Subhajit Biswas1, Jessica Doherty1, Dzianis Saladukha2,3, Quentin Ramasse4, Dipanwita Majumdar5, Moneesh Upmanyu6, Achintya Singha5, Tomasz Ochalski2,3, Michael A Morris7, Justin D Holmes1,7. 1. Materials Chemistry &Analysis Group, Department of Chemistry, Tyndall National Institute, University College Cork, Cork T12 YF78, Ireland. 2. Department of Photonics, Tyndall National Institute, University College Cork, Cork T12 R5CP, Ireland. 3. CAPPA, Cork Institute of Technology, Cork T12 T66T, Ireland. 4. SuperSTEM Laboratory, SciTech Daresbury Campus, Daresbury WA4 4AD, UK. 5. Department of Physics, Bose Institute, Kolkata 700009, India. 6. Group for Simulation and Theory of Atomic-Scale Material Phenomena (stAMP), Department of Mechanical and Industrial Engineering and Department of Bioengineering, Northeastern University, Boston, Massachusetts 02115, USA. 7. AMBER, CRANN, Trinity College Dublin, Dublin D02 R590, Ireland.
Abstract
The development of non-equilibrium group IV nanoscale alloys is critical to achieving new functionalities, such as the formation of a direct bandgap in a conventional indirect bandgap elemental semiconductor. Here, we describe the fabrication of uniform diameter, direct bandgap Ge(1-x)Sn(x) alloy nanowires, with a Sn incorporation up to 9.2 at.%, far in excess of the equilibrium solubility of Sn in bulk Ge, through a conventional catalytic bottom-up growth paradigm using noble metal and metal alloy catalysts. Metal alloy catalysts permitted a greater inclusion of Sn in Ge nanowires compared with conventional Au catalysts, when used during vapour-liquid-solid growth. The addition of an annealing step close to the Ge-Sn eutectic temperature (230 °C) during cool-down, further facilitated the excessive dissolution of Sn in the nanowires. Sn was distributed throughout the Ge nanowire lattice with no metallic Sn segregation or precipitation at the surface or within the bulk of the nanowires. The non-equilibrium incorporation of Sn into the Ge nanowires can be understood in terms of a kinetic trapping model for impurity incorporation at the triple-phase boundary during growth.
The development of non-equilibrium group IV nanoscale alloys is critical to achieving new functionalities, such as the formation of a direct bandgap in a conventional indirect bandgap elemental semiconductor. Here, we describe the fabrication of uniform diameter, direct bandgap Ge(1-x)Sn(x) alloy nanowires, with a Sn incorporation up to 9.2 at.%, far in excess of the equilibrium solubility of Sn in bulk Ge, through a conventional catalytic bottom-up growth paradigm using noble metal and metalalloy catalysts. Metalalloy catalysts permitted a greater inclusion of Sn in Ge nanowires compared with conventional Au catalysts, when used during vapour-liquid-solid growth. The addition of an annealing step close to the Ge-Sn eutectic temperature (230 °C) during cool-down, further facilitated the excessive dissolution of Sn in the nanowires. Sn was distributed throughout the Ge nanowire lattice with no metallic Sn segregation or precipitation at the surface or within the bulk of the nanowires. The non-equilibrium incorporation of Sn into the Ge nanowires can be understood in terms of a kinetic trapping model for impurity incorporation at the triple-phase boundary during growth.
Direct bandgap semiconductor materials are needed for new device architectures such as
band-to-band tunnelling tunnel FETs1, optical interconnects2 and for the development of group IV photonics34 because these
technological modules are based on the direct transition of carriers between energy
bands. However, a major problem arises with bulk Si and Ge in photonics, optoelectronics
and tunnel FETs devices as they are indirect bandgap semiconductors, that is, the
lowest-energy transition from the valence to the conduction band involves a change in
crystal momentum5. Although highly doped, tensile strained Ge results in
enhanced direct gap light emission, due to raising of the Fermi level, the doping levels
and induced strain required are not practical for many post-CMOS devices.
III–V compound semiconductors, for example InP, GaAs, InAs and so on, offer a
solution for integrating direct bandgap materials as on-chip photonic and electronic
components. However, the monolithic integration of direct bandgap group IV semiconductor
materials is expected to lead to lower production costs and higher reliability than
hybrid III–V-on-Si approaches6. Sn-based group IV alloys are
predicted to be tunable direct gap semiconductor materials7. Apart from
the direct transition of carriers, group IV alloy systems have also been predicted to
exhibit high electron and hole mobilities, and low-carrier effective masses, making them
ideal material platforms for co-integration of optoelectronic and high-speed electronic
devices7.Considering group IV elements, on moving from Si to Ge to Sn, the conduction band at
k=0 drops in energy until, in grey tin, the material acquires a
direct (and vanishing) bandgap at k=0 (ref. 5). A direct band system from group IV elements is likely to require the
presence of Sn89. Especially for Ge, the small energy separation of
140 meV between the indirect (L) and direct (Γ) conduction band
valleys can be overcome by alloying with Sn. Theoretical modelling10 as
well as photoluminescence experimental studies11 have found unstrained
Ge1−Sn to transition to a direct
bandgap material at an alloy composition of no less than 6.5 at.%
Sn, although some contradiction regarding this value exists61213,
with the range of Sn incorporation to obtain a direct band transition predicted to be
between 6.5 and 10 at.%. However, fundamental challenges (low
solubility, metallic Sn segregation, lattice mismatch and so on) restrict the growth of
Sn-based Si and Ge alloys with a high Sn content (>8 at.%)
in any nanoform, for example, thin film, nanowire and so on1415.In recent years, considerable effort has been used to grow
Ge1−Sn films on Si substrates, where
the lattice mismatch with Si is fully relieved by periodic misfit dislocations at the
interface with no dislocations into the films16. Recent advances in
chemical vapour deposition (CVD) techniques have made it possible to grow binary
Ge1−Sn and ternary
SiGeSn1
group IV thin film semiconductor alloys using low-temperature epitaxy171819. However, minimal effort has been applied to fabricate group IV
direct bandgap materials in one-dimensional (1D) nanoform to keep on track with the
miniaturization of Si-based nanoelectronics and to take advantage of their 1D geometry
for new age field-effect transistor (FET) devices (finFET, gate-all-around FET and so
on). Top-down processing to fabricate good quality (single crystalline, straight,
uniform diameter nanowire with no Sn segregation)
Ge1−Sn nanowires is limited due
to under-developed surface and etch chemistries, although encouraging results
(with∼8 at.% Sn incorporation) were recently reported on
the fabrication of suspended GeSn nanowires through competitive etching between
Ge1−Sn and Ge layers2021. Using bottom-up growth paradigms, Ge and GeSn nanowires were
synthesized by utilizing low-melting point Snmetal catalysts, but these techniques
produced nanowires either with insufficientSn incorporation22 or low
quality (bending and kinking) crystals with non-significant luminescence23.On the basis of thermodynamic limitations, a non-equilibrium growth scenario influenced
by the kinetics of the system is required to incorporate a sufficient amount, far from
equilibrium, of Sn into a 1D Ge lattice to achieve a direct bandgap transition. The
triple-phase boundary at the catalyst-nanowire interface in a bottom-up growth process
is known to be a feasible pathway for impurity incorporation in a 1D lattice and can act
as a localized non-equilibrium centre for excessive impurity dissolution2425. A kinetics-dependent framework was predicted to be responsible for
the extraordinary incorporation of impurity adatoms from the catalyst tip.Here, we report the application of a three-phase bottom-up growth protocol to fabricate
highly crystalline, uniform diameter, direct bandgap
Ge1−Sn nanowires with
considerable (x>0.09) Sn incorporation; around 10 times the equilibrium
solubility. Third-party metal catalysts (Au or AuAgalloy) were used to guide the
non-equilibrium incorporation of Sn adatoms into the precipitated Ge bi-layers, where
the impurity Sn atoms become trapped with the deposition of successive layers, thus
giving an extraordinary Sn content in the alloy nanowires.
