New vibration-assisted magnetic abrasive polishing (VAMAP) method for microstructured surface finishing.

In order to polish microstructured surface without deteriorating its profile, we propose a new vibration-assisted magnetic abrasive polishing (VAMAP) method. In this method, magnetic force guarantees that the magnetic abrasives can well contact the microstructured surface and access the corners of microstructures while vibration produces a relative movement between microstructures and magnetic abrasives. As the vibration direction is parallel to the microstructures, the profile of the microstructures will not be deteriorated. The relation between vibration and magnetic force was analyzed and the feasibility of this method was experimentally verified. The results show that after polishing, the surface finish around microstructures was significantly improved while the profile of microstructures was well maintained.