of continued research is developing mirrors with varifocal capability that allows the beam to be shaped and focused. In this work, we study the varifocal capability of a 380 μm diameter, thermally actuated MEMS mirror with a ± 40° tip-tilt angle and a radius of curvature between -0.48 mm to 20.5 mm. Light is coupled to the mirror via a single mode optical fiber, similar to an indoor optical wireless communication architecture. The performance of the mirror is characterized with respect to (1) the profile of the reflected beam as the mirror deforms and (2) the mirror's impact when integrated into an optical communication system. We found that the mirror can focus light to a beam with a 0.18° half-angle divergence. Additionally, the ability to change the shape of fiberized light from a wide to narrow beam provides an unmatched level of dynamic control and significantly improves the bit error rate in an optical communication system.