Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer.

A method to reduce the residual stress of support arms in an optical interrogated micromechanical accelerometer is proposed in order to enhance the linearity of the scale factor of the accelerometer. First, the behavior of residual stress in support arms is analyzed in detail, and the simulation of shape curvature caused by residual stress in aluminum-made support arms is completed using finite element analysis. Then, by comparing two different materials of support arms (aluminum-made and silicon-made support arms), a modified fabrication is introduced in order to reduce the unexpected residual stress in support arms. Finally, based on contrast experiments, the linearity of the scale factor of accelerometers with aluminum-made and silicon-made support arms is measured using the force feedback test system, respectively. Results show that the linearity of the scale factor of the accelerometer with silicon-made support arms is 0.85%, which is reduced about an order of magnitude compared to that of the accelerometer with aluminum-made support arms with the linearity of scale factor of 7.48%; linearity enhancement of the scale factor is validated. This allows accuracy improvement of the optical interrogated micromechanical accelerometer in the application of inertial navigation and positioning.