Authors: Donald R Baer; Kateryna Artyushkova; C Richard Brundle; James E Castle; Mark H Engelhard; Karen J Gaskell; John T Grant; Richard T Haasch; Matthew R Linford; Cedric J Powell; Alexander G Shard; Peter M A Sherwood; Vincent S Smentkowski Journal: J Vac Sci Technol A Date: 2019 Impact factor: 2.427