High resolution and stability roll angle measurement method for precision linear displacement stages.

A method for high resolution roll angle measurement of linear displacement stages is developed theoretically and tested experimentally. The new optical configuration is based on a special differential plane mirror interferometer, a wedge prism assembly, and a wedge mirror assembly. The wedge prisms assembly is used as a roll angle sensor, which converts roll angle to the changes of optical path. The special interferometer, composed a polarization splitter plane, a half wave plate, a beam splitter, a retro-reflector and a quarter wave plate, is designed for high resolution measurement of the changes of the optical path. The interferometric beams are a completely common path for the adoption of the centrosymmetrical measurement structure, and the cross talk of the straightness, yaw, and pitch errors is avoided. The angle measurement resolution of the proposed method is 3.5 μrad in theoretical with a phase meter which has a resolution of 2π/512. The experimental result also shows the great stability and accuracy of the present roll angle measurement system.