Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration.

Electrostatically actuated deformable mirrors with four concentric annular electrodes can exert independent control over defocus as well as primary, secondary, and tertiary spherical aberration. In this paper we use both numerical modeling and physical measurements to characterize recently developed deformable mirrors with respect to the amount of spherical aberration each can impart, and the dependence of that aberration control on the amount of defocus the mirror is providing. We find that a four-zone, 4 mm diameter mirror can generate surface shapes with arbitrary primary, secondary, and tertiary spherical aberration over ranges of ±0.4, ±0.2, and ±0.15  μm, respectively, referred to a non-normalized Zernike polynomial basis. We demonstrate the utility of this mirror for aberration-compensated focusing of a high NA optical system.