| Literature DB >> 28699346 |
Chen Yang1,2, Robert Winkler3, Maja Dukic2, Jie Zhao1, Harald Plank3,4, Georg E Fantner2.
Abstract
Focused electron beam induced deposition (FEBID) has been demonstrated as a promising solution for synthesizing truly three-dimensional (3D) nanostructures. However, the lack of morphological feedback during growth complicates further development toward higher spatial fabrication precision. Here, we show that by combining in situ high speed atomic force microscopy (HS-AFM) with FEBID, morphologies in multistep fabrication process can be accessed. More importantly, the proposed method enables simultaneous imaging and fabrication operation, which opens new possibilities to investigate evolving mechanical properties of the deposit. The experiments indicate an exponential increase law of the mechanical resistance, meaning that a mechanically stable state establishes around 4 min after deposition.Entities:
Keywords: evolving dynamics; focused electron beam induced deposition; high-speed atomic force microscopy; in situ characterization; morphology feedback
Year: 2017 PMID: 28699346 DOI: 10.1021/acsami.7b07762
Source DB: PubMed Journal: ACS Appl Mater Interfaces ISSN: 1944-8244 Impact factor: 9.229