| Literature DB >> 27960452 |
Jingbo Sun1, Tianboyu Xu1, Natalia M Litchinitser1.
Abstract
The emergence of optical metamaterials opens new opportunities for spatial pattern compression from the micro- to nanoscale. By exploiting strongly anisotropic optical properties of engineered nanostructures, we realize the first experimental demonstration of demagnifying hyperlens enabling optical patterning below the diffraction limit. We show that the diffraction-limited features on a mask can be demagnified to form the subwavelength patterns on the photoresist using visible light.Keywords: Hyperlens; diffraction limit; hyperbolic metamaterials; lithography
Year: 2016 PMID: 27960452 DOI: 10.1021/acs.nanolett.6b04175
Source DB: PubMed Journal: Nano Lett ISSN: 1530-6984 Impact factor: 11.189