| Literature DB >> 27878010 |
Tao Liu1, Dierk Raabe1, Stefan Zaefferer1.
Abstract
We have studied the nucleation and growth processes in a chemical vapor deposition (CVD) diamond film using a tomographic electron backscattering diffraction method (3D EBSD). The approach is based on the combination of a focused ion beam (FIB) unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.Entities:
Keywords: 3D EBSD; CVD diamond films; FIB; dislocation density; growth; nucleation; twinning
Year: 2008 PMID: 27878010 PMCID: PMC5099667 DOI: 10.1088/1468-6996/9/3/035013
Source DB: PubMed Journal: Sci Technol Adv Mater ISSN: 1468-6996 Impact factor: 8.090