Electrochemical micro/nano-machining: principles and practices.

Micro/nano-machining (MNM) is becoming the cutting-edge of high-tech manufacturing because of the increasing industrial demand for supersmooth surfaces and functional three-dimensional micro/nano-structures (3D-MNS) in ultra-large scale integrated circuits, microelectromechanical systems, miniaturized total analysis systems, precision optics, and so on. Taking advantage of no tool wear, no surface stress, environmental friendliness, simple operation, and low cost, electrochemical micro/nano-machining (EC-MNM) has an irreplaceable role in MNM. This comprehensive review presents the state-of-art of EC-MNM techniques for direct writing, surface planarization and polishing, and 3D-MNS fabrications. The key point of EC-MNM is to confine electrochemical reactions at the micro/nano-meter scale. This review will bring together various solutions to "confined reaction" ranging from electrochemical principles through technical characteristics to relevant applications.