Results
Growth of group IV alloy nanowires
Participation of Au and AuAgalloy seeds in the bottom-up growth of Ge nanowires
has been well-documented by our group in previous reports262728. Similarly, for the growth of
Ge1−Sn nanowires, we
have used dodecanethiol-stabilized phase pure Au and
Au0.90Ag0.10 alloy nanoparticles29.
These small colloidal alloy nanoparticles were deposited onto silicon (001)
substrates (with native oxide) and dried at 180 °C under
vacuum, leading to the desorption of the surfactant molecules from the surface
of the particles30. A liquid-injection CVD technique, using
toluene as the solvent phase, was adopted for growing the
Ge1−Sn nanowires at
440 °C on the surface of Si(001) substrates. Diphenylgermane
was used as the Ge source, whereas allyltributylstannane was used as the tin
precursor. Similar decomposition kinetics and solubility of the tin and
germanium precursors provoked the choice of diphenylgermane and
allyltributylstannane, where the Sn precursor has a slightly higher boiling
point (360 °C at atm. pressure) than the Ge precursor
(325 °C at atm. pressure). The choice of Au and AuAg
catalysts and the growth temperature was driven by the Au-Ge and Au-Ag-Ge phase
diagrams30, where a faster growth rate of Ge nanowires is
expected using AuAg catalysts27. A faster Ge growth rate provides
the opportunity to incorporate more Sn into the Ge lattice, with less chance of
segregating on the surface or within the bulk31. At our growth
temperature (440 °C) Au-Sn or Ag-Sn phase diagrams predict
the formation of eutectic liquid alloys (Au-Sn-Ge or AuAg-Sn-Ge) with enormous
Sn intakes in the catalyst, without any window for the precipitation of Sn
layers32.Both Au and AuAg nanoparticles successfully catalysed the growth of Ge nanowires
after a 2 h time period, as determined by scanning electron
microscopy (see Fig. 1a,b). The absence (or very little
amount) of particulate deposits, as a byproduct, on the nanowire surfaces and
within the samples in general, verifies the controlled growth of the nanowires.
The grown nanowires were straight without any observed kinks, bends or curling.
A Ge and Sn precursor mixture containing 15 at.% Sn was
used as the injection solution for the growth of the nanowires shown in Fig. 1a,b. The lengths of the nanowires grown from both Au
and AuAg seeds were in the order of 1–3 μm,
whereas their diameters were between 30–70 nm; with a mean
diameter of 45.3 and 38.5 nm for Au and AuAg-seeded nanowires,
respectively. The bright-field transmission electron microscopy (TEM) image in
Fig. 1c confirms the participation of catalytic
vapour–liquid–solid (VLS) nanowire growth, as the
dark-contrasted partially spherical metal seed can be seen at the tip of the
nanowire in the image. A thin amorphous shell can also be observed on top of the
nanoparticle seed, but the nanowire diameter is determined by the dimension of
the metal seed at the tip. A flat interface was observed after growth between
the nanoparticle seed and nanowire, without any lateral side facets at the
tri-junction. The nanowires were fairly straight, with no or very little
indication of tapering from the seed to the end of the nanowire as shown in the
dark-field scanning TEM (STEM) image in Fig. 1d. Metal
seeds at the nanowire tips were pinned at the interface, where the contact angle
between the interface and the edge of the seed was larger than in the growth of
Ge nanowires with Au or AuAg seeds2728, due to the relatively
low surface energy of Sn-rich metal catalyst seeds. Participation of different
growth regime with foreign Au and AuAgmetal catalysts was confirmed by the fact
that nanowires synthesized without any noble metal seeds, that is, self-seeded
growth from Sn seeds, resulted in the formation of very short nanowires
(200–300 nm in length), with prominent tapering from the
seed-nanowire interface to the very end of the nanowire (Supplementary Fig. 1).
Figure 1
Morphological examination of alloy nanowires by electron microscopy.
SEM images of catalysed
Ge1−Sn nanowires grown
using 15 at.% of Sn containing solution with:
(a) Au (b) Au0.90Ag0.10 catalysts
(scale bar, 1 μm). TEM image in c confirms the
participation of VLS growth mechanism with dark-contrast spherical seed at
the tip of the nanowire with AuAg catalysts from precursor solution
containing 15 at.% Sn. Scale bar, 100 nm.
HAADF STEM image in d confirms uniform nanowire diameter along the
length with negligible tapering. Scale bar, 1 μm.
Elemental analysis of alloy nanowires through EDX
As the primary objective of this work was to fabricate direct bandgap
Ge1−Sn nanowires with a
high Sn content, it is essential to explore the quantitative and qualitative
incorporation of Sn in the nanowire body. Energy-dispersive x-ray (EDX) analysis
and high-resolution electron energy loss spectroscopy (EELS) provide the means
to investigate the chemical environment in the bulk of the alloy nanowire and
also at the atomic scale. The composition of the nanowires and the distribution
of elements within them were estimated through EDX point measurements and
elemental mapping by STEM. For nanowires grown from pure Au catalysts, the
amount of Sn in the injecting solution was varied from
10–20 at.%, resulting in a gradual increase in
the actual Sn concentration in the nanowires. Very low amounts of Sn (mean
concentration of 1.5 at.%) was determined in nanowires
using an injecting solution of 10 at.% Sn. Increasing the
Sn concentration in the injecting solution to 15 and
20 at.% resulted in the incorporation of Sn in the
nanowires at levels of 6 and 9 at.%, respectively. These
values of Sn concentrations are much higher (almost 6 and 9 times) than the
extrapolated bulk equilibrium solid solubility of Sn in Ge31.
Although a higher assimilation of Sn in the Ge nanowires was achieved with an
injection solution of 20 at.% Sn, this high Sn
concentration also resulted in homogeneous nucleation of metallic Sn as
spherical clusters (Supplementary Fig.
