Controlling periodic ripple microstructure formation on 4H-SiC crystal with three time-delayed femtosecond laser beams of different linear polarizations.

The control of laser-induced periodic ripple microstructures on 4H-SiC crystal surface is studied using temporally delayed collinear three femtosecond laser pulse trains linearly polarized in different directions. The ripple orientation appears to develop independent of the individual laser polarizations and exhibits non-monotonical change with variable time delays, whose variation tendency is also affected by the polarization intersection angles. Remarkably, the ripple period is observed to transfer from high- to low-spatial-frequency regions, accompanied by distinctly improved morphological uniformity and clearness. The results are satisfactorily interpreted based on a physical model of the surface wave excitation on a transient index metasurface, which is confirmed by further experiments. Our investigations indicate that transient noneqilibrium dynamics of the material surface provides an effective way to manipulate the laser-induced microstructures.