X-ray reflectivity imager with 15 W power X-ray source.

X-ray reflectivity is usually used for the routine analysis of layered structures of uniform thin films. So far, the technique has some limitations in the application to more practical inhomogeneous/patterned samples. X-ray reflectivity imaging is recently developed technique and can give the reconstructed image from many X-ray reflection projections. The present article gives the instrumental details of the compact X-ray reflectivity imager. Though the power of X-ray source is only 15 W, it works well. The calibration of the system has been discussed, because it is particularly important for the present grazing incidence geometry. We also give a visualization example of the buried interface, physical meaning of the reconstructed image, and discussions about possibilities for improvement.