2). Hence, under our reaction conditions, an initial Sn concentration
of 15 at.% was determined to be ideal to obtain
Ge1−Sn nanowires with
substantial Sn incorporation and with negligible secondary nucleation of
unwanted spherical particulates in the sample. With the aim of including more Sn
into the 1D Ge lattice, Au0.90Ag0.10 alloy nanoparticle
catalysts were used as seeds rather than pure Au, as the alloy seeds have been
previously shown to favour faster growth kinetics for phase pure Ge nanowire
growth27. To avoid spherical metallic Sn clusters in the
sample, injection solutions with 15 at.% of Sn were used.
A slight increase in the Sn incorporation in the Ge nanowires from 6.0
(±0.5) to 6.6 (±0.6) at.% (error bars are
defined in Method section) was observed when using AuAgalloy rather than pure
Au seeds, respectively. For an accurate estimation of the amount of Sn included
in each nanowire sample, EDX point measurements were performed on 50 different
nanowires and mean values computed. An example of a point EDX measurement taken
of a Ge1−Sn nanowire grown from
AuAg seed is shown in Supplementary Fig.
3. The distribution of Sn in the alloy nanowires grown with AuAg seeds
was uniform along the length and width of the nanowires, without any segregation
near the catalyst-nanowire interface or at the nanowire surfaces (Supplementary Figs 3 and 4). Elemental EDX
mapping from a AuAg-seeded
Ge1−Sn nanowire also
confirmed uniform Sn distribution in the entire nanowire volume (Supplementary Fig. 5). The uniform axial and
radial distribution of Sn and the minimal tapering of our nanowires also rules
out the diffusion of Sn through the nanowire sidewalls as a possible
incorporation mechanism. The strong incorporation and uniform distribution of Sn
atoms confirms the continuous dissolution of Sn atoms throughout the growth
process at the seed-nanowire growth interface.To achieve a higher concentration of Sn in the
Ge1−Sn nanowires, a step
cooling method was utilized, where the initial injection of the solution at the
growth temperature (440 °C) was followed by an annealing step
for 2 h at 230 °C during the cool-down. Motivation
to introduce a step cooling at 230 °C was driven by two
reasons: a small window in the Sn-rich side of the Au-Sn phase diagram at
230 °C and the bulk Ge-Sn eutectic temperature at around
230 °C. This step cooling technique further forces a colossal
amount of Sn (an example is shown in Fig. 2a), with an
average concentration of 9.2 (±0.8) at.% (with a AuAg
growth promoter and 15 at.% Sn injecting solution), into
the nanowire while keeping the nanowire morphology intact (scanning electron
microscopy image in Supplementary Fig.
6). The extraordinary amount of Sn incorporation as measured via EDX
analysis was also supported through x-ray diffraction measurements (Supplementary Fig. 7). The amount
of Sn in the nanowires was calculated as 9.8% from Vegard's
law which is an empirical law that relates the substitution of a guest ion into
the host lattice with the experimentally observed degree of lattice change. A
plot showing the mean Sn concentration in
Ge1−Snalloy nanowires
as a function of different growth conditions can be seen in Fig.
2b. To confirm the homogeneity of Sn dissolution in the nanowire,
that is, to rule out the formation of Sn precipitates or cluster formation in
the core or on the surfaces of the nanowires after step annealing, EDX elemental
mapping was performed on Ge1−Sn
nanowires with the highest Sn incorporation, that is, a mean concentration of
9.2 at.%. Elemental mapping of a particular nanowire with
a Sn concentration of 9.4 at.% is shown in Fig. 2c. The elemental maps show a homogeneous distribution of Sn in
the core of the nanowires without any surface segregation or precipitation near
the seed-nanowire interface after step annealing at 230 °C. A
high density of Sn was observed at the spherical tips of the nanowires, as
confirmed from EDX mapping in Fig. 2c and the linescan in
Fig. 2d, confirming the participation of a Sn-rich
alloy seed (Sn alloyed with Au or AuAg) in VLS nanowire growth. An elemental EDX
linescan of Ge and Sn along the nanowire axis clearly demonstrated the
homogeneity of Sn incorporation along the nanowire length even after the step
annealing process, thus confirming the continuous dissolution of Sn throughout
the nanowire length (part of Fig. 2d). The uniformity of
Sn dissolution in the alloy nanowires at the highest average Sn concentration
was further confirmed through EDX point scans at different lengths along the
nanowires (Supplementary Fig. 8).
Even the radial Sn concentration detected by EDX demonstrates (Supplementary Fig. 9 shows the radial line
profile for a nanowire selected from the sample with highest Sn content, that
is, with step-down cooling) a flat profile (U-shape profile indicates surface
segregation), thus again indicating uniform distribution of Sn without any
clustering of Sn near nanowire side facets.
Figure 2
EDX analysis of Ge1−Sn
nanowires.
(a) EDX spectrum recorded from the body of an alloy nanowire (selected
from the sample with 9.2 at.% average Sn
incorporation) showing the presence of both Ge and Sn. This particular
nanowire is shown in b. Scale bar, 50 nm. Variations in Sn
concentration with different catalysts and growth conditions are
demonstrated in c. Error bar indicates s.d. in EDX measurements
measured over 50 nanowires. (d) Dark-field HAADF image and EDX
mapping for Ge and Sn in a
Ge1−Sn
nanowire with 9.4 at.% of Sn. HAADF image with the
uniform distribution of Ge and Sn and Sn-rich catalyst is confirmed from EDX
mapping and also from HAADF image and EDX linescan in e. Red curve
denotes linescan for Ge, whereas green curve for Sn. Scale bar, 50 and
100 nm in d and e, respectively.
Atomic resolution Sn mapping through EELS
The uniform distribution of Sn atoms throughout the nanowires also suggests a
single-atomic pathway for Sn impurity incorporation. The local distribution of
Sn in the nanowires is a fine criterion to determine impurity incorporation and
diffusion modes in the nanowires. The possible formation of Sn precipitates in
the nanowire bulk or near the nanowire surface suggests multiple impurity
incorporation pathways where the impurities are diffused to the preferred
lattice sites such as crystal defects. Also, the formation of local metallic Sn
segments and Sn–Sn dimers could quench efficient emission from these
materials due to the creation of dark trapping sites for charge carriers. To
confirm the sparse distribution of Sn in the Ge lattice of the nanowires, we
have probed the spatial arrangement of Sn through high-resolution EELS, in a
STEM. The spatial arrangement of dissolved Sn in a nanowire sample with the
highest Sn incorporation (mean concentration of 9.2 (±0.8)
at.%), as determined by EDX measurements were traced (error bars are
defined in the Methods section). Two EELS maps were acquired at two vastly
different heights along the wires, to make sure Sn was not only present at
certain areas of each nanowire, such as close to the catalyst. Maps were
de-noised by principal components analysis and the background was removed by
fitting a power law over a region immediately in front of the core loss edges.
