Mid-infrared wavelength multiplexer in InGaAs/InP waveguides using a Rowland circle grating.

We report the monolithic integration of a 15-channel multiplexer on indium phosphide. It covers the 7.1-to-8.5 µm wavelength range suitable for combining the outputs of several individual lasers. The fabrication is compatible with the growth of active layers, therefore enabling a fully integrate broadband laser source in the mid-infrared spectral range. Channels are accurately spaced in wavelength (97 nm) in good agreement with design.