Gain-compensated sinusoidal scanning of a galvanometer mirror in proportional-integral-differential control using the pre-emphasis technique for motion-blur compensation.

We propose a method to achieve precise sine-wave path tracking for real-time motion-blur compensation to extend the corresponding frequency spectrum in proportional-integral-differential (PID) control by using a pre-emphasis technique. We calculate pre-emphasis coefficients in advance to follow a sine wave with a gain of 0 dB and multiply the input signal by these pre-emphasis coefficients. In experiments, we were thus able to extend the greatest frequency from 100 to 500 Hz and achieve gain improvement of approximately 3 dB at 400 and 500 Hz. For the application of inspection, we confirmed that motion blur is significantly reduced when the system operates at high frequency, and we achieved a responsiveness 3.3 times higher than that of our previous system.