The signal was then integrated over a 120 eV window above the onset
of the Sn M4,5 and Ge L2,3 edges. HAADF images and the
corresponding EELS chemical profile recorded from the rectangular box region are
depicted in Fig. 3a,b. The HAADF survey image in Fig. 3a was acquired from the bulk of the nanowire to avoid
strongly oxidized edges (and the overlap with the Sn edge) and the HAADF image
shown in Fig. 3b was acquired closer to the edge of the
wire. Both data sets were representative of the whole nanowire. Atomically
resolved EELS spectral images highlight the incorporation of Sn in the core of
the Ge nanowires. The sparse distribution of Sn in the Ge host lattice is
clearly observed in the lattice-resolved EELS maps. No apparent sign of Sn
precipitation was detected in the nanowires from EELS mapping, thus confirming
the distribution of Sn atoms throughout the
Ge1−Sn 1D lattice. The
Sn EELS M-edge is quite delocalized, thus making it very difficult to resolve Sn
as part of the Ge-Sn dumb-bell due to inelastic scattering. A single Sn atom
will look blurry and delocalized, especially when the maps are taken over
relatively thick regions of the wires as the Sn atom may be buried deep inside
the lattice and further scattering will give the impression of a poor image. So
the proximity effect of Sn atoms in the lattice may represent as Sn clusters in
high-resolution mapping (Fig. 3a,b) with a smaller field
of view. Low-resolution EELS mapping from
Ge1−Sn nanowires also
confirmed the sparse distribution of Sn without any formation of metallic Sn
hotspots (Supplementary Fig. 10).
Hence Sn was distributed uniformly throughout the lengths of the nanowires, but
randomly at the atomic scale (as seen in Fig. 2 and Supplementary Fig. 10), without any
phase separation. To assess precisely the catalyst-nanowire interface sharpness,
EELS chemical maps (recorded from the rectangular red box denoted in the HAADF
image attached to the map) and profiles were recorded by moving the electron
probe serially across the interface along the line indicated by the black arrow
and recording the Ge L2,3 and Sn M4,5 EELS edges (Fig. 3c). The red shaded area in the linescan (Fig. 3d) corresponds to the same spatial extent indicated on
the HAADF image. EELS spectral images for Ge an Sn and chemical line-profiles
confirm the very Sn-rich composition of the catalyst seed with sharp composition
variation at the seed-nanowire interface. The oscillations of the integrated
EELS intensities follow the oscillations of the simultaneously recorded HAADF
signal, in both the nanowire and in the seed regions. Random, non-uniform
fluctuation of the Sn signal in the line-profiles of the nanowire region also
suggests random Ge1−Snalloy
formation with high Sn incorporation. The frequency of the HAADF oscillation
signal increased in the catalyst thus confirming a much narrower interplanar
spacing in the lattice of the catalyst than the nanowire. Abrupt composition
fluctuations at the seed-nanowire interface confirmed a continuous trapping and
dissolution process for Sn impurity incorporation rather than a Sn layer
precipitation and diffusion process.
Figure 3
High-resolution EELS mapping of
Ge1−Sn
nanowires.
Unprocessed HAADF survey image recorded from the centre (a) and near
the edge (b) of a
Ge1−Sn nanowire with a
Sn incorporation of 9 at.% (area of interest
highlighted). Corresponding EELS map for Ge and Sn is also attached along
with the simultaneously acquired HAADF image (green: Ge and orange: Sn). For
the EELS map, after de-noising by principal components analysis, the
background was removed by fitting a power law over a region immediately in
front of the core loss edges. The signal was then integrated over a
120 eV window above the onsets of the Sn
M and Ge L
edges. (c) HAADF survey image of a seed-nanowire interface region
with the Ge and Sn EELS map recorded from the highlighted region. Panel
d shows a linescan acquired subsequently in the same region. The
red shaded area in the linescan corresponds to the same spatial extent
indicated on the HAADF image. Scale bar, 2 nm for all the HAADF
images.
Structural characterization of nanowires via STEM and HRTEM
Impurity atoms (Sn in our case) in nanowires can induce structural defects, such
as twins and stacking faults and these defects can act as preferential sites for
subsequent impurity accumulation33. In other scenarios,
pre-formed stacking faults in nanowires due to interface engineering, can also
act as preferred sites for the segregation of foreign atoms from catalyst
nanoparticles34. Hence, it is very important to probe the
structural quality of the alloy nanowires to estimate the mode for impurity
incorporation in Ge. Also nanowires with defects are not suitable for
nanoelectronic devices as stacking faults and twin boundaries can encourage
electron scattering35. A bright-field high-resolution TEM (HRTEM)
image (Fig. 4a) confirms the high crystallinity of a
single Ge1−Sn nanowire with a
9.2 at.% Sn incorporation and with a
2–3 nm amorphous oxide coating. Fast Fourier transform
(FFT) analysis showed a pseudo hexagonal symmetry and the reflections can be
assigned to the high-order Laue zone diffraction of {111} and {002} planes in
group IV crystals36. FFT and HRTEM images depict an interplanar
spacing (d) between {111} planes in the nanowire to be
0.323 nm, which is very close to the d value for bulk diamond
Ge crystal (JCPDS 04–0545). An increase in the d value from
bulk Ge is expected with the incorporation of large amounts of Sn in Ge lattice.
However this discrepancy may arise from the fact that this particular nanowire
could only be aligned to a relatively minor zone axis. Fig.
4b shows a high-resolution STEM image of another nanowire from the
sample with the highest Sn incorporation using the HAADF mode. The image was
recorded with <110> zone axis alignment. Generally, the crystal
structure of the Ge1−Snalloy
nanowires, with various Sn incorporations, exhibited a bulk diamond cubic
crystal structure with a 3C lattice arrangement without any stacking faults and
twin boundaries, with <111> being the dominant growth direction.
Although there is a large lattice mismatch between the components (Ge and Sn) of
the alloy31, the epitaxial mismatch in the nanowires is
compensated by elastic deformation near the hetero-interface and relieved at the
nanowire surfaces37, thus maintaining highly crystalline
nanowires. The liquid eutectic catalyst at the tip of the nanowires can also
naturally accommodate elastic strain. Atomic-scale randomness in Sn
incorporation in the Ge lattice, as observed through EELS mapping, can generate
varied local lattice distortion and spacing at an Ångström
scale. To compensate the effect of random alloying on the d value, we
have calculated the inter planner spacing of 50 successive lattice planes (over
>15 nm length) and determined the average d value to be
0.331 nm, which is slightly above the bulk 3C-Ge value (Supplementary Fig. 11). Bright-field STEM
imaging (Fig. 4c) of the interface between the
Ge1−Sn nanowires and the
metallic tips confirmed the sharp nature of the interface, with no tailing
effect or segregation of metal at the interface. For STEM imaging, stacks of
images were acquired sequentially at high scanning speed to minimize drift and
instabilities and were aligned and summed for a high signal-to-noise ratio. An
atomic resolution view of a catalyst-nanowire interface area, indicated by the
blue box in Fig. 4c, is depicted in the HAADF image in the
inset of Fig. 4c. The sharp contrast in the HAADF
intensity at the interface clearly suggests the abrupt nature of the interface.
A lattice spacing of 0.26 nm was measured at the metallic tip which
is relatively close to metallic Sn (JCPDS cards #04–0673),
thus further confirming the formation of a Sn-rich alloy at the tip.
