Miniature all-silica fiber-optic sensor for simultaneous measurement of relative humidity and temperature.

This Letter presents a miniature fiber-optic sensor created at the tip of an optical fiber suitable for simultaneous measurement of relative humidity and temperature. The proposed sensor is based on two cascaded Fabry-Perot interferometers, the first configured as a relative humidity sensing element made from silica micro-wire coated with thin porous SiO2 layer, and the second as a temperature sensing element made from a segment of a standard single-mode fiber. The sensor has linear characteristics for both measurement parameters and a sensitivity of 0.48 deg/%RH and 3.7 deg/°C.