| Literature DB >> 27330850 |
Nicholas Sharp1, John D Fassett2, David S Simons1.
Abstract
Entities:
Year: 2016 PMID: 27330850 PMCID: PMC4907327 DOI: 10.1116/1.4942612
Source DB: PubMed Journal: J Vac Sci Technol B Nanotechnol Microelectron ISSN: 2166-2746