Figure 4
Structural study of alloy nanowires with HRTEM and STEM.
(a) HRTEM image of highly crystalline
Ge1−Sn nanowire
(9.2 at.% Sn incorporation). Scale bar,
5 nm. FFT pattern in the inset confirms the crystallinity and
growth orientation of the alloy nanowire. (b) Lattice-resolved STEM
HAADF image recorded from the core of the alloy nanowire showing the single
crystalline nature with an inter-planer spacing of 0.33 nm. Scale
bar, 2 nm. (c) High-resolution HAADF image of a
seed-nanowire interface (magnified image in the inset) shows abrupt
catalyst-nanowire interface with no precipitation of metallic Sn. Scale bar,
2 and 1 nm for the inset.
Raman spectroscopy on alloy nanowires
Raman scattering is an effective tool to estimate the structural and chemical
environment in the core of a nanowire. Raman spectroscopy was used to accurately
probe the local chemical bonding environment and also to estimate the amount of
Sn in the alloy nanowire samples. Figure 5a shows the
Raman spectra of alloy nanowires with different Sn concentrations and for
reference a spectrum from bulk Ge. The strong peak around
302 cm−1 in bulk Ge is attributed to the
Ge-Ge LO mode. The Ge-Ge Raman peak progressively shifts to a lower energy with
increasing Sn concentration (as determined by EDX measurements). A red shift of
1.2 to 5.9 cm−1 of the Ge-Ge LO mode was
observed for a variation in the Sn concentration from 1.5 to
9.2 at.%, compared with bulk Ge. We could not compare the
Raman shift with a sample of pure Ge nanowires, as the similar growth conditions
without any Sn yielded Ge nanowires of entirely different dimensions and
morphology27. In the alloy nanowires, apart from the Ge-Ge LO
peak, additional modes due to Ge-Sn bonds appeared at around
260 cm−1, as shown in Fig. 5b. The presence of a Ge-Sn vibrational mode indicates the
formation of Ge1−Sn alloys,
where an increase in the intensity ratio between Ge-Sn and Ge-Ge LO modes with
increasing Sn content, implies a larger substitution of Sn in the Ge lattice for
Ge1−Sn nanowires. The
origin of the Ge-Ge frequency shift in the Raman spectra of the
Ge1−Sn alloys is due to
compositional variations and strain effects. Participation of compressive and
tensile strain towards the Raman shift is not justified for nanowire samples, as
due to the large surface area, strain can be effectively released for these
nanostructures. Compositional variations can originate from two factors: (i)
mass disorder and (ii) bond distortion. The Ge-Ge LO mode progressively shifts
towards a lower frequency with an increasing Sn concentration as displayed in
the inset of Fig. 5a. We have fitted the Raman peak shift
(Δω) against Sn composition (x), as
determined through EDX analysis, with a linear expression,
ω(x)=ω0+Δωx,
and the obtained value of Δω was found to be
−(64.3±0.1) cm−1. This value is
consistent with the value of—(68±5)
cm−1 reported by Li et al., who assumed that
their alloy films were completely strain free38. The linear
correlation between the Raman peak shift and the Sn concentration (determined by
EDX) in the alloy nanowires further validates the high Sn content in
Ge1−Sn nanowires.
Compared with a few other recent reports, a discrepancy in the
Δω value and Raman shift is observed for the
9.2 at.% Sn containing nanowire sample with a relatively
smaller shift in the Ge-Ge LO peak2139. This downshift in Raman
frequency may arise from the random alloying affect38, instead of
a spontaneous ordering, as observed in our nanowire sample through
high-resolution EELS and TEM measurement.
Figure 5
Confirmation of Ge1−Sn alloy
formation with Raman analysis.
Raman spectra of bulk Ge and
Ge1−Sn nanowires (where
x=0.06 and 0.092) within the range (a)
280–310 cm−1 and
(b) 200–320 cm−1.
Vertical line in b represents position of Ge-Sn vibration. The inset
of a shows the downshift of Ge-Ge LO mode as a function of Sn
percentage. Experimental data are represented with dots which fits (straight
line) well with the linear expression,
ω(x)=ω0+Δωx.
Photoluminescence study of Ge1−Sn
nanowires
As there are contradictions regarding the amount of Sn needed in
Ge1−Sn thin films and
bulk alloy to obtain a direct bandgap, it is essential to investigate the
emission characteristics of strain free bottom-up grown
Ge1−Snalloy nanowires.
Bandgap information on Ge1−Sn
alloys was extracted through photoluminescence measurements at low temperature.
A photoluminescence study to probe the bandgap characteristics of
Ge1−Sn nanowire samples
was conducted on samples cooled to 7 K, using a He cryostat.
Photoluminescence spectra of two nanowire samples (with an average Sn
concentration of 6 and 9.2 at.%) recorded at
7 K is shown in Fig. 6a. The photoluminescence
spectrum for the nanowire sample with the relatively low Sn content
(6 at.%) exhibited a main peak which corresponds to the
direct energy gap emission, at a wavelength of around 2,200 nm, with
a broad line-width (232 nm) of the emission spectrum. The direct peak
is due to the strong radiative recombination of the direct bandgap transition.
At this Sn content, separate peaks due to direct and indirect transitions cannot
be clearly identified due to the reduced energy difference between the direct
and indirect bandgap, resulting in only a single peak with broad line-width
(232 nm) and tailing. A large amount of Sn in the
Ge1−Snalloy nanowires
resulted in the reduction of the bandgap energy difference between the direct
and indirect transition, which was approximately 0.14 eV in bulk Ge.
Nanowire samples containing a high Sn content (9.2 at.%)
exhibited a single photoluminescence emission peak centred at
2,233 nm (band gap (Eg) around 0.55 eV), with a
relatively narrow line-width (202 nm) compared with the
photoluminescence plot from the low Sn content
Ge1−Sn nanowire sample.
The relatively narrower line-width of the photoluminescence emission confirms
the single energy emission at the Γ point40. Typically,
a photoluminescence emission with a broad line-width is observed in indirect
bandgap alloys with a high Sn content due to the amalgamation of the indirect
valley and the direct peak into a single broad emission. However, for our
Ge1−Sn nanowires, with
9.2 at.% Sn incorporation, the direct band-to-band
transition resulted in relatively narrow photoluminescence emission, compared
with the broad emission from
Ge1−Snalloy nanowires
incorporating 6 at.% Sn. A single peak with a relatively
narrow line-width could signify emission from only the direct bandgap transition
rather than unification of both direct and indirect transitions. The low
photoluminescence emission intensity observed from the nanowire samples could be
due to the luminescence quenching from metallic Sn impurities, which are present
in the catalysts at the tip of the nanowires and also in negligible amounts as
spherical particles in samples. Also the high surface-to-volume ratio of
nanowires compared with thin films can account for the lower luminescence
intensity. Relatively broad photoluminescence spectra for both nanowire samples,
compared with previous reports, could result from the random distribution of Sn
in the alloys. Sn incorporation in the nanowire samples also showed a standard
deviation (around 1%) which may also account for the broadness of the
photoluminescence spectra obtained.
