Literature DB >> 27250385

At-wavelength metrology facility for soft X-ray reflection optics.

A Sokolov1, P Bischoff1, F Eggenstein1, A Erko1, A Gaupp1, S Künstner1, M Mast1, J-S Schmidt1, F Senf1, F Siewert1, Th Zeschke1, F Schäfers1.   

Abstract

A new Optics Beamline coupled to a versatile UHV reflectometer is successfully operating at BESSY-II. It is used to carry out at-wavelength characterization and calibration of in-house produced gratings and novel nano-optical devices as well as mirrors and multilayer systems in the UV and XUV spectral region. This paper presents most recent commissioning data of the beamline and shows their correlation with initial beamline design calculations. Special attention is paid to beamline key parameters which determine the quality of the measurements such as high-order suppression and stray light behavior. The facility is open to user operation.

Year:  2016        PMID: 27250385     DOI: 10.1063/1.4950731

Source DB:  PubMed          Journal:  Rev Sci Instrum        ISSN: 0034-6748            Impact factor:   1.523


  4 in total

1.  Efficient high-order suppression system for a metrology beamline.

Authors:  A Sokolov; M G Sertsu; A Gaupp; M Lüttecke; F Schäfers
Journal:  J Synchrotron Radiat       Date:  2018-01-01       Impact factor: 2.616

2.  Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra-precise gratings at Helmholtz Zentrum Berlin.

Authors:  F Siewert; B Löchel; J Buchheim; F Eggenstein; A Firsov; G Gwalt; O Kutz; St Lemke; B Nelles; I Rudolph; F Schäfers; T Seliger; F Senf; A Sokolov; Ch Waberski; J Wolf; T Zeschke; I Zizak; R Follath; T Arnold; F Frost; F Pietag; A Erko
Journal:  J Synchrotron Radiat       Date:  2018-01-01       Impact factor: 2.616

3.  Diffraction gratings metrology and ray-tracing results for an XUV Raman spectrometer at FLASH.

Authors:  Siarhei Dziarzhytski; Frank Siewert; Andrey Sokolov; Grzegorz Gwalt; Tino Seliger; Michael Rübhausen; Holger Weigelt; Günter Brenner
Journal:  J Synchrotron Radiat       Date:  2018-01-01       Impact factor: 2.616

4.  Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask.

Authors:  Dakui Lin; Zhengkun Liu; Kay Dietrich; Andréy Sokolov; Mewael Giday Sertsu; Hongjun Zhou; Tonglin Huo; Stefanie Kroker; Huoyao Chen; Keqiang Qiu; Xiangdong Xu; Franz Schäfers; Ying Liu; Ernst Bernhard Kley; Yilin Hong
Journal:  J Synchrotron Radiat       Date:  2019-08-16       Impact factor: 2.616

  4 in total

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