Enhancement of second-harmonic generation from silicon nitride with gold gratings.

We report strong enhancement of second-harmonic generation in a hybrid nanostructure with gold gratings embedded in a silicon nitride film. Compared to a flat silicon nitride film, the enhancement factor can be as large as 10² to 10³ for transverse magnetic and electric polarizations, respectively in good agreement with numerical results calculated using finite element method. For both polarizations, the enhancement arises from a resonance between the waveguide modes and grating.