Figure 6
Optical emission characteristics of alloy nanowires.
(a) Photoluminescence spectra of
Ge1−Sn nanowires
(x=0.06 and 0.092) recorded at 7 K.
Broadened photoluminescence peak is observed for alloy nanowires with
x=0.06. Single emission with narrow line-width is
observed for Ge1−Sn
nanowires with x=0.092. (b) The Arrhenius plot from
9.2% Ge1−Sn
nanowires in agreement with single exponential decay of photoluminescence
intensity with temperature with the coefficient of determination close to
unity (R2=0.986). (c) A projection
(lines are only guide to eyes) of possible direct and indirect transition
pathway for different Sn compositions.
The position of the maximum in the direct energy emission from the
Ge1−Sn nanowires matched
well with the reported emission from alloy thin films and disks with similar Sn
incorporation (8–10 at.%)11214041. Specifically, the emission energy matched very well
with reported data for unstrained GeSn disks21. Emission from the
Ge1−Sn nanowires at low
temperature also complements the low temperature photoluminescence observation
from GeSn thin films40. Thin film samples with 8 and
9 at.% Sn showed similar broad peaks at 10 K,
which transformed to a single emission narrow peak with
10 at.% Sn in the film samples40. A shift
(around 0.01 eV) in the photoluminescence maximum to a lower energy
was also observed in the photoluminescence plots of our nanowire samples with an
increase in the average Sn concentration from 6 to
9.2 at.%. The shift in the photoluminescence peak energy
we observed for nanowire samples incorporating 6 and
9.2 at.% Sn was lower than has been reported for thin film
samples1141. However, the change in the bandgap of the
nanowire alloys with different compositions and morphologies will depend on hole
splitting, changes in effective mass, alloy broadening, band-tail states,
carrier lifetime and steady state carrier occupation. Also, the different
degrees of randomness in the alloys, which may be present between the 9.2 and
6 at.% samples (9.2 at.% samples had
an additional step cooling, leading to high degree of randomness as observed in
the EELS maps) can affect the band-structure and bandgap tuning. A comparison of
photoluminescence spectra at 77 K between pure Ge and
Ge1−Sn nanowires
(9.2 at.% Sn) show a massive red shift in the emission
wavelength with the inclusion of Sn (Supplementary Fig. 12). In order to achieve similar emission
intensity the excitation power in the case of Ge nanowires was 700 mW
in comparison with 30 mW for GeSn nanowire samples. The peak position
for the Ge nanowire samples was around 1,750 nm, which matches well
with the indirect bandgap of Ge, while for GeSn samples emission was at
2,150 nm.To predict the direct band transition, a temperature-dependent photoluminescence
study between 7 and 160 K was performed. An Arrhenius plot, depicting
integrated photoluminescence intensity as a function of inverted temperature is
shown in Fig. 6b (for 9.2 at.%) and
in Supplementary Fig. 13 (for
6 at.%). The photoluminescence of direct bandgap
semiconductors generally decreases in intensity with increasing temperature,
which can be attributed to a reduced transfer of electrons from the Γ
to L valleys by thermal activation442. Thus the increase in the
intensity of the photoluminescence peak with decreasing temperature for GeSn
nanowires is attributed to the higher population of the Γ valley. With
increasing temperature the fast diffusion of photocarriers toward surfaces and
interfaces leads to non-radiative surface and interface recombination,
respectively, reducing the radiative transition rate42.
Furthermore, we also observed broadening of the photoluminescence peak (Supplementary Fig. 12b) with
increasing temperature for
Ge1−Sn nanowires, which can
be ascribed to the temperature-dependent broadening of the Fermi distribution of
carriers within electron bands42. A methodology to discriminate a
direct from an indirect fundamental bandgap using temperature-dependent
photoluminescence measurements has been presented recently4. On
the basis of the same arguments, nanowire samples with 6 and
9.2 at.% Sn, manifested by monotonically increasing
photoluminescence intensity with decreasing temperature, is similar to
photoluminescence observed from direct bandgap III−V alloys or
dichalcogenides4344. A power-dependent photoluminescence
measurement of Ge1−Sn nanowires
(9.2 at.% Sn) (Supplementary Fig. 12c) depicts the evolution of photoluminescence
spectra from the GeSn nanowires under different excitation power densities at
77 K. For the lowest power
(P0=30 mW, enhanced in figure by a
factor of 300 for clarity) the photoluminescence peak position was around
2,150 nm. With increasing excitation (up to 16 P0)
spectral broadening was observed, coupled with a blue-shift of the
photoluminescence peak position. We attribute this change to carrier filling of
closely-spaced Γ and L energy bands. This shift was not observed in
the case of Ge nanowires within the scope of available excitation powers between
350 and 700 mW. In addition, in order to achieve similar
photoluminescence intensity from both Ge and
Ge1−Sn nanostructures
(Supplementary Fig. 12a), Ge
nanowires had to be excited with a laser power of 700 mW, while for
Ge1−Sn nanowires
30 mW excitation power was sufficient. This enhancement of a factor
greater than 20 yields provides further evidence to support the transition from
indirect to direct bandgap nanowires with increasing Sn incorporation.We have calculated the activation energies for non-radiative processes from
Arrhenius plots. The activation energy was found to increase with increasing
directness of the bandgap42. The decrease in the
photoluminescence intensity at high temperatures is due to an increase of the
non-radiative recombination affects, that is, the activation (deactivation)
energy values42. Experimental activation energy for
9.2 at.% nanowire samples, calculated from Arrhenius
plots, was 7 meV and for 6 at.% nanowire
samples was 3 meV. The activation energy value for the
9.2 at.% nanowire samples matches well with the reported
value for 12 at.% Sn incorporated thin film samples42, which have been designated in previous reports as direct
transitions. Furthermore, Arrhenius plots have been fitted with a single
exponential function. A coefficient of determination (R2)
close to unity, that is, for a good fit, indicates a single channel of
recombination, while poor fit indicates competitive transition channels. For
6 at.% Sn containing nanowire samples the value of
R2 was calculated to be 0.935 (Supplementary Fig. 13), while for the
9.2 at.% Sn incorporated nanowire samples
R2 values of 0.986 were obtained (Fig.
6b). This result indicates that a single charge carrier transition
mechanism dominates only for samples with a high Sn content (Fig.
6c). Although the current photoluminescence measurements indicate a
direct bandgap, further confirmation regarding the nature of the emission is
required, for example, including radiative rates and quantum efficiencies.
Spatial orientation, quantum confinement effects and the internal strain in
nanowires can strongly impact the electronic band-structure and bandgap
bowing45 of alloys at the nanoscale.
Discussion
Ge1−Sn nanowires fabricated with Au
and AuAg catalysts at 440 °C showed considerable incorporation of
Sn in the range around 6–9 at.%, much beyond the
bulk equilibrium solubility (around 1%)45. The
incorporation of Sn in the Ge nanowires through nanowire sidewalls due to
homoepitaxy and vapour–solid growth is negligible, as the nanowires were
not tapered and demonstrated a uniform radial Sn distribution, as determined by EDX
line-profiles (Supplementary Fig. 4).
