Vertex radius of curvature error measurement of aspheric surface based on slope asphericity in partial compensation interferometry.

Vertex radius of curvature (VROC) is an important shape parameter used to determine the properties of an optical aspheric surface. Precise measurement of VROC error is critical for manufacturing and aligning optical aspheric surfaces. This paper introduces VROC error measurement of aspheric surface by using slope asphericity with partial compensation interferometry. VROC error and the decoupled surface figure error (SFE) can be simultaneously measured. Experimental results indicate that the method exhibits relative measurement accuracy of 0.01% when the nominal VROC is 889 mm, and the decoupled SFE error is λ/10 of the peak-to-valley value.