Highly efficient evaluation of a gas mixer using a hollow waveguide based laser spectral sensor.

This paper aims to provide a fast, sensitive, and accurate characterization of a Mass Flow Controller (MFC) based gas mixer. The gas mixer was evaluated by using a hollow waveguide based laser spectral sensor with high efficiency. Benefiting from the sensor's fast response, high sensitivity and continuous operation, multiple key parameters of the mixer, including mixing uncertainty, linearity, and response time, were acquired by a one-round test. The test results show that the mixer can blend multi-compound gases quite efficiently with an uncertainty of 1.44% occurring at a flow rate of 500 ml/min, with the linearity of 0.998 43 and the response time of 92.6 s. The results' reliability was confirmed by the relative measurement of gas concentration, in which the isolation of the sensor's uncertainty was conducted. The measured uncertainty has shown well coincidence with the theoretical uncertainties of the mixer, which proves the method to be a reliable characterization. Consequently, this sort of laser based characterization's wide appliance on gas analyzer's evaluations is demonstrated.