A U-shape line profile with a larger Sn concentration at the edge of the nanowires
would have been observed for sidewall Sn incorporation. Size-dependent corrections
to the bulk phase diagram due to the influence of capillary forces and stress at the
nanoscale284647 results in significant undercooling of the
liquid droplet and can in principle alter the equilibrium content of Sn in Ge.
Calculations of the nanoscale equilibrium content of a solid impurity in a 1D
lattice, taking account of surface anisotropy and elastic stress, do not support a
large dissolution of impurity atoms much beyond equilibrium solubility25. Careful analysis of the Sn-rich portion of the ternary Au-Ge-Sn
phase diagram48 shows that for our growth conditions, at equilibrium
the Sn-rich (more than 90%) droplet has a Ge:Au ratio of close to unity
and the growth should occur via the invariant reaction U4:
L+AuSn2↔diamond
A4+AuSn4 mediated by the formation of AuSn intermetallic
phases. We did not observe the presence of these intermetallic phases within the
nanowire (EDX analysis in Supplementary Fig.
14 shows no traceable amount of Au or Ag in nanowires) or at the
hetero-interface through EDX and EELS observations, effectively ruling out
equilibrium growth. The droplet morphology/volume also did not change significantly
on varying the amount of Sn in the injecting solutions, as would have been expected
for near-equilibrium growth49. Also, the amount of Sn incorporated in
the nanowires increased on using AuAg catalysts which promotes faster Ge nanowire
growth kinetics than Au seeds27, thus underscoring the role of
kinetic factors in the non-equilibrium incorporation of Sn in Ge.Non-equilibrium induction of Sn impurity in the Ge host is justified through
diffusionless solute trapping at a finite growth velocity of the crystals. Solute
trapping is a process of solute redistribution at the interface resulting in an
increase of chemical potential and deviation of partition coefficient50. Local chemical equilibrium at the alloy solidification front at the liquid
(seed)–solid (nanowire) interface is relaxed due to a large interface
velocity resulting in kinetic interface undercooling. At a high solidification rate
at the catalyst-nanowire interface impurity adatoms can be trapped on the high
energy sites of the crystal lattice, leading to the formation of metastable solids;
for example Ge1−Sn with
non-equilibrium Sn content, at the nanowire growth front. The kinetic incorporation
of Sn is aided by the following factors: (i) Sn diffusion in Ge at the growth
conditions is negligible, (ii) the epitaxial mismatch between Sn and Ge results in
elastic strains at and near the catalyst-nanowire interface and (iii) the lack of
truncating side facets at the catalyst-particle interface. Assuming that growth of
the nanowire is layer by layer, the step flow kinetics can result in solute trapping
of Sn from the Sn-rich droplet. The deviation of chemical equilibrium at the
interface is influenced by the kinetic parameter, that is, interfacial diffusion
speed in this case. For bulk metal-semiconductor systems impurity trapping at the
liquid–solid interface is highly probable at a very high interface
velocity in the order of m sec−1 (ref. 51). However, in the 1D
Ge1−Sn nanoscale systems the
growth rate at the liquid–solid interface is only of the order of
nm sec−1. The growth velocity of
Ge1−Sn nanowires is much
lower
(∼0.5–1 nm sec−1)
than the growth velocity required for kinetic driven solute trapping. However, for
our particular system a much higher Sn concentration in the catalyst seed
(>90 at.%) than the impurity concentration in a typical
bulk solidification process and a continuous Sn flux throughout nanowire growth
could account for the high Sn incorporation34. In the nanoscale
system, where the crystal growth proceeds with the formation of steps at the
interface, impurity atoms remains frozen at the step edges on the formation of new
row of atoms25. Hence, impurity incorporation during nanowire growth
depends on the step velocity rather than on the interface velocity. With a high step
velocity, the time required for local impurity exchange at the catalyst-nanowire
interface decreases thus the rate of solute trapping increases in the nanowire. We
delegate a detailed model to a later study, but it is important to note that solute
trapping has been implicated in the catalyst incorporation of Al-catalysed growth of
Si nanowires25. A key difference, although, is that the equilibrium
Al-solubility in the Al-Si droplet is much smaller (<5%), unlike
the Sn-rich droplet that catalyses the growth of
Ge1−Sn nanowires. The high
Sn concentration around the growing steps is further aided by low Sn diffusivity
within the nanowire and along its sidewalls, and the kinetic pathway favors Sn
incorporation into the newly forming layer at the expense of elastic strains
relative to the pristine Ge crystal. The elastic strains can be effectively
accommodated by the Sn-rich droplet. Finally, at equilibrium the catalyst-nanowire
interface also involves truncating side facets52. These truncating
facets are absent in Ge1−Sn
nanowires and the interface is fully faceted which is indirect confirmation of the
elastic strains due to non-equilibrium Sn incorporation. As a result, the Sn
incorporation is uniform through the nanowire, as opposed to being localized at the
core or within a surface shell.Induction of Sn in the alloy nanowires is further encouraged with a 2 h
annealing at 230 °C, during the cooling down of nanowires (Supplementary Fig. 6). The choice of
the step cool-down process and temperature was driven by the existence of a small Sn
precipitation window at the lowest eutectic, near the Sn-rich side of the binary
bulk Au-Sn phase diagram32, at around
215–230 °C. The position and width of the Sn
precipitating window in the AuAg-Sn pseudo binary phase diagram was assumed from the
Au-Sn and Ag-Sn phase diagrams. This small window encourages further precipitation
of Sn from non-equilibrium Sn-rich eutectic Au-Sn and AuAg-Sn catalysts during the
annealing process. A deposition and dissolution based process could be responsible
for the increase in the Sn amount in the alloy nanowire, where a Sn precipitation
from the supersaturated catalyst drop is encouraged at 230 °C.
Precipitated tin from the supersaturated catalyst gets further dissolved into the Ge
nanowire host lattice at 230 °C due to the eutectic solubility.
Metastability and continuous dissolution of Sn in the Ge host is expected at the
eutectic temperature. A very large amount of Sn could be dissolved in the Ge lattice
in the metastable state as projected in the Ge-Sn phase diagram. So the coincidence
of the Sn precipitation from the seed droplet at 230 °C and
dissolution of this Sn in the Ge nanowires at the eutectic temperature (at
230 °C) encourages large homogeneous Sn influx into the nanowire.
Sn diffusion in Ge at 230 °C is negligible. So a diffusion
mediated incorporation process would have a large concentration of Sn near the
seed-nanowire interface, with a continuous drop in Sn concentration along the
nanowire length. Compositional analysis of 9.2 at.% sample
(grown following the step cool-down process) does not demonstrate this trend but
shows similar distribution of Sn along the length of nanowires (Supplementary Fig. 8). To confirm the
participation of the particular step-down temperature of 230 °C
in largeSn incorporation, nanowires were annealed during cool-down at four
different temperatures of 210, 220, 230 and 250 °C. However, only
those subsequently annealed at 230 °C displayed an increased Sn
incorporation, whereas no or negligible increase was observed for other temperatures
(Supplementary Fig. 15). So in the
step cool-down process, the coincidence of the lowest eutectic in AuAg-Sn system and
Ge-Sn system assists to increase the amount of Sn
(∼2.5 at.%) further beyond the capability of kinetic
trapping. Undercooling and the shift in the liquidus from their bulk counterpart for
nanoscale Ge-Sn systems may also be expected for Au-Sn and Ge-Sn binary phase
diagram.In summary, we have successfully fabricated a stable direct bandgap 1D
Ge1−Sn nanosystem, usually
metastable under thermodynamic equilibrium, compatible with existing Si electronics
platforms. Kinetic driven solute trapping model in a catalytic bottom-up growth with
noble metal catalysts facilitates the dissolution of high amounts of Sn into the
alloy nanowires. The sparse spatial distribution of Sn in the nanowires and the
formation of GeSn alloys in the nanowire cores were confirmed through atomic
resolution EELS mapping and Raman spectroscopy. The use of innovative AuAgalloy
catalysts, which enhances nanowire growth kinetics, facilitated larger incorporation
of Sn into the Ge1−Sn lattice than
pure Au catalyst. Calcination of the nanowires near Ge-Sn eutectic temperature
during the cool-down further aided Sn precipitation and dissolution to achieve
direct bandgap Ge1−Snalloy
(x=0.092) nanowires. Further manipulation of growth
temperature, choice of precursors and catalysts could lead towards
Ge1−Sn nanowires with
even a higher Sn content. Three-phase bottom-up growth is a feasible way to
incorporate large amount of impurities and dopants in semiconductor nanowires.
Demonstration of colossal incorporation of foreign atoms in the host semiconductor
lattice allows new or added functionalities (strain engineering, controlled defect
formation, band-structure modulation and so on) in the existing semiconductor
architecture. The demonstrated VLS process with its innovative catalyst and
precursors contributes towards the ongoing research on dopant/impurity incorporation
in nanowires by directly demonstrating kinetics-dependent tin incorporation in Ge
nanowire. The protocol demonstrated here is general and could be applied to other
doped or alloy nanowire systems (for example III–V nanowires, ternary
group IV alloy nanowires and so on) to create new and innovative nanomaterials for
novel physics and devices. This paper also addresses towards the ongoing demand for
a nanoscale material for group IV photonics. The demonstration of direct bandgap
silicon compatible nanowires will instigate a lot of initiative on fundamental
research on band-structure engineering of binary and ternary group IV alloy
nanowires and implementation of these nanoscale materials in photonic and electronic
devices. The great success of III–V quaternary semiconductors in
decoupling strain and band-structure effects suggests that ternary compounds should
have a similar impact in the group IV arena. Direct bandgap
Ge1−Snx nanowires fabricated through
a cheap and feasible bottom-up technique opens up unlimited possibilities in group
IV photonics, nanoelectronics and optoelectronics.
Methods
Nanowire growth
Continuous-flow reactions for nanowire growth were carried out in a toluene
medium using a liquid-injection CVD technique. Metal nanoparticles were
spin-coated onto a Si (001) substrate and loaded into a stainless steel micro
reactor cell, connected to metal tubing. The catalyst nanoparticle concentration
in each case was fixed at
40 μM cm−3.
Solutions of diphenylgermane and allyltributylstannane in anhydrous toluene were
prepared in an N2 glove box with a typical Ge precursor concentration
of 10 μM ml−1 and
varying Sn concentrations. The concentration of diphenylgermane in toluene was
fixed at 10 μM ml−1,
whereas tin precursor concentrations were varied from
1–2 μM ml−1
for the incorporation of different amounts of Sn in the
Ge1−Sn nanowires. A
precursor solution was loaded into a Hamilton sample-lock syringe inside a
nitrogen-filled glovebox. Before injection, the coated Si substrate was annealed
for 15 min at 440 °C under a flowing
H2/Ar atmosphere inside a tube furnace. The precursor solution was
then injected into the metal reaction cell using a high-pressure syringe pump at
a rate of 0.025 ml min−1. A
H2/Ar flow rate of
0.5 ml min−1 was maintained
during the entire growth period. A typical nanowire growth time was
2 h. An additional annealing step was also introduced during the
cool-down process where the substrate was kept at 230 °C for
2 h under a H2/Ar flowing atmosphere. The reaction cell
was allowed to cool to room temperature and disassembled to access the growth
substrate. Nanowires were washed with dry toluene and dried under N2
flow for further characterization.
Characterization
Bottom-up grown Ge1−Sn nanowires
were imaged on an FEI Helios NanoLab 600i scanning electron microscope. All EDX
measurements were recorded in high-angle annular dark-field mode in the FEI
Helios NanoLab 600i operating at 20 kV and 1.4 nA with an
attached Oxford X-Max 80 detector. Error in the EDX measurements indicates
standard deviation in EDX measurements measured over 50 nanowires. TEM analysis
was done in a JEOL JEM-2100 operating at 200 kV in bright-field
condition for imaging. High-resolution STEM imaging and EELS mapping was done
using Nion UltraSTEM100 microscope, operated at 100 kV. Probe-forming
optics were adjusted to deliver a 0.9 Å probe, with
120 pA beam current and 31 mrad convergence semi-angle.
EELS data was acquired on a Gatan Enfina spectrometer, at 1 eV per
channel to capture both the Sn and Ge edges simultaneously. As a result, the
effective energy resolution was limited to 2.5 eV by the detector
point spread function (∼3 pixels), even though the cold field emission
gun of the instrument had a native energy width of 0.35 eV in the
operating conditions. Raman scattering measurements were performed in a
backscattering geometry using a micro-Raman setup consisting of a spectrometer
(model LabRAM HR, Jobin Yvon) and a Peltier-cooled charge-coupled device
detector. An air cooled He-Ne laser of wavelength 633 nm was used as
an excitation source. The photoluminescence measurements were performed using a
confocal configuration. Samples were cooled to 7 K using a Helium
cryostat. A pulsed titanium-sapphire 800 nm laser was used as an
excitation source. Laser frequency was 76 MHz and pulse width was
300 fs. The laser beam was focused down to a
50 μm spot and the power was measured to be
500 mW. For temperature- and power-dependent experiments, the
structures were encased in a liquid He and liquid nitrogen cryostat,
respectively equipped with KBr window and cooled to desired temperature. The
photoluminescence emission was collected by a monochromator and then sent to a
thermoelectrically cooled, photoconductive, extended-range InGaAs detector,
sensitive in the mid-IR spectral range from 1.2 to 2.6 μm
and facilitated by CaF2 optical components. Lock-in and chopper was used as a
standard noise-cancellation tool.
Additional information
How to cite this article: Biswas, S. et al. Non-equilibrium induction
of tin in germanium: towards direct bandgap
Ge1−Sn nanowires. Nat.
Commun. 7:11405 doi: 10.1038/ncomms11405 